220557 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibrating means; Beams Material
PIEZOELECTRIC RESONATOR
#2MEMS RESONATOR
#3Electromechanical resonators based on metal-chalcogenide nanotubes
#4High performance tunable filter
#5Resonance device
#6Electromechanical resonators based on metal-chalcogenide nanotubes
#7Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#8Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#9Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#10Mechanical resonator with a spring-mass system comprising a phase-change material
#11Ultra low power thermally-actuated oscillator and driving circuit thereof
#12Mechanical resonator with a spring-mass system comprising a phase-change material
#13Mechanical resonator with a spring-mass system comprising a phase-change material
#14Microelectromechanical resonator
#15Method of manufacturing a microelectromechanical system (MEMS) resonator
#16Resonator using carbon nano substance and method of manufacturing resonator
#17Method and system for forming resonators over CMOS
#18Method for fabricating a microelectromechanical system (MEMS) resonator
#19Techniques for adding compensating material(s) in semiconductor devices
#20Temperature stable MEMS resonator
#21Temperature stable MEMS resonator
#22Temperature stable MEMS resonator
#23Temperature stable MEMS resonator
#24Temperature stable MEMS resonator
#25Temperature compensated resonator with a pair of spaced apart internal dielectric layers