220560 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Suspension means Anchors for ring resonators
Sub-classes:MEMS Vibrating Ring Resonator with Deformable Inner Ring-Shaped Spring Supports
#2Apparatus and methods for photonic integrated resonant accelerometers
#3Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
#4Semiconductor device, a micro-electro-mechanical resonator and a method for manufacturing a semiconductor device
#5Hollow supports and anchors for mechanical resonators
#6Multiple coil spring MEMS resonator
#7Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator
#8Rotational MEMS resonator for oscillator applications
#9Nano scale resonator, nano scale sensor, and fabrication method thereof