220561 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Suspension means; Anchors for ring resonators applied along the periphery, e.g. at nodal points of the ring
Microelectromechanical system resonator devices and oscillator control circuits
#2Resonator device and method of optimizing a Q-factor
#3Micromechanical resonating devices and related methods
#4Frame-shaped MEMS piezoresistive resonator
#5Contour-mode piezoelectric micromechanical resonators
#6Resonator and periodic structure
#7Micromechanical resonating devices and related methods
#8Oscillating mass resonator
#9Contour-mode piezoelectric micromechanical resonators
#10Contour-Mode Piezoelectric Micromechanical Resonators
#11Resonator, oscillator and communication device
#12Resonator, oscillator, and communication apparatus
#13MEMS resonator array structure
#14Mechanical oscillator formed by a network of basic oscillators
#15Microelectromechanical resonator structure, and method of designing, operating and using same
#16Dielectrically transduced single-ended to differential MEMS filter
#17Method of forming an integrated MEMS resonator
#18MEMS resonator having an inner element and an outer element that flex
#19Breath-mode ring resonator structure, and method of designing, operating and using same
#20Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same
#21MEMS resonator array structure and method of operating and using same
#22Contour-mode piezoelectric micromechanical resonators
#23Contour-mode piezoelectric micromechanical resonators
#24Microelectromechanical resonator structure, and method of designing, operating and using same
#25Micromechanical resonator device having a desired mode shape
#26X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
#27Vertical differential resonator
#28Vertical differential resonator