H03H2009/0237 - CPC Classification Index

ClassID:

220563 ⎘

H03H2009/0237 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Suspension means; Folded-flexure applied at the center

Recent Application in this class:

20120105163

2012-05-03

Resonator device and method of optimizing a Q-factor

20110063052

2011-03-17

MEMS resonator

20100295632

2010-11-25

Resonators, resonator arrays, apparatus and methods

20100019869

2010-01-28

BULK MODE RESONATOR

20090315644

2009-12-24

HIGH-Q DISK NANO RESONATOR DEVICE AND METHOD OF FABRICATING THE SAME

20080284544

2008-11-20

MEMS filter device having a nanosize coupling element and manufacturing method thereof