220562 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Suspension means Folded-flexure
Sub-classes:Piezo-actuated MEMS
#2Piezo-actuated MEMS resonator with reduced nonlinear tcf
#3Resonant microelectromechanical sensor with improved operation
#4Piezo-actuated MEMS resonator
#5Micromechanical resonator having reduced size
#6Piezoelectric rotational MEMS resonator
#7Stacked balanced resonators
#8Piezo-actuated MEMS resonator with surface electrodes
#9Temperature-engineered MEMS resonator
#10OSCILLATING STRUCTURE AND OSCILLATOR DEVICE USING THE SAME