220579 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibration modes Horizontal, i.e. parallel to the substrate plane
Sub-classes:SELF-REFERENCING MICROELECTROMECHANICAL SYSTEMS (MEMS) RESONATOR WITH DUAL MECHANICAL MODES FOR TEMPERATURE-INDEPENDENT ENVIRONMENTAL SENSING
#2Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices
#3VIBRATOR DEVICE
#4Micromechanical resonator and resonator system including the same
#5Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
#6Coupled MEMS resonator
#7Resonance device
#8Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#9Coupled MEMS resonator
#10MEMS frequency-tuning springs
#11Mechanical resonator based cascadable logic device
#12Guided wave devices with selectively loaded piezoelectric layers
#13Distributed-mode beam and frame resonators for high frequency timing circuits
#14CO-INTEGRATED BULK ACOUSTIC WAVE RESONATORS
#15Microelectromechanical resonator system with improved stability with respect to temperature variations
#16Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#17Frequency compensated oscillator design for process tolerances
#18Frequency compensated oscillator design for process tolerances
#19Corner coupling resonator array
#20Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device
#21Signal processing apparatus and method for transmitting and receiving coherent parallel optical signals
#22MEMS resonator with a high quality factor
#23Transverse bulk acoustic wave filter
#24Resonator manufacturing method
#25Method for producing a batch of acoustic wave filters
#26Guided wave devices with selectively loaded piezoelectric layers
#27Guided wave devices with sensors utilizing embedded electrodes
#28Mixed domain guided wave devices utilizing embedded electrodes
#29Guided wave devices with embedded electrodes and non-embedded electrodes
#30Guided wave devices with selectively thinned piezoelectric layers
#31MEMS device
#32Semiconductor device, a micro-electro-mechanical resonator and a method for manufacturing a semiconductor device
#33Resonator element, resonator, resonator device, oscillator, electronic apparatus, and moving object
#34Resonator element, resonator, oscillator, electronic apparatus, and moving object
#35Co-integrated bulk acoustic wave resonators
#36Method of forming a resonator
#37Multiple coil spring MEMS resonator
#38Compound spring MEMS resonators for frequency and timing generation
#39Resonant circuit with variable frequency and impedance
#40Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations
#41Measurement system including a network of nanoelectromechanical system resonators
#42Method of manufacturing a temperature-compensated micro-electromechanical device
#43Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#44Frequency compensated oscillator design for process tolerances
#45Frequency compensated oscillator design for process tolerances
#46Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator
#47Microelectromechanical resonator
#48Rotational MEMS resonator for oscillator applications
#49Microelectromechanical resonators
#50Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures
#51Resonator
#52Resonator electrode shields
#53Device with suspended beam and piezoresistive means of detecting displacement of the beam and method of manufacturing the device
#54Micromechanical resonator and method for manufacturing thereof
#55Resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device
#56In-plane actuated resonant device and method of manufacturing the device
#57Self-polarized capacitive micromechanical resonator apparatus and fabrication method
#58Method of manufacturing a temperature-compensated micromechanical resonator
#59Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion
#60MEMS resonator and electrical device using the same
#61Switchable electrode for power handling
#62MEMS resonator
#63Method of manufacturing a microelectromechanical system (MEMS) resonator
#64MEMS resonator and method of controlling the same
#65Micromechanical Resonator
#66Temperature compensated oscillator including MEMS resonator for frequency control
#67Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body
#68Method of actuating an internally transduced pn-diode-based ultra high frequency micromechanical resonator
#69MEMS vibrating-beam accelerometer with piezoelectric drive
#70Optimal Leg Design for MEMS Resonator
#71MEMS resonator
#72MEMS resonator
#73Micromechanical resonating devices and related methods
#74Vibration transducer and its manufacturing method
#75Electromechanical systems piezoelectric contour mode differential resonators and filters
#76METHOD OF MANUFACTURING MEMS DEVICE
#77Method and device for suppressing hysteresis of resonators through simultaneous resonance
#78TEMPERATURE MEASUREMENT SYSTEM COMPRISING A RESONANT MEMS DEVICE
#79Frame-shaped MEMS piezoresistive resonator
#80Resonator and oscillator using same
#81Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals
#82Electrostatic vibrator and electronic apparatus
#83MEMS resonator for filtering and mixing
#84Micromechanical resonator with enlarged portion
#85Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#86MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency
#87Resonant body transistor and oscillator
#88MEMS resonator structure including regions with different densities and method
#89Resonator electrode shields
#90Bulk-mode resonator having at least partially filled open cavities
#91MICRO-ELECTROMECHANICAL DEVICE AND METHOD FOR FABRICATING THE SAME
#92MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal
#93Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#94Microresonator
#95Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
#96MEMS resonators
#97Resonator having a sideways oscillation compressing one connector while extending another
#98Resonator and methods of making resonators
#99Logical element
#100MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICAL COMPONENT
#101Method of manufacturing MEMS device
#102Q enhancement in micromachined lateral-extensional resonators
#103INTEGRATED MEMS AND IC SYSTEMS AND RELATED METHODS
#104Pressure gauge
#105Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating
#106Resonator and filter using the same
#107Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device
#108Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#109RESONATOR
#110Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#111Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
#112Silicon MEMS resonator devices and methods
#113Micromechanical resonating devices and related methods
#114BULK MODE RESONATOR
#115Nanomechanical oscillator
#116Method for gap adjustment of two mechanical elements of a substantially planar micromechanical structure and corresponding electromechanical resonator
#117MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#118SEMICONDUCTOR DEVICE TRANSDUCER AND METHOD
#119Method for fabricating a microelectromechanical system (MEMS) resonator
#120MEMS resonator structure and method
#121Microresonator
#122MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#123Tuning and compensation technique for semiconductor bulk resonators
#124Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
#125Microsystem comprising a bending beam and process of manufacture
#126Multi-ring resonator system and method
#127Charge biased MEM resonator
#128Piezo-on-diamond resonators and resonator systems
#129MEMS filter device having a nanosize coupling element and manufacturing method thereof
#130Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#131Micro electro-mechanical system and method of manufacturing the same
#132MEMS resonator array structure
#133Low frequency process-variation-insensitive temperature-stable micromechanical resonators
#134Apparatus and method using capacitive detection with inherent self-calibration
#135Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same
#136Serrated MEMS resonators
#137Serrated MEMS resonators
#138Serrated MEMS resonators
#139Serrated MEMS Resonators
#140Process compensated micromechanical resonators
#141Electromagnetic composite metamaterial
#142Device for controlling the frequency of resonance of an oscillating micro-electromechanical system
#143Method for making an electromechanical component on a plane substrate
#144Nonlinear micromechanical resonator
#145Temperature controlled MEMS resonator and method for controlling resonator frequency
#146Microelectromechanical resonator structure, and method of designing, operating and using same
#147Electromechanical transducer and electrical device
#148Electromechanical filter utilizing a quantum device and sensing electrode
#149MEMS resonator using frequency tuning
#150Temperature compensation for silicon MEMS resonator
#151Electric machine signal selecting element
#152Electromechanical filter
#153MEMS resonator having an inner element and an outer element that flex
#154Breath-mode ring resonator structure, and method of designing, operating and using same
#155Nonlinear internal resonance based micromechanical resonators
#156Integrated resonators and time base incorporating said resonators
#157In-plane mechanically coupled microelectromechanical tuning fork resonators
#158MEMS resonator array structure and method of operating and using same
#159Capacitive resonators
#160Microelectromechanical resonator structure, and method of designing, operating and using same
#161Temperature compensated oscillator including MEMS resonator for frequency control
#162Method for adjusting the frequency of a MEMS resonator
#163Mechanical resonator
#164Resonator
#165Temperature compensation for silicon MEMS resonator
#166Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto
#167Transducer and electronic device
#168Temperature-compensated micro-electromechanical device, and method of temperature compensation in a micro-electromechanical device
#169Capacitive vertical silicon bulk acoustic resonator
#170Temperature controlled MEMS resonator and method for controlling resonator frequency
#171Internal electrostatic transduction structures for bulk-mode micromechanical resonators
#172Electromechanical electron transfer devices
#173Method for adjusting the frequency of a MEMS resonator
#174High-Q micromechanical resonator devices and filters utilizing same
#175Temperature controlled MEMS resonator and method for controlling resonator frequency
#176Reference oscillator frequency stabilization
#177Temperature compensation for silicon MEMS resonator
#178Apparatus and method for vacuum-based nanomechanical energy force and mass sensors
#179Micromechanical electrostatic resonator
#180Frequency compensated oscillator design for process tolerances
#181Electromechanical resonator and method of operating same
#182Resonator electrode shields
#183Techniques for adding compensating material(s) in semiconductor devices
#184Resonator electrode shields
#185Temperature stable MEMS resonator
#186Temperature stable MEMS resonator
#187Resonator electrode shields
#188Resonator electrode shields