220580 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Vibration modes; Horizontal, i.e. parallel to the substrate plane Breath-like, e.g. Lam? mode, wine-glass mode
THIN-FILM SUSPENDED MICROACOUSTIC RESONATORS FOR TIMING APPLICATIONS
#2DUAL-MODE MEMS RESONATORS WITH LOW SUPPORT LOSS
#3MEMS RESONATOR
#4MEMS RESONATOR
#5Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
#6Microelectromechanical system resonator devices and oscillator control circuits
#7MEMS resonator with suppressed spurious modes
#8Resonator
#9Piezoelectric MEMS resonator with a high quality factor
#10Piezoelectric package-integrated contour mode filter devices
#11Tunable Q resonator
#12Vibration device and manufacturing method of the same
#13Temperature compensated plate resonator
#14Resonation element, resonator, oscillator, electronic device and moving object
#15Module for the mechanical uncoupling of a resonator having a high quality factor
#16Composite dilation mode resonators
#17Micromechanical devices comprising n-type doping agents
#18Method of manufacturing a temperature-compensated micromechanical resonator
#19Cross-sectional dilation mode resonators
#20Cross-sectional dilation mode resonators and resonator-based ladder filters
#21Tuning fork configured to generate flexural vibration in reverse phase to the contour vibration of first and second vibrating bodies
#22Micromechanical Resonator
#23MEMS sensors with closed nodal anchors for operation in an in-plane contour mode
#24MEMS resonator
#25PARTIALLY-FILLED ELECTRODE-TO-RESONATOR GAP
#26Wide bandwidth slanted-finger contour-mode piezoelectric devices
#27Electromechanical resonator with resonant anchor
#28Micromechanical resonator array and method for manufacturing thereof
#29Microelectromechanical resonator and a method for producing the same
#30MEMS resonator array structure and method of operating and using same
#31Compensated micro/nano-resonator with improved capacitive detection and method for producing same
#32MEMS resonator structure including regions with different densities and method
#33Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
#34MEMS resonator having at least one resonator mode shape
#35Oscillating mass resonator
#36MEMS resonator structure and method
#37MEMS resonator array structure and method of operating and using same
#38High-deformation composite microresonator
#39Multi-ring resonator system and method
#40MEMS filter device having a nanosize coupling element and manufacturing method thereof
#41MEMS resonator array structure
#42Mechanical oscillator formed by a network of basic oscillators
#43Electromagnetic composite metamaterial
#44Microelectromechanical resonator structure, and method of designing, operating and using same
#45Dielectrically transduced single-ended to differential MEMS filter
#46Method of forming an integrated MEMS resonator
#47MEMS resonator having an inner element and an outer element that flex
#48Breath-mode ring resonator structure, and method of designing, operating and using same
#49Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same
#50MEMS resonator array structure and method of operating and using same
#51Capacitive resonators
#52Microelectromechanical resonator structure, and method of designing, operating and using same
#53High-Q micromechanical resonator devices and filters utilizing same
#54Reference oscillator frequency stabilization
#55Micromechanical resonator device having a desired mode shape
#56Micromechanical electrostatic resonator
#57Vacuum-cavity MEMS resonator
#58Methods for suppressing spurious modes in microresonators
#59Temperature compensated resonator with a pair of spaced apart internal dielectric layers