220740 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Bulk-mode MEMS resonators with concave shape [CBAR]
Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion
#2MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency