220739 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators Bulk-mode MEMS resonators
Sub-classes:MEMS RESONATOR
#2Method for manufacturing a piezoelectric resonator
#3Inductively-coupled MEMS resonators
#4Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#5Microelectromechanical system resonator devices and oscillator control circuits
#6Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
#7Resonator and resonance device
#8Bulk mode microelectromechanical resonator devices and methods
#9MEMS resonator with suppressed spurious modes
#10Nano- and microelectromechanical resonators
#11MEMS resonator with a high quality factor
#12Resonator manufacturing method
#13Piezoelectric vibrator and piezoelectric vibration device
#14Resonator and resonating device
#15Nano- and microelectromechanical resonators
#16Nano- and micro-electromechanical resonators
#17Encapsulated bulk acoustic wave (BAW) resonator device
#18Vibration device and manufacturing method of the same
#19Temperature compensated beam resonator
#20Temperature compensated compound resonator
#21Nano- and micro-electromechanical resonators
#22Resonant body high electron mobility transistor
#23Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
#24Enhanced MEMS vibrating device
#25Electroacoustic transducer
#26Method of manufacturing a mechanical resonating structure
#27Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#28Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#29Composite dilation mode resonators
#30Micromechanical devices comprising n-type doping agents
#31Methods and apparatus for temperature control of devices and mechanical resonating structures
#32Methods and apparatus for mechanical resonating structures
#33Inter-digital bulk acoustic resonator
#34Resonator
#35Microelectromechanical systems (MEMS) resonators and related apparatus and methods
#36Integrated semiconductor devices with single crystalline beam, methods of manufacture and design structure
#37Cross-sectional dilation mode resonators
#38Cross-sectional dilation mode resonators and resonator-based ladder filters
#39Tuning fork configured to generate flexural vibration in reverse phase to the contour vibration of first and second vibrating bodies
#40Unreleased mems resonator and method of forming same
#41Electromechanical systems oscillator with piezoelectric contour mode resonator for multiple frequency generation
#42Bulk acoustic wave resonator and method of manufacturing thereof
#43Microelectromechanical systems (MEMS) resonators and related apparatus and methods
#44Micromechanical Resonator
#45Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body
#46Wide bandwidth slanted-finger contour-mode piezoelectric devices
#47Lateral over-moded bulk acoustic resonators
#48Electromechanical systems piezoelectric contour mode differential resonators and filters
#49First and second orders temperature-compensated resonator
#50MICROMECHANICAL MEMBRANES AND RELATED STRUCTURES AND METHODS
#51FLEXURAL RESONATOR ELEMENT AND FLEXURAL RESONATOR FOR REDUCING ENERGY LOSS DUE TO HEAT DISSIPATION
#52Method of manufacturing a resonating structure
#53Thin film piezoelectric vibrator, thin film piezoelectric bulk acoustic wave resonator, and radio-frequency filter using such resonator
#54MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions
#55Contour-mode piezoelectric micromechanical resonators
#56Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals
#57Micromechanical resonator with enlarged portion
#58Methods and apparatus for temperature control of devices and mechanical resonating structures
#59Wiring nanoscale sensors with nanomechanical resonators
#60Flexural resonator element and flexural resonator for reducing energy loss due to heat dissipation
#61Micro-electromechanical devices having variable capacitors therein that compensate for temperature-induced frequency drift in acoustic resonators
#62Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
#63Q enhancement in micromachined lateral-extensional resonators
#64Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating
#65Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#66Bulk acoustic wave resonator with adjustable resonance frequency and use of such a resonator in the field of telephony
#67Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
#68Resonator system with a plurality of individual mechanically coupled resonators and method of making same
#69Contour-mode piezoelectric micromechanical resonators
#70Contour-Mode Piezoelectric Micromechanical Resonators
#71Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
#72Assembly of a microswitch and of an acoustic resonator
#73Lithographically-defined multi-standard multi-frequency high-Q tunable micromechanical resonators
#74Thin film piezoelectric vibrator, thin film piezoelectric bulk acoustic wave resonator, and radio-frequency filter using such resonator
#75Monolithic thin-film piezoelectric filters
#76Transition metal oxide nanowires
#77MEMS piezoelectric longitudinal mode resonator
#78Method for fabricating quartz-based nanoresonators
#79Quartz-based nanoresonator
#80Contour-mode piezoelectric micromechanical resonators
#81Contour-mode piezoelectric micromechanical resonators
#82Semiconductor device having actuator
#83Electro mechanical device having a sealed cavity
#84Tunable bulk acoustic wave MEMS micro-resonator
#85Quartz-based nanoresonators and method of fabricating same
#86Resonator system with a plurality of individual mechanically coupled resonators and method of making same
#87Transition metal oxide nanowires
#88Nonlinear acoustic medium
#89MEMs-based resonant FinFET