220741 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Bulk-mode MEMS resonators with I shape [IBAR]
MEMS RESONATOR
#2MEMS device
#3Method of trimming a component and a component trimmed by such a method
#4Method of manufacturing a temperature-compensated micromechanical resonator
#5Micromechanical resonator with enlarged portion