220382 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks Integration with other electronic structures
MEMS RESONATOR
#2ELECTRONIC PACKAGE STRUCTURE
#3METAL RIBS IN ELECTROMECHANICAL DEVICES
#4MEMS resonator
#5Metal ribs in electromechanical devices
#6MICROMECHANICAL RESONATOR WAFER ASSEMBLY AND METHOD OF FABRICATION THEREOF
#7Methods and devices for microelectromechanical resonators
#8Electronic package structure
#9MEMS resonator
#10Methods and devices for microelectromechanical resonators
#11Metal ribs in electromechanical devices
#12Semiconductor package structure and method of manufacturing the same
#13Capacitor stacks for noise filtering in high-frequency switching applications and an optical subassembly module implementing same
#14Methods and devices for microelectromechanical resonators
#15Reconfigurable resonator devices, methods of forming reconfigurable resonator devices, and operations thereof
#16Thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#17Graphene microelectromechanical system (MEMS) resonant gas sensor
#18MEMS-based passband filter
#19Apparatus and methods for photonic integrated resonant accelerometers
#20Integrated acoustic filter on complementary metal oxide semiconductor (CMOS) die
#21Methods and devices for microelectromechanical resonators
#22Bulk acoustic wave resonator on a stress isolated platform
#23Acoustic management in integrated circuit using phononic bandgap structure
#24Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
#25Techniques for integrating three-dimensional islands for radio frequency (RF) circuits
#26Manufacturing of thin-film bulk acoustic resonator and semiconductor apparatus comprising the same
#27Method for producing a batch of acoustic wave filters
#28Piezoelectric MEMS resonator with integrated phase change material switches
#29Semiconductor device, a micro-electro-mechanical resonator and a method for manufacturing a semiconductor device
#30Method of forming a resonator
#31Resonant circuit with variable frequency and impedance
#32Integrated microelectromechanical system devices and methods for making the same
#33Methods and devices for microelectromechanical resonators
#34Methods and devices for microelectromechanical pressure sensors
#35Semiconductor arrangement with thermal insulation configuration
#36Method and structure of three dimensional CMOS transistors with hybrid crystal orientations
#37Integrated microelectromechanical system devices and methods for making the same
#38Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator
#39Microelectromechanical resonators
#40MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
#41Micro electronic device having CMOS circuit and MEMS resonator formed on common silicon substrate
#42Method of manufacturing a microelectromechanical system (MEMS) resonator
#43MEMS element
#44Integrated MEMS device and method of use
#45Integrated circuit comprising a device with a vertical mobile element integrated in a support substrate and method for producing the device with a mobile element
#46Method and apparatus for MEMS oscillator
#47Active multi-gate micro-electro-mechanical device with built-in transistor
#48ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION
#49Resonator including a microelectromechanical system structure with first and second structures of silicon layers
#50Method and apparatus for MEMS oscillator
#51Micro electronic device and method for fabricating micro electromechanical system resonator thereof
#52Method for releasing the suspended structure of a NEMS and/or NEMS component
#53ACTIVE DOUBLE OR MULTI GATE MICRO-ELECTRO-MECHANICAL DEVICE WITH BUILT-IN TRANSISTOR
#54INTEGRATED MEMS AND IC SYSTEMS AND RELATED METHODS
#55Method and system for forming resonators over CMOS
#56MEMS resonator and manufacturing method of the same
#57Method of manufacturing a ladder filter
#58Resonant circuit, method of producing same, and electronic device
#59Magnetic nano-resonator
#60Method for fabricating a microelectromechanical system (MEMS) resonator
#61High frequency device, power supply device and communication apparatus
#62Method and apparatus for MEMS oscillator
#63MEMS resonator and manufacturing method of the same
#64Ladder type filter
#65Method for making an electromechanical component on a plane substrate
#66Wafer-level encapsulation and sealing of electrostatic transducers
#67Method of forming an integrated MEMS resonator
#68Microresonator, band-pass filter, semiconductor device, and communication apparatus
#69Integrated circuit having one or more conductive devices formed over a SAW and/or MEMS device
#70Techniques for adding compensating material(s) in semiconductor devices
#71Temperature stable MEMS resonator
#72Temperature stable MEMS resonator
#73MEMS resonator
#74Reconfigurable MEMS devices, methods of forming reconfigurable MEMS devices, and methods for reconfiguring frequencies of a MEMS device
#75Temperature stable MEMS resonator