220381 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks
Sub-classes:MEMS Resonator
#2SILICON-SUPPORTED WAFER TO WAFER SOLDER BOND
#3ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS
#4MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD
#5RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
#6FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
#7Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
#8Three Dimensional Microstructures With Selectively Removed Regions For Use In Gyroscopes And Other Devices
#9Methods and devices for microelectromechanical resonators
#10MEMS RESONATOR AND MANUFACTURING METHOD
#11RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
#12RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFACTURING METHOD
#13Piezoelectric MEMS resonators based on porous silicon technologies
#14BULK ACOUSTIC WAVE DEVICE PACKAGING WITH REDISTRIBUTION USING SILICON DIOXIDE INSULATION
#15Methods and devices for microelectromechanical resonators
#16Intraluminal ultrasound imaging device comprising a substrate separated into a plurality of spaced-apart segments, intraluminal ultrasound imaging device comprising a trench, and method of manufacturing
#17METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE
#18RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
#19Vibrator device and method for manufacturing vibrator device
#20Three dimensional microstructures with selectively removed regions for use in gyroscopes and other devices
#21Piezoelectric MEMS resonators based on porous silicon technologies
#22RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
#23Method for manufacturing a micromechanical layer structure
#24Resonator device
#25HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS
#26Resonance device and manufacturing method of resonance device
#27Communication module
#28Methods and devices for microelectromechanical resonators
#29Electromechanically damped resonator devices and methods
#30Fused quartz dual shell resonator and method of fabrication
#31Resonance device and method for producing resonance device
#32Clock glitch mitigation apparatus and method
#33Resonance device
#34Device packaging using a recyclable carrier substrate
#35Electronic package including cavity formed by removal of sacrificial material from within a cap
#36Guided wave devices with selectively loaded piezoelectric layers
#37Component with a thin-layer covering and method for its production
#38Methods and devices for microelectromechanical resonators
#39Microelectromechanical system resonator devices and oscillator control circuits
#40Pitch/roll annulus gyroscope with slanted quadrature tuning electrodes and related fabrication methods
#41Assembly processes for three-dimensional microstructures
#42Frequency compensated oscillator design for process tolerances
#43Frequency compensated oscillator design for process tolerances
#44Resonance device and manufacturing method therefor
#45Bulk mode microelectromechanical resonator devices and methods
#46Microelectronic structure comprising means of control of viscous damping
#47Resonator, oscillator, electronic apparatus, and vehicle
#48MEMS device and method for producing same
#49Signal processing apparatus and method for transmitting and receiving coherent parallel optical signals
#50Resonator and resonance device
#51Resonator and resonance device
#52Acoustic resonator devices and methods with noble metal layer for functionalization
#53Method of fabricating acoustic wave device
#54Compact ultrasound transducer with direct coax attachment
#55Electronic package including cavity formed by removal of sacrificial material from within a cap
#56Resonator manufacturing method
#57CMUT assembly with acoustic window
#58Device packaging using a recyclable carrier substrate
#59Guided wave devices with selectively loaded piezoelectric layers
#60Guided wave devices with sensors utilizing embedded electrodes
#61Mixed domain guided wave devices utilizing embedded electrodes
#62Guided wave devices with embedded electrodes and non-embedded electrodes
#63Guided wave devices with selectively thinned piezoelectric layers
#64Resonance device
#65Method of providing protective cavity and integrated passive components in wafer level chip scale package using a carrier wafer
#66Acoustic resonator with reduced mechanical clamping of an active region for enhanced shear mode response
#67Acoustic resonator devices and fabrication methods providing hermeticity and surface functionalization
#68BAW RESONATOR HAVING MULTI-LAYER ELECTRODE AND BO RING CLOSE TO PIEZOELECTRIC LAYER
#69Method of forming capacitive MEMS sensor devices
#70Micro-hemispherical resonators and methods of making the same
#71Semiconductor device, a micro-electro-mechanical resonator and a method for manufacturing a semiconductor device
#72Vibration device and manufacturing method of the same
#73Resonator device
#74Method of forming a resonator
#75CMUT assembly with acoustic window
#76Integrated microelectromechanical system devices and methods for making the same
#77Methods and devices for microelectromechanical resonators
#78Methods and devices for microelectromechanical pressure sensors
#79Resonant body high electron mobility transistor
#80Frequency compensated oscillator design for process tolerances
#81Frequency compensated oscillator design for process tolerances
#82Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices
#83Micro-electro-mechanical transducer having an optimized non-flat surface
#84Vibrating device and manufacturing method therfor
#85Micro-electro-mechanical transducer having an optimized non-flat surface
#86Micro-electro-mechanical transducer having an optimized non-flat surface
#87Vibration device including support portion
#88Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer
#89Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer
#90Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator
#91Optomechanical oscillator network, control and synchronization methods, and applications
#92Method of manufacturing an encapsulation device
#93Composite micro-electro-mechanical-system apparatus and manufacturing method thereof
#94Capacitive MEMS sensor devices
#95Method of fabricating a single-piece micromechanical component including at least two distinct functional levels
#96Electronic device and manufacturing method thereof
#97Resonant transducer and manufacturing method of resonant transducer
#98Apparatus and method for fabricating nano resonator using laser interference lithography
#99Vibrator, oscillator, electronic apparatus, moving object, and method of manufacturing vibrator
#100ESD protection for MEMS resonator devices
#101Micromechanical devices comprising n-type doping agents
#102Resonator and fabrication method thereof
#103Resonator electrode shields
#104Nano resonator and manufacturing method thereof
#105Piezo-resistive MEMS resonator
#106Method for manufacturing MEMS device
#107CMUT assembly with acoustic window
#108Micromechanical resonators
#109Nano scale resonator, nano scale sensor, and fabrication method thereof
#110MEMS oscillator and manufacturing method thereof
#111Method of manufacturing resonant transducer
#112Self-polarized capacitive micromechanical resonator apparatus and fabrication method
#113Transverse acoustic wave resonator, oscillator having the resonator and method for making the resonator
#114Unreleased mems resonator and method of forming same
#115MEMS vibrator and oscillator
#116Out-of plane MEMS resonator with static out-of-plane deflection
#117Method of manufacturing a microelectromechanical system (MEMS) resonator
#118MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
#119PIEZOELECTRIC RESONATORS AND FABRICATION PROCESSES
#120LOW TEMPERATURE BI-CMOS COMPATIBLE PROCESS FOR MEMS RF RESONATORS AND FILTERS
#121MEMS vibrator and oscillator
#122Process for producing an acoustic device having a controlled-bandgap phononic crystal structure
#123Method of actuating an internally transduced pn-diode-based ultra high frequency micromechanical resonator
#124Electromechanical resonator with resonant anchor
#125Resonator and production method thereof
#126MEMS element, and manufacturing method of MEMS element
#127Thermal-mechanical signal processing
#128Micromechanical resonator array and method for manufacturing thereof
#129Method and apparatus for MEMS oscillator
#130Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#131MEMS resonator devices
#132Micro-electro-mechanical transducer having an optimized non-flat surface
#133Resonator
#134Out-of-plane MEMS resonator with static out-of-plane deflection
#135MEMS device and oscillator
#136Insulator layer based MEMS devices
#137Piezo-resistive MEMS resonator
#138Microscopic structure packaging method and device with packaged microscopic structure
#139MEMS oscillator and method of manufacturing thereof
#140Micro-electro-mechanical transducer having a surface plate
#141Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
#142Micromechanical resonator with enlarged portion
#143Method and apparatus for MEMS oscillator
#144MEMS controlled oscillator
#145MICRO-ELECTROMECHANICAL DEVICE AND METHOD FOR FABRICATING THE SAME
#146MICRO MECHANICAL RESONATOR
#147MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal
#148Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#149MEMS device and manufacturing method thereof
#150Microresonator
#151Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
#152Direct contact heat control of micro structures
#153Resonator and methods of making resonators
#154MEMS ultrasonic device having a PZT and cMUT
#155MEMS resonator devices with a plurality of mass elements formed thereon
#156Nano electromechanical integrated-circuit bank and switch
#157Temperature compensated piezoelectric oscillator
#158Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#159RESONATOR
#160Method of fabricating a MEMS/NEMS electromechanical component
#161Micro-electro-mechanical transducer having a surface plate
#162Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#163Integrated single-crystal MEMS device
#164CMOS-compatible bulk-micromachining process for single-crystal MEMS/NEMS devices
#165Resonator and fabrication method thereof
#166Apparatus, method, and computer program product providing edgeless carbon nanotube resonator arrays
#167MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#168Vibrator, resonator using the same and electromechanical filter using the same
#169Resonator having an output electrode underneath first and second electrode arms
#170Micro-electro-mechanical transducer having embedded springs
#171Method for fabricating a microelectromechanical system (MEMS) resonator
#172Microresonator
#173MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#174High-deformation composite microresonator
#175Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters
#176Free-standing metallic micromechanical structure, method of manufacturing the same, resonator structure using the same, and method of manufacturing a resonator structure using the same
#177Microsystem comprising a bending beam and process of manufacture
#178Method of manufacturing vibrating micromechanical structures
#179Method of manufacturing vibrating micromechanical structures
#180Vacuum packaged single crystal silicon device
#181Vacuum packaged single crystal silicon device
#182Method and apparatus for MEMS oscillator
#183METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE USING THE SAME
#184μ-Flap type nano/micro mechanical device and fabrication method thereof
#185Encapsulated electrical component and production method
#186Electromechanical filter
#187MEMS controlled oscillator
#188Electromechanical filter and electrical circuit and electrical equipment employing electromechanical filter
#189Parametric resonator and filter using the same
#190Electric machine signal selecting element
#191Semiconductor device with a resonator
#192MEMS device annealing
#193Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#194Dielectrically transduced single-ended to differential MEMS filter
#195MEMS resonator and method of enhancing an output signal current from a MEMS resonator
#196Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator
#197Micromechanical structures having a capacitive transducer gap filled with a dielectric and method of making same
#198MEMS acoustic filter and fabrication of the same
#199Micro-resonator and communication apparatus
#200Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter
#201Microresonator, band-pass filter, semiconductor device, and communication apparatus
#202Micromachine and method of fabricating the same
#203Capacitive resonators
#204Microresonator, band-pass filter, semiconductor device, and communication apparatus
#205Shell type actuator
#206Thermal-mechanical signal processing
#207Process for fabricating micromachine
#208Vacuum packaged single crystal silicon device
#209Method of manufacturing vibrating micromechanical structures
#210MEMS type resonator, process for fabricating the same and communication unit
#211Micro-resonator, frequency filter and communication apparatus
#212Transducer and electronic device
#213Microresonator, manufacturing method, and electronic apparatus
#214Micromachine and method of producing the same
#215Sacrificial layer technique to make gaps in MEMS applications
#216Micromachine and method of manufacturing the micromachine
#217Micromechanical device and method of manufacture thereof
#218Microelectromechanical structures, devices including the structures, and methods of forming and tuning same
#219Electro mechanical device having a sealed cavity
#220High-Q micromechanical resonator devices and filters utilizing same
#221Micromechanical resonator device having a desired mode shape
#222Micromechanical electrostatic resonator
#223System and method for producing a reduced substrate micro-electro-mechanical systems (MEMS) device
#224Frequency compensated oscillator design for process tolerances
#225Vacuum-cavity MEMS resonator
#226Micromechanical resonator having short support beams
#227Micromachine production method
#228Resonator electrode shields
#229Techniques for adding compensating material(s) in semiconductor devices
#230Resonator electrode shields
#231Temperature stable MEMS resonator
#232Enhanced electronic sensors
#233Temperature stable MEMS resonator
#234Resonator electrode shields
#235MEMS resonator with co-located temperature sensor
#236MEMS resonator with colocated temperature sensor
#237Dual-mode MEMS resonator, oscillator, sensor, timing device, acoustic filter and front-end module and the methods of making
#238Resonator electrode shields
#239Resonator electrode shields
#240High Q quartz-based MEMS resonators and method of fabricating same
#241MEMs-based resonant FinFET
#242Resonator electrode shields
#243Temperature stable MEMS resonator
#244Micro-resonator having lid-integrated electrode