220383 ⎘
Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks of microelectro-mechanical resonators or networks Arrangements or methods specially adapted for testing microelecro-mechanical resonators or networks
Drive mode and sense mode resonance frequency matching
#2Bulk mode microelectromechanical resonator devices and methods
#3High frequency device, power supply device and communication apparatus
#4Trimming method for microresonators and microresonators made thereby