220564 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Details of microelectro-mechanical resonators; Suspension means; Folded-flexure Symmetric folded-flexure
Method of adjusting the resonance frequency of a micro-machined vibrating element
Dual in-situ mixing for extended tuning range of resonators
TEMPERATURE MEASUREMENT SYSTEM COMPRISING A RESONANT MEMS DEVICE