Method of trimming a component and a component trimmed by such a method

Piezoelectric resonator and method for manufacturing the same

Membrane substrate structure for single crystal acoustic resonator device

Wafer scale packaging

Single crystal acoustic resonator and bulk acoustic wave filter

Resonance circuit with a single crystal capacitor dielectric material

Integrated circuit configured with two or more single crystal acoustic resonator devices

Integrated circuit configured with two or more single crystal acoustic resonator devices

Acoustic resonator with electrical interconnect disposed in underlying dielectric

Acoustic resonator comprising vertically extended acoustic cavity

Film bulk acoustic wave resonator (FBAR) having stress-relief

Method for manufacturing piezoelectric device with a composite piezoelectric substrate

Volume wave resonator using excitation/detection of vibrations

Piezoelectric thin film resonator, filter, and duplexer including a film inserted into the piezoelectric film

Resonator and fabricating method thereof

Piezoelectric thin film resonator and filter

Piezoelectric thin film resonator

Method for manufacturing piezoelectric device

Resonance apparatus for processing electrical loss using conductive material and method for manufacturing the same

Bulk acoustic wave structure with aluminum copper nitride piezoelectric layer and related method

Acoustic wave device

Bulk acoustic wave resonator

Filter and duplexer

Method of manufacturing a piezoelectric speaker

Bulk acoustic wave resonator having a plurality of compensation layers and duplexer using same

Film bulk acoustic wave resonator-based high energy radiation detectors and methods using the same

Film bulk acoustic wave resonator-based ethanol and acetone sensors and methods using the same

MINERAL ELECTRET-BASED ELECTROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING SAME

Piezoelectric thin film resonator, filter, communication module and communication device

METHOD OF FABRICATING RESONATOR, RESONATOR, AND OSCILLATOR

Acoustic Wave Resonators and Methods of Manufacturing Same

Thin-film piezoelectric resonator and thin-film piezoelectric filter using the same

Method for manufacturing composite piezoelectric substrate and piezoelectric device

Methods for wafer level trimming of acoustically coupled resonator filter

Piezoelectric speaker and method of manufacturing the same

Film bulk acoustic resonator, filter, communication module and communication apparatus

Method of manufacturing thin film resonator

Composite substrate and elastic wave device using the same

Component having stress-reduced mounting

FILTER, DUPLEXER AND COMMUNICATION APPARATUS

Piezoelectric thin film resonant element and circuit component using the same

Piezoelectric thin film resonator, filter using the resonator, duplexer using the filter, and communication equipment using the filter or the duplexer

Filter and antenna duplexer

Piezoelectric sensor arrangement comprising a thin layer shear wave resonator based on epitactically grown piezoelectric layers

THIN FILM PIEZOELECTRIC RESONATOR AND THIN FILM PIEZOELECTRIC FILTER

Switchable tunable acoustic resonator using BST material

Bulk acoustic wave resonator, filter and duplexer and methods of making same

Method of manufacturing a ladder filter

Piezoelectric thin-film resonator, filter using the same, and duplexer using the same

Film bulk acoustic resonator, filter, communication module and communication device

Piezoelectric thin-film filter

Thin film piezoelectric resonator and method for manufacturing the same

Bulk acoustic wave device and a method of its manufacturing

Multi-channel filter assemblies

Bulk acoustic wave device with a semiconductor layer

Piezoelectric thin-film resonator

Thin-film bulk-acoustic wave (BAW) resonators

Process of making a bulk acoustic wave structure with an aluminum copper nitride piezoelectric layer

Thin film piezoelectric resonator and method of manufacturing the same

Piezoelectric thin-film resonator and filter

FILM BULK ACOUSTIC RESONATOR

Bulk acoustic device and method for fabricating

PIEZOELECTRIC THIN-FILM RESONATOR, ACOUSTIC WAVE DEVICE AND METHOD FOR FABRICATING THE ACOUSTIC WAVE DEVICE

Piezoelectric thin film resonator, piezoelectric thin film resonator filter and manufacturing method thereof

Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus

Film bulk acoustic resonator and filter

Piezoelectric thin-film resonator and filter using the same

Ladder type filter

Integrated device and fabricating method thereof

Piezoelectric electronic component, process for producing the same, and communication apparatus

Piezoelectric thin film device and method for manufacturing the same

Piezoelectric thin film device and method for manufacturing the same

Film bulk acoustic wave resonator and method for manufacturing the same

ELECTRONIC DEVICE

Filter having multiple piezoelectric thin-film resonators

Piezoelectric resonator structures and electrical filters

PIEZOELECTRIC FILM RESONATOR, RADIO-FREQUENCY FILTER USING THEM, AND RADIO-FREQUENCY MODULE USING THEM

Piezoelectric thin-film resonator and filter using the same

ELECTRONIC DEVICE

PIEZOELECTRIC THIN FILM RESONATOR

PIEZOELECTRIC RESONATOR, PIEZOELECTRIC FILTER, DUPLEXER, COMMUNICATION APPARATUS, AND METHOD FOR MANUFACTURING PIEZOELECTRIC RESONATOR

Switchable tunable acoustic resonator using BST material

Thin film piezoelectric resonator, method of manufacturing the same, and filter including the same

FILM BULK ACOUSTIC RESONATOR AND FILM BULK ACOUSTIC RESONATOR FILTER

Thin-film piezoelectric resonator and filter circuit

Film bulk acoustic-wave resonator and method for manufacturing the same

Method for manufacturing an electronic component

Aluminum nitride thin film, composite film containing the same and piezoelectric thin film resonator using the same

Film bulk acoustic wave resonator, film bulk acoustic wave resonator filter and method of manufacturing film bulk acoustic wave resonator

Film bulk acoustic resonator and method for manufacturing the same

Filter and antenna duplexer

Thin-film piezoelectric resonator utilizing a second or higher harmonic mode

Piezoelectric electronic component, and production method therefor, and communication equipment

Bulk acoustic resonator including a resonance part with dimple and fabrication method therefor

Piezoelectric thin film resonator and devices provided with the same

Bulk acoustic wave resonator, bulk acoustic wave filter, RF module including bulk acoustic wave resonator and/or filter, and bulk acoustic wave oscillator

Film bulk acoustic resonator and filter circuit including a plurality of film bulk acoustic resonators

Piezoelectric thin-film resonator and filter

Piezoelectric thin-film resonator and filter having the same

Potassium niobate deposited body and method for manufacturing the same, piezoelectric thin film resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus

Piezoelectric thin film device and method of producing the same

Film bulk acoustic resonator and a method for manufacturing the same

Piezoelectric thin film resonators

Electronic component having micro-electrical mechanical system

Piezoelectric device, piezoelectric actuator, piezoelectric pump, inkjet recording head, inkjet printer, surface acoustic wave device, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic instrument

Bulk acoustic wave resonator and manufacturing method thereof, filter using the same, semiconductor integrated circuit device using the same, and high frequency module using the same

Electro-acoustic resonator with a top electrode layer thinner than a bottom electrode layer

Acoustic resonator device and method for manufacturing the same

Piezoelectric thin-film resonator and filter using the same

Method of manufacturing piezoelectric thin film device and piezoelectric thin film device

Film bulk acoustic-wave resonator (FBAR), filter implemented by FBARs and method for manufacturing FBAR

Method for manufacturing resonator

Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator and electronic apparatus

Thin film piezoelectric resonator and manufacturing process thereof

Film bulk acoustic-wave resonator and method for manufacturing the same

Bulk acoustic wave resonator, filter and duplexer and methods of making same

Resonator, filter and fabrication of resonator

Acoustic resonator and filter

Electronic component having micro-electrical mechanical system

Method for manufacturing a potassium niobate deposited body

Electronic device and method of fabricating the same

Piezoelectric element, piezoelectric actuator, ink jet recording head, ink jet printer, surface acoustic wave element, frequency filter, oscillator, electronic circuit, thin film piezoelectric resonator, and electronic apparatus

Piezoelectric thin film device and method for manufacturing the same

Method for manufacturing a piezoelectric resonator

Method of manufacturing an electronic component

Film bulk acoustic wave resonator, film bulk acoustic wave resonator filter and method of manufacturing film bulk acoustic wave resonator

Piezoelectric thin-film resonator, piezoelectric filter, and electronic component including the piezoelectric filter

Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink-jet type recording head, ink-jet printer, surface-acoustic-wave element, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus

Piezoelectric film, piezoelectric element, piezoelectric actuator, piezoelectric pump, ink-jet type recording head, ink-jet printer surface-acoustic-wave element, thin-film piezoelectric resonator, frequency filter, oscillator, electronic circuit, and electronic apparatus

Structure to achieve high-Q and low insertion loss film bulk acoustic resonators

Piezoelectric resonator and the method for making the same

Electric filter, and duplexer using the same

Piezoelectric element, composite piezoelectric element, and filter, duplexer and communication equipment using the same

Piezoelectric thin-film resonator and filter using the same

Electronic device and electronic apparatus

Method of producing thin film bulk acoustic resonator

Electronic device and method of fabricating the same

Piezoelectric resonator, filter, and duplexer

Film bulk acoustic resonator and method of producing the same

Electronic component and method for manufacturing the same

Forming film bulk acoustic resonator filters

Piezoelectric resonator, filter and electronic component using the same

Ink jet recording head and ink jet printer with piezoelectric element

Piezoelectric vibrator, filter using the same and its adjusting method

BAW resonator having piezoelectric layers oriented in opposed directions

Thin-film bulk acoustic oscillator and method of manufacturing same

Decoupled transversely-excited film bulk acoustic resonators