220747 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Beam resonators Free-free beam resonators
Piezo-actuated MEMS
#2MEMS RESONATOR
#3MEMS RESONATOR
#4MEMS Resonator Arrangement
#5Piezo-actuated MEMS resonator with reduced nonlinear tcf
#6DUAL PROOF-MASS RESONATORS WITH LOW SUPPORT LOSS
#7Methods and devices for microelectromechanical resonators
#8MEMS RESONATOR AND MANUFACTURING METHOD
#9Methods and devices for microelectromechanical resonators
#10Resonator and resonance device including the same
#11Piezo-actuated MEMS resonator
#12MEMS resonator array arrangement
#13Methods and devices for microelectromechanical resonators
#14Resonance device
#15Resonator and resonance device
#16Micromechanical vibrasolator
#17Micromechanical resonator having reduced size
#18Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#19Methods and devices for microelectromechanical resonators
#20Switchable filters and design structures
#21Piezo-actuated MEMS resonator with surface electrodes
#22Microelectronic structure comprising means of control of viscous damping
#23Resonator
#24Resonator device
#25Resonator
#26Temperature-engineered MEMS resonator
#27Switchable filters and design structures
#28Switchable filters and design structures
#29Resonator
#30Semiconductor device, a micro-electro-mechanical resonator and a method for manufacturing a semiconductor device
#31Method of forming a resonator
#32Multiple coil spring MEMS resonator
#33Compound spring MEMS resonators for frequency and timing generation
#34Vibrating device
#35Methods and devices for microelectromechanical resonators
#36Methods and devices for microelectromechanical pressure sensors
#37Switchable filters and design structures
#38Semiconductor device with an array of lamellas and a micro-electro-mechanical resonator
#39Microelectromechanical resonators
#40Resonator
#41MEMS resonator, manufacturing method thereof, and signal processing method using MEMS resonator
#42Method of manufacturing switchable filters
#43Out-of-plane resonator
#44Resonator and method of controlling the same
#45Resonator and method of controlling the same
#46Micromechanical Resonator
#47Micro-electromechanical resonator geometry
#48MEMS device and oscillator
#49MEMS resonator for filtering and mixing
#50Resonant body transistor and oscillator
#51Resonator and a method of manufacturing the same, and oscillator and electronic apparatus including the same
#52MEMS resonators
#53Direct contact heat control of micro structures
#54Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
#55Pressure gauge
#56Passive temperature compensation of silicon MEMS devices
#57Integration of dissimilar materials for advanced multifunctional devices
#58Method and apparatus for frequency tuning of a micro-mechanical resonator
#59MEMS type resonator, process for fabricating the same and communication unit
#60Transducer and electronic device
#61Device for emission of high frequency signals
#62Method for frequency tuning of a micro-mechanical resonator
#63Method and apparatus for frequency tuning of a micro-mechanical resonator
#64Micromechanical resonator having short support beams
#65Vertical differential resonator
#66Vertical differential resonator