220746 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators Beam resonators
Sub-classes:MEMS OSCILLATING ELEMENT AND METHOD FOR OPERATING A MEMS OSCILLATING ELEMENT
#2BIMORPH MICROELECTROMECHANICAL SYSTEMS (MEMS) INTEGRATION FOR ANALOG TUNABILITY IN METASURFACES
#3DUAL-MODE MEMS RESONATORS WITH LOW SUPPORT LOSS
#4MEMS SWITCH, DRIVING METHOD THEREOF, AND ELECTRONIC DEVICE
#5DUAL RESONATOR STRUCTURE FOR OVEN-CONTROLLED MEMS OSCILLATORS, INCLUDING RELATED APPARATUSES
#6RESONATOR AND RESONATOR DRIVE METHOD
#7MEMS resonator
#8RESONANCE DEVICE AND MANUFACTURING METHOD FOR THE SAME
#9RESONANCE DEVICE, COLLECTIVE BOARD, AND MANUFACTURING METHOD FOR RESONANCE DEVICE
#10MICROELECTROMECHANICAL SYSTEM RESONATOR ASSEMBLY
#11MEMS resonator
#12Coupled MEMS resonator
#13Super-regenerative transceiver with improved frequency discrimination
#14Frequency-converting super-regenerative transceiver
#15Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#16Coupled MEMS resonator
#17Super-regenerative transceiver with improved frequency discrimination
#18Distributed-mode beam and frame resonators for high frequency timing circuits
#19Frequency-converting super-regenerative transceiver
#20Micromechanical resonator and method for trimming micromechanical resonator
#21Micromechanical resonator
#22Tunable narrow bandpass MEMS technology filter using an arch beam microresonator
#23Micro-electro-mechanical device with reduced temperature sensitivity and manufacturing method thereof
#24Switchable filters and design structures
#25Frequency compensated oscillator design for process tolerances
#26Frequency compensated oscillator design for process tolerances
#27Resonant transducer
#28Switchable filters and design structures
#29Switchable filters and design structures
#30Resonance device
#31MEMS resonator
#32MEMS-based regenerative transceiver
#33Micromechanical frequency divider
#34Micromachined ultrasonic transducers with a slotted membrane structure
#35Tunable reactance devices, and methods of making and using the same
#36MEMS device
#37Temperature compensated beam resonator
#38Planar structure of a mechanical resonator decoupled by bending oscillation and expansion/compression vibrations
#39Switchable filters and design structures
#40Frequency compensated oscillator design for process tolerances
#41Frequency compensated oscillator design for process tolerances
#42Vibrator, oscillator, electronic device, and moving object
#43Vibrator, oscillator, electronic device, and moving object
#44VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, AND MOVING OBJECT
#45Optomechanical oscillator network, control and synchronization methods, and applications
#46Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same
#47Micromechanical devices comprising n-type doping agents
#48Method of manufacturing switchable filters
#49Resonant device with piezoresistive detection and with a resonator connected elastically to the support of the device, and method for manufacturing the device
#50Micromechanical device including N-type doping for providing temperature compensation and method of designing thereof
#51PIEZOELECTRIC RESONATORS AND FABRICATION PROCESSES
#52MEMS element, and manufacturing method of MEMS element
#53Resonator
#54MEMS resonator array structure and method of operating and using same
#55Resonant filter based on an N/MEMS matrix
#56Resonator
#57ALL-DIFFERENTIAL RESONANT NANOSENSOR APPARATUS AND METHOD
#58Resonator
#59Resonator and resonator array
#60Nanomechanical oscillator
#61Magnetic nano-resonator
#62Methods and devices for compensating a signal using resonators
#63System and method for using MEMS filter bank
#64MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#65MEMS resonator array structure and method of operating and using same
#66MEMS resonator, a method of manufacturing thereof, and a MEMS oscillator
#67Method of manufacturing vibrating micromechanical structures
#68Method of manufacturing vibrating micromechanical structures
#69Vacuum packaged single crystal silicon device
#70Vacuum packaged single crystal silicon device
#71METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE USING THE SAME
#72Microelectromechanical system comprising a beam that undergoes flexural deformation
#73Vacuum packaged single crystal silicon device
#74Method of manufacturing vibrating micromechanical structures
#75Frequency compensated oscillator design for process tolerances
#76Multiple axis sensing device based on frequency modulation and method of operation
#77Vertical differential resonator
#78Vertical differential resonator