ClassID:

220748

H03H9/2457 - CPC Classification

Classification description:

Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Beam resonators Clamped-free beam resonators

Recent Application in this class:
#1
20260100692
2026-04-09

MEMS Resonator

#2
20250096768
2025-03-20

METAL RIBS IN ELECTROMECHANICAL DEVICES

#3
20240056054
2024-02-15

Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant

#4
20230396230
2023-12-07

Metal ribs in electromechanical devices

#5
20220069795
2022-03-03

Metal ribs in electromechanical devices

#6
20210218366
2021-07-15

Super-regenerative transceiver with improved frequency discrimination

#7
20210167754
2021-06-03

Resonator and resonance device including same

#8
20210159884
2021-05-27

Resonance device

#9
20210152148
2021-05-20

Resonance device and manufacturing method of resonance device

#10
20210083647
2021-03-18

MEMS device having a connection portion formed of a eutectic alloy

#11
20210006230
2021-01-07

Resonator and resonance device

#12
20200403572
2020-12-24

Frequency-converting super-regenerative transceiver

#13
20200295732
2020-09-17

Resonance device and method for producing resonance device

#14
20200136587
2020-04-30

Resonator and resonant device

#15
20200112295
2020-04-09

RESONATOR AND RESONANT DEVICE

#16
20190379416
2019-12-12

Super-regenerative transceiver with improved frequency discrimination

#17
20190207557
2019-07-04

Frequency-converting super-regenerative transceiver

#18
20190028084
2019-01-24

Micromechanical resonator and resonator system including the same

#19
20180254761
2018-09-06

Switchable filters and design structures

#20
20180248533
2018-08-30

Frequency compensated oscillator design for process tolerances

#21
20180248532
2018-08-30

Frequency compensated oscillator design for process tolerances

#22
20180224487
2018-08-09

Signal processor

#23
20170366154
2017-12-21

Switchable filters and design structures

#24
20170366153
2017-12-21

Switchable filters and design structures

#25
20160352309
2016-12-01

Micro-electromechanical resonators and methods of providing a reference frequency

#26
20160294355
2016-10-06

Piezoelectric vibrator and frequency adjustment method for piezoelectric vibrator

#27
20160028374
2016-01-28

Apparatus and method for tuning a resonance frequency

#28
20150372660
2015-12-24

Switchable filters and design structures

#29
20150300999
2015-10-22

Measurement system including a network of nanoelectromechanical system resonators

#30
20150266724
2015-09-24

Method for temperature compensation in MEMS resonators with isolated regions of distinct material

#31
20150263699
2015-09-17

Frequency compensated oscillator design for process tolerances

#32
20150263695
2015-09-17

Frequency compensated oscillator design for process tolerances

#33
20150256144
2015-09-10

Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices

#34
20150153221
2015-06-04

Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method

#35
20140339963
2014-11-20

Microelectromechanical resonator

#36
20140266509
2014-09-18

Rotational MEMS resonator for oscillator applications

#37
20140184347
2014-07-03

Microelectronic machine-based ariable

#38
20140102217
2014-04-17

Sensor, electronic apparatus, robot, and mobile object

#39
20140091871
2014-04-03

MEMS element and oscillator

#40
20140078640
2014-03-20

Thin film device and method for manufacturing thin film device

#41
20140028410
2014-01-30

Resonator electrode shields

#42
20140002203
2014-01-02

Method and system of an ultra high Q silicon cantilever resonator for thin film internal friction and Young's modulus measurements

#43
20130214877
2013-08-22

Method of manufacturing switchable filters

#44
20130154440
2013-06-20

In-plane actuated resonant device and method of manufacturing the device

#45
20130027146
2013-01-31

MEMS vibrator and oscillator

#46
20130002364
2013-01-03

Switchable electrode for power handling

#47
20130002363
2013-01-03

Out-of-plane resonator

#48
20120329255
2012-12-27

Out-of plane MEMS resonator with static out-of-plane deflection

#49
20120279302
2012-11-08

MEMS resonator, sensor having the same and manufacturing method for MEMS resonator

#50
20120268985
2012-10-25

Resonance nanoelectromechanical systems

#51
20120268218
2012-10-25

VIBRATION CIRCUIT

#52
20120249253
2012-10-04

MEMS vibrator and oscillator

#53
20120187507
2012-07-26

MEMS resonator

#54
20120146736
2012-06-14

MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator

#55
20120133449
2012-05-31

Microelectronic device and electronic apparatus

#56
20120060607
2012-03-15

Vibration transducer and its manufacturing method

#57
20120025922
2012-02-02

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#58
20110306153
2011-12-15

METHOD OF MANUFACTURING MEMS DEVICE

#59
20110260810
2011-10-27

Out-of-plane MEMS resonator with static out-of-plane deflection

#60
20110227672
2011-09-22

Resonator element, resonator, oscillator, and electronic device

#61
20110221301
2011-09-15

Method and device for suppressing hysteresis of resonators through simultaneous resonance

#62
20110187347
2011-08-04

Electromechanical transducer and a method of providing an electromechanical transducer

#63
20110148537
2011-06-23

MEMS oscillator and method of manufacturing thereof

#64
20110127877
2011-06-02

Silicon MEMS resonators

#65
20110089785
2011-04-21

Micromechanical resonator with enlarged portion

#66
20110084781
2011-04-14

Method for temperature compensation in MEMS resonators with isolated regions of distinct material

#67
20110025426
2011-02-03

Frequency selection and amplifying device

#68
20110018648
2011-01-27

Resonator electrode shields

#69
20100302612
2010-12-02

OSCILLATING STRUCTURE AND OSCILLATOR DEVICE USING THE SAME

#70
20100295414
2010-11-25

Coupled MEMS structure for motion amplification

#71
20100178717
2010-07-15

Method of manufacturing MEMS device

#72
20100176898
2010-07-15

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

#73
20100123524
2010-05-20

Temperature compensated piezoelectric oscillator

#74
20100093125
2010-04-15

Method for temperature compensation in MEMS resonators with isolated regions of distinct material

#75
20100090786
2010-04-15

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#76
20100045274
2010-02-25

Silicon MEMS resonator devices and methods

#77
20100032789
2010-02-11

Passive temperature compensation of silicon MEMS devices

#78
20090315646
2009-12-24

Resonant circuit, method of producing same, and electronic device

#79
20090302707
2009-12-10

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#80
20090295406
2009-12-03

Silicon MEMS resonators

#81
20090289747
2009-11-26

Magnetic nano-resonator

#82
20090275162
2009-11-05

CMOS-compatible bulk-micromachining process for single-crystal MEMS/NEMS devices

#83
20090206963
2009-08-20

TUNABLE METAMATERIALS USING MICROELECTROMECHANICAL STRUCTURES

#84
20090195330
2009-08-06

Vibrator, resonator using the same and electromechanical filter using the same

#85
20080272852
2008-11-06

Low-voltage MEMS oscillator

#86
20080224319
2008-09-18

Micro electro-mechanical system and method of manufacturing the same

#87
20080143450
2008-06-19

PIEZOELECTRIC OSCILLATOR AND METHOD FOR MANUFACTURING THE SAME, AND MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

#88
20080143217
2008-06-19

Process compensated micromechanical resonators

#89
20080136563
2008-06-12

Electromagnetic composite metamaterial

#90
20070279140
2007-12-06

μ-Flap type nano/micro mechanical device and fabrication method thereof

#91
20070214890
2007-09-20

MEMS resonator using frequency tuning

#92
20070188269
2007-08-16

Temperature compensation for silicon MEMS resonator

#93
20070109074
2007-05-17

Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof

#94
20070091971
2007-04-26

MEMS resonator and method of enhancing an output signal current from a MEMS resonator

#95
20070090897
2007-04-26

Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator

#96
20070063613
2007-03-22

Thermoelastically actuated microresonator

#97
20070052497
2007-03-08

MEMS type oscillator, process for fabricating the same, filter, and communication unit

#98
20060214746
2006-09-28

Mechanical resonator

#99
20060186971
2006-08-24

Temperature compensation for silicon MEMS resonator

#100
20060176122
2006-08-10

MEMS oscillator drive

#101
20060172515
2006-08-03

Method of fabricating a structure in a material

#102
20060118423
2006-06-08

Method for making a tunable cantilever device

#103
20060071578
2006-04-06

Micromechanical element having adjustable resonant frequency

#104
20050225413
2005-10-13

Microelectromechanical structures, devices including the structures, and methods of forming and tuning same

#105
20050162239
2005-07-28

Temperature compensation for silicon MEMS resonator

#106
20050161749
2005-07-28

Apparatus and method for vacuum-based nanomechanical energy force and mass sensors

#107
20050151442
2005-07-14

Micromechanical electrostatic resonator

#108
20050073078
2005-04-07

Frequency compensated oscillator design for process tolerances

#109
20050036269
2005-02-17

Vacuum-cavity MEMS resonator

#110
18471444
2025-01-28

Resonator electrode shields

#111
18402483
2025-08-19

Resonant elements and oscillators

#112
18072572
2023-10-24

Resonator electrode shields

#113
17320772
2023-01-03

Resonator electrode shields

#114
17197378
2023-09-26

MEMS resonator with co-located temperature sensor

#115
16591717
2024-09-17

MEMS resonator with colocated temperature sensor

#116
15985622
2019-10-08

Resonator electrode shields

#117
15697417
2019-11-12

Dual-resonator semiconductor die

#118
14634565
2017-11-21

Tunable stiffness mechanical filter and amplifier

#119
14569538
2017-09-26

Laterally-doped MEMS resonator

#120
14300114
2016-02-02

Resonator electrode shields