220748 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Beam resonators Clamped-free beam resonators
MEMS Resonator
#2METAL RIBS IN ELECTROMECHANICAL DEVICES
#3Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
#4Metal ribs in electromechanical devices
#5Metal ribs in electromechanical devices
#6Super-regenerative transceiver with improved frequency discrimination
#7Resonator and resonance device including same
#8Resonance device
#9Resonance device and manufacturing method of resonance device
#10MEMS device having a connection portion formed of a eutectic alloy
#11Resonator and resonance device
#12Frequency-converting super-regenerative transceiver
#13Resonance device and method for producing resonance device
#14Resonator and resonant device
#15RESONATOR AND RESONANT DEVICE
#16Super-regenerative transceiver with improved frequency discrimination
#17Frequency-converting super-regenerative transceiver
#18Micromechanical resonator and resonator system including the same
#19Switchable filters and design structures
#20Frequency compensated oscillator design for process tolerances
#21Frequency compensated oscillator design for process tolerances
#22Signal processor
#23Switchable filters and design structures
#24Switchable filters and design structures
#25Micro-electromechanical resonators and methods of providing a reference frequency
#26Piezoelectric vibrator and frequency adjustment method for piezoelectric vibrator
#27Apparatus and method for tuning a resonance frequency
#28Switchable filters and design structures
#29Measurement system including a network of nanoelectromechanical system resonators
#30Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#31Frequency compensated oscillator design for process tolerances
#32Frequency compensated oscillator design for process tolerances
#33Symmetric dual piezoelectric stack microelectromechanical piezoelectric devices
#34Method for detecting a perturbation by hysteretic cycle using a nonlinear electromechanical resonator and device using the method
#35Microelectromechanical resonator
#36Rotational MEMS resonator for oscillator applications
#37Microelectronic machine-based ariable
#38Sensor, electronic apparatus, robot, and mobile object
#39MEMS element and oscillator
#40Thin film device and method for manufacturing thin film device
#41Resonator electrode shields
#42Method and system of an ultra high Q silicon cantilever resonator for thin film internal friction and Young's modulus measurements
#43Method of manufacturing switchable filters
#44In-plane actuated resonant device and method of manufacturing the device
#45MEMS vibrator and oscillator
#46Switchable electrode for power handling
#47Out-of-plane resonator
#48Out-of plane MEMS resonator with static out-of-plane deflection
#49MEMS resonator, sensor having the same and manufacturing method for MEMS resonator
#50Resonance nanoelectromechanical systems
#51VIBRATION CIRCUIT
#52MEMS vibrator and oscillator
#53MEMS resonator
#54MEMS vibrator, oscillator, and method for manufacturing MEMS vibrator
#55Microelectronic device and electronic apparatus
#56Vibration transducer and its manufacturing method
#57Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#58METHOD OF MANUFACTURING MEMS DEVICE
#59Out-of-plane MEMS resonator with static out-of-plane deflection
#60Resonator element, resonator, oscillator, and electronic device
#61Method and device for suppressing hysteresis of resonators through simultaneous resonance
#62Electromechanical transducer and a method of providing an electromechanical transducer
#63MEMS oscillator and method of manufacturing thereof
#64Silicon MEMS resonators
#65Micromechanical resonator with enlarged portion
#66Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#67Frequency selection and amplifying device
#68Resonator electrode shields
#69OSCILLATING STRUCTURE AND OSCILLATOR DEVICE USING THE SAME
#70Coupled MEMS structure for motion amplification
#71Method of manufacturing MEMS device
#72MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
#73Temperature compensated piezoelectric oscillator
#74Method for temperature compensation in MEMS resonators with isolated regions of distinct material
#75Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#76Silicon MEMS resonator devices and methods
#77Passive temperature compensation of silicon MEMS devices
#78Resonant circuit, method of producing same, and electronic device
#79Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#80Silicon MEMS resonators
#81Magnetic nano-resonator
#82CMOS-compatible bulk-micromachining process for single-crystal MEMS/NEMS devices
#83TUNABLE METAMATERIALS USING MICROELECTROMECHANICAL STRUCTURES
#84Vibrator, resonator using the same and electromechanical filter using the same
#85Low-voltage MEMS oscillator
#86Micro electro-mechanical system and method of manufacturing the same
#87PIEZOELECTRIC OSCILLATOR AND METHOD FOR MANUFACTURING THE SAME, AND MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
#88Process compensated micromechanical resonators
#89Electromagnetic composite metamaterial
#90μ-Flap type nano/micro mechanical device and fabrication method thereof
#91MEMS resonator using frequency tuning
#92Temperature compensation for silicon MEMS resonator
#93Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
#94MEMS resonator and method of enhancing an output signal current from a MEMS resonator
#95Flap resonator, method of manufacturing a flap resonator, and integrated circuit including the flap resonator
#96Thermoelastically actuated microresonator
#97MEMS type oscillator, process for fabricating the same, filter, and communication unit
#98Mechanical resonator
#99Temperature compensation for silicon MEMS resonator
#100MEMS oscillator drive
#101Method of fabricating a structure in a material
#102Method for making a tunable cantilever device
#103Micromechanical element having adjustable resonant frequency
#104Microelectromechanical structures, devices including the structures, and methods of forming and tuning same
#105Temperature compensation for silicon MEMS resonator
#106Apparatus and method for vacuum-based nanomechanical energy force and mass sensors
#107Micromechanical electrostatic resonator
#108Frequency compensated oscillator design for process tolerances
#109Vacuum-cavity MEMS resonator
#110Resonator electrode shields
#111Resonant elements and oscillators
#112Resonator electrode shields
#113Resonator electrode shields
#114MEMS resonator with co-located temperature sensor
#115MEMS resonator with colocated temperature sensor
#116Resonator electrode shields
#117Dual-resonator semiconductor die
#118Tunable stiffness mechanical filter and amplifier
#119Laterally-doped MEMS resonator
#120Resonator electrode shields