220749 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Beam resonators Clamped-clamped beam resonators
MEMS APPARATUS FOR FORMING PHYSICAL UNCLONABLE FUNCTION KEY AND OPERATION METHOD OF MEMS APPARATUS
#2MICRO-RESONATOR DESIGN IMPLEMENTING INTERNAL RESONANCE FOR MEMS APPLICATIONS
#3Microelectromechanical resonator
#4Microelectromechanical resonator
#5TEMPERATURE-STABLE MEMS RESONATOR
#6MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD
#7Methods and devices for microelectromechanical resonators
#8Methods and devices for microelectromechanical resonators
#9Electromechanical resonators based on metal-chalcogenide nanotubes
#10Microelectromechanical resonator
#11Microelectromechanical resonator
#12Micro-resonator design implementing internal resonance for MEMS applications
#13Multifunctional logic device and method
#14Methods and devices for microelectromechanical resonators
#15Electromechanical resonators based on metal-chalcogenide nanotubes
#16MEMS-based passband filter
#17Resonator and resonance device
#18Microelectromechanical resonator
#19Mechanical resonator based cascadable logic device
#20Thermal-piezoresistive oscillator-based aerosol sensor and aerosol sensing method
#21Methods and devices for microelectromechanical resonators
#22Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
#23Tunable narrow bandpass MEMS technology filter using an arch beam microresonator
#24Microelectromechanical resonator system with improved stability with respect to temperature variations
#25Systems and methods for reducing the actuation voltage for electrostatic MEMS devices
#26Switchable filters and design structures
#27Frequency compensated oscillator design for process tolerances
#28Frequency compensated oscillator design for process tolerances
#29Vibration transducer
#30Switchable filters and design structures
#31Switchable filters and design structures
#32Piezoelectric package-integrated contour mode filter devices
#33Piezoelectric package-integrated crystal devices
#34Resonator manufacturing method
#35Micro-electromechanical resonators and methods of providing a reference frequency
#36Ultra low power thermally-actuated oscillator and driving circuit thereof
#37ELECTRONIC DEVICE, PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, VIBRATOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
#38Method of forming a resonator
#39Nanomechanical resonator array and production method thereof
#40Apparatus and method for tuning a resonance frequency
#41Methods and devices for microelectromechanical resonators
#42Methods and devices for microelectromechanical pressure sensors
#43Switchable filters and design structures
#44Frequency compensated oscillator design for process tolerances
#45Frequency compensated oscillator design for process tolerances
#46Junctionless nano-electro-mechanical resonant transistor
#47Vibration device including support portion
#48Resonant transducer, manufacturing method therefor, and multi-layer structure for resonant transducer
#49Volume wave resonator using excitation/detection of vibrations
#50Microelectromechanical resonators
#51Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures
#52Resonant transducer and manufacturing method of resonant transducer
#53Tunable and switchable resonator and filter structures in single crystal piezoelectric MEMS devices using bimorphs
#54Variable capacitor and switch structures in single crystal piezoelectric MEMS devices using bimorphs
#55Resonator and fabrication method thereof
#56Nano resonator and manufacturing method thereof
#57Micromechanical resonator oscillator structure and driving method thereof
#58Micromechanical resonators
#59Frequency stabilization in nonlinear MEMS and NEMS oscillators
#60Method of manufacturing switchable filters
#61Nano scale resonator, nano scale sensor, and fabrication method thereof
#62Methods and apparatus for mechanical resonating structures
#63Inter-digital bulk acoustic resonator
#64Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion
#65MEMS pressure sensor
#66Out-of plane MEMS resonator with static out-of-plane deflection
#67MEMS resonator
#68Method of adjusting the resonance frequency of a micro-machined vibrating element
#69Micromechanical Resonator
#70MEMS in-plane resonators
#71MEMS device
#72MEMS resonator
#73Micromechanical resonator
#74Resonator and production method thereof
#75Micromechanical resonating devices and related methods
#76Electromechanical systems piezoelectric contour mode differential resonators and filters
#77Micromechanical resonator array and method for manufacturing thereof
#78Method and apparatus for MEMS oscillator
#79Resonator using carbon nano substance and method of manufacturing resonator
#80Out-of-plane MEMS resonator with static out-of-plane deflection
#81Method and device for suppressing hysteresis of resonators through simultaneous resonance
#82TEMPERATURE MEASUREMENT SYSTEM COMPRISING A RESONANT MEMS DEVICE
#83SWITCHING DEVICES AND RELATED METHODS
#84Tunable multiwalled nanotube resonator
#85Resonator and oscillator using same
#86Resonator, elastic wave transmission element and fabrication method thereof
#87Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals
#88Resonator and periodic structure
#89Method and apparatus for MEMS oscillator
#90MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency
#91Resonant body transistor and oscillator
#92Bulk-mode resonator having at least partially filled open cavities
#93MICRO-ELECTROMECHANICAL DEVICE AND METHOD FOR FABRICATING THE SAME
#94MEMS resonator including main and sub movable beams, and exciting electrodes excited by alternating-current signal
#95Miniature mechanical resonator device
#96Method for releasing the suspended structure of a NEMS and/or NEMS component
#97Resonance frequency tunable MEMS device
#98Vibrating nano-scale or micro-scale electromechanical component with enhanced detection level
#99Direct contact heat control of micro structures
#100Resonator having a sideways oscillation compressing one connector while extending another
#101Logical element
#102INTEGRATED MEMS AND IC SYSTEMS AND RELATED METHODS
#103Nano electromechanical integrated-circuit bank and switch
#104Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating
#105Methods of forming micro-electromichanical resonators having boron-doped resonator bodies containing eutectic alloys
#106Resonator and filter using the same
#107Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
#108Passive temperature compensation of silicon MEMS devices
#109Micromechanical resonating devices and related methods
#110BULK MODE RESONATOR
#111Resonant circuit, oscillation circuit, filter circuit, and electronic device
#112Tunable multiwalled nanotube resonator
#113Magnetic nano-resonator
#114Micro-electromechanical resonance device with periodic structure
#115Resonator and fabrication method thereof
#116Timing oscillators and related methods
#117Torsional resonator and filter using this
#118Vibrator, resonator using the same and electromechanical filter using the same
#119SEMICONDUCTOR DEVICE TRANSDUCER AND METHOD
#120Micromechanical resonator
#121Tuning and compensation technique for semiconductor bulk resonators
#122Free-standing metallic micromechanical structure, method of manufacturing the same, resonator structure using the same, and method of manufacturing a resonator structure using the same
#123Resonator, oscillator and communication device
#124Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
#125Microsystem comprising a bending beam and process of manufacture
#126Charge biased MEM resonator
#127Micro-electromechanical device
#128Piezo-on-diamond resonators and resonator systems
#129Nano-resonator including beam with composite structure
#130Resonator, oscillator, and communication apparatus
#131High frequency device, power supply device and communication apparatus
#132Low frequency process-variation-insensitive temperature-stable micromechanical resonators
#133Method and apparatus for MEMS oscillator
#134Process compensated micromechanical resonators
#135Temperature controlled MEMS resonator and method for controlling resonator frequency
#136Electromechanical transducer and electrical device
#137Electromechanical filter utilizing a quantum device and sensing electrode
#138Temperature compensation for silicon MEMS resonator
#139Parametric resonator and filter using the same
#140Filter device and transmitter-receiver utilizing beam-structured micro-resonators
#141Electric machine signal selecting element
#142MEMS type oscillator, process for fabricating the same, filter, and communication unit
#143Microelectromechanical system comprising a beam that undergoes flexural deformation
#144Micro-resonator and communication apparatus
#145Micromachine and production method thereof
#146Micro electric machine system resonator, drive method thereof, manufacturing method thereof, and frequency filter
#147Microresonator, band-pass filter, semiconductor device, and communication apparatus
#148Micromachine and method of fabricating the same
#149Capacitive resonators
#150Microresonator, band-pass filter, semiconductor device, and communication apparatus
#151Resonator
#152Temperature compensation for silicon MEMS resonator
#153Micro-resonator, band-pass filter, semiconductor device and communication apparatus
#154Highly tunable low-impedance capacitive micromechanical resonators, oscillators, and processes relating thereto
#155Transducer and electronic device
#156Microresonator, manufacturing method, and electronic apparatus
#157Capacitive vertical silicon bulk acoustic resonator
#158Temperature controlled MEMS resonator and method for controlling resonator frequency
#159Micromachine and method of manufacturing the micromachine
#160Microelectromechanical structures, devices including the structures, and methods of forming and tuning same
#161Temperature controlled MEMS resonator and method for controlling resonator frequency
#162Temperature compensation for silicon MEMS resonator
#163Apparatus and method for vacuum-based nanomechanical energy force and mass sensors
#164Micromechanical electrostatic resonator
#165Frequency compensated oscillator design for process tolerances
#166Vacuum-cavity MEMS resonator
#167Micro-resonator having lid-integrated electrode