220751 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Tuning fork resonators Double-Ended Tuning Fork [DETF] resonators
CAPACITIVELY TRANSDUCED MICRO OR NANO ELECTROMECHANICAL RESONATOR SYSTEM AS SIGNAL AMPLIFIER
#2MICRO/NANO ELECTROMECHANICAL RING OSCILLATOR DEVICE
#3Methods and devices for microelectromechanical resonators
#4Methods and devices for microelectromechanical resonators
#5Spring-mass microelectromechanical resonator
#6Vibrating beam accelerometer with pressure damping
#7Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers
#8Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling
#9Methods and devices for microelectromechanical resonators
#10Vibrating beam accelerometer
#11Mechanically-isolated in-plane pendulous vibrating beam accelerometer
#12In-plane translational vibrating beam accelerometer with mechanical isolation and 4-fold symmetry
#13Micromechanical resonator having reduced size
#14Methods and devices for microelectromechanical resonators
#15Resonation element, resonator, oscillator, electronic device and moving object
#16Methods and devices for microelectromechanical resonators
#17Methods and devices for microelectromechanical pressure sensors
#18Active type temperature compensation resonator structure
#19Oscillation piece, oscillator, electronic device, electronic apparatus, and mobile object
#20Temperature compensated oscillator including MEMS resonator for frequency control
#21Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body
#22MEMS vibrating-beam accelerometer with piezoelectric drive
#23Resonator
#24Electrostatic vibrator and electronic apparatus
#25Resonator electrode shields
#26Miniature mechanical resonator device
#27Nano electromechanical integrated-circuit bank and switch
#28Composite mechanical transducers and approaches therefor
#29Electromagnetic composite metamaterial
#30Temperature controlled MEMS resonator and method for controlling resonator frequency
#31Composite mechanical transducers and approaches therefor
#32Piezoelectric resonator and adjustment method
#33Temperature compensated oscillator including MEMS resonator for frequency control
#34Method for adjusting the frequency of a MEMS resonator
#35Temperature controlled MEMS resonator and method for controlling resonator frequency
#36Method for adjusting the frequency of a MEMS resonator
#37Temperature controlled MEMS resonator and method for controlling resonator frequency
#38Double-ended tuning fork vibratory gyro-sensor