220750 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators Tuning fork resonators
Sub-classes:RESONATOR AND RESONANCE DEVICE
#2Resonance device and manufacturing method
#3RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
#4Vibration device
#5Resonator and resonance device
#6Method of forming capacitive MEMS sensor devices
#7Vibration element manufacturing method, vibration element, electronic device, electronic apparatus, and moving object
#8Ceramic temperature-compensated resonator
#9Lever mechanisms for anti-phase mode isolation in MEMS tuning-fork structures
#10Resonator electrode shields
#11Detection circuit, physical quantity detection apparatus, angular velocity detection apparatus, integrated circuit device, and electronic instrument
#12Method of manufacturing a microelectromechanical system (MEMS) resonator
#13Temperature Stable MEMS Resonator
#14Method for fabricating a microelectromechanical system (MEMS) resonator
#15Serrated MEMS resonators
#16Serrated MEMS Resonators
#17In-plane mechanically coupled microelectromechanical tuning fork resonators
#18Resonator electrode shields
#19Techniques for adding compensating material(s) in semiconductor devices
#20Resonator electrode shields
#21Temperature stable MEMS resonator
#22Temperature stable MEMS resonator
#23Resonator electrode shields
#24Resonator electrode shields
#25Temperature stable MEMS resonator
#26Temperature stable MEMS resonator
#27Temperature stable MEMS resonator
#28Temperature stable MEMS resonator