220755 ⎘
Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators; Constructional features of resonators of material which is not piezo-electric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators; Tuning fork resonators H-shaped, i.e. two tuning forks with common base
RESONANT STRUCTURE IN MICRO ELECTRO MECHANICAL SYSTEMS
#2Resonation element, resonator, oscillator, electronic device and moving object
#3Method of manufacturing packages
#4Micromechanical resonator
#5Resonant-oscillating-device fabrication method