Patents-Review.com
ClassID:

233419 ⎘

H05G2/008 - page 4 - CPC Classification

Classification description:

X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Recent Application in this class:
#901
20120267553
2012-10-25

Extreme ultraviolet light generation apparatus

 #902
20120261596
2012-10-18

Extreme ultra violet light source device

 #903
20120248344
2012-10-04

Extreme ultraviolet light generation system utilizing a variation value formula for the intensity

 #904
20120248343
2012-10-04

Chamber apparatus

 #905
20120248341
2012-10-04

System and method for compensating for thermal effects in an EUV light source

 #906
20120243566
2012-09-27

System and method for generating extreme ultraviolet light

 #907
20120241650
2012-09-27

Target supply unit and extreme ultraviolet light generation apparatus

 #908
20120241649
2012-09-27

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION METHOD

 #909
20120235066
2012-09-20

Drive laser delivery systems for EUV light source

 #910
20120228526
2012-09-13

Laser produced plasma EUV light source

 #911
20120228525
2012-09-13

System and method for generating extreme ultraviolet light

 #912
20120223257
2012-09-06

Extreme ultraviolet light generation apparatus

 #913
20120223256
2012-09-06

Systems and methods for optics cleaning in an EUV light source

 #914
20120217422
2012-08-30

Extreme ultraviolet light generation apparatus

 #915
20120217414
2012-08-30

Apparatus for and method of withdrawing ions in EUV light production apparatus

 #916
20120205559
2012-08-16

TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #917
20120193547
2012-08-02

Laser produced plasma EUV light source

 #918
20120176036
2012-07-12

Extreme ultraviolet light source apparatus

 #919
20120175533
2012-07-12

Extreme ultraviolet light source apparatus, method for controlling extreme ultraviolet light source apparatus, and recording medium with program recorded thereon

 #920
20120161040
2012-06-28

Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light

 #921
20120156623
2012-06-21

SEMICONDUCTOR DEVICE MANUFACTURING METHOD, EXPOSURE METHOD FOR EXPOSURE APPARATUS, EXPOSURE APPARATUS, AND LIGHT SOURCE FOR EXPOSURE APPARATUS

 #922
20120154775
2012-06-21

EUV radiation source and method of generating EUV radiation

 #923
20120147348
2012-06-14

Lithographic apparatus and device manufacturing method

 #924
20120146507
2012-06-14

System and method for generating extreme ultraviolet light, and laser apparatus

 #925
20120145930
2012-06-14

LPP EUV light source and method for producing the same

 #926
20120119116
2012-05-17

Extreme ultraviolet light source apparatus

 #927
20120112101
2012-05-10

Method and arrangement for the stabilization of the source location of the generation of extreme ultraviolet (EUV) radiation based on a discharge plasma

 #928
20120104290
2012-05-03

Extreme ultraviolet light generation system

 #929
20120104289
2012-05-03

Droplet generation and detection device, and droplet control device

 #930
20120097869
2012-04-26

Extreme ultraviolet light source apparatus

 #931
20120092746
2012-04-19

Oscillator-amplifier drive laser with seed protection for an EUV light source

 #932
20120091893
2012-04-19

Extreme ultraviolet light source apparatus

 #933
20120085922
2012-04-12

CHAMBER APPARATUS AND METHOD OF CONTROLLING MOVEMENT OF DROPLET IN THE CHAMBER APPARATUS

 #934
20120080619
2012-04-05

Method and apparatus for the generation of EUV radiation from a gas discharge plasma

 #935
20120080584
2012-04-05

EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods

 #936
20120068091
2012-03-22

Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device

 #937
20120057680
2012-03-08

Supply of a liquid-metal target in X-ray generation

 #938
20120050708
2012-03-01

Source-collector module with GIC mirror and tin rod EUV LPP target system

 #939
20120050707
2012-03-01

Source-collector module with GIC mirror and tin wire EUV LPP target system

 #940
20120050706
2012-03-01

Source-collector module with GIC mirror and xenon ice EUV LPP target system

 #941
20120050704
2012-03-01

Source-collector module with GIC mirror and xenon liquid EUV LPP target system

 #942
20120019826
2012-01-26

Alignment of light source focus

 #943
20120012762
2012-01-19

LASER DEVICE, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #944
20110317256
2011-12-29

Master oscillator-power amplifier drive laser with pre-pulse for EUV light source

 #945
20110310365
2011-12-22

Chamber apparatus and method of maintaining target supply unit

 #946
20110309260
2011-12-22

Chamber apparatus and extreme ultraviolet light generation system

 #947
20110284775
2011-11-24

Chamber apparatus and extreme ultraviolet light generation system

 #948
20110284774
2011-11-24

Target output device and extreme ultraviolet light source apparatus

 #949
20110273691
2011-11-10

RADIATION SOURCE, METHOD OF CONTROLLING A RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A DEVICE

 #950
20110266467
2011-11-03

Extreme ultraviolet light source apparatus

 #951
20110253913
2011-10-20

CHAMBER APPARATUS

 #952
20110253349
2011-10-20

Systems and methods for cooling an optic

 #953
20110248191
2011-10-13

Systems and methods for target material delivery protection in a laser produced plasma EUV light source

 #954
20110240890
2011-10-06

EUV light source glint reduction system

 #955
20110233429
2011-09-29

Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave

 #956
20110226745
2011-09-22

Extreme ultraviolet light generation system

 #957
20110220816
2011-09-15

Extreme ultraviolet light generation apparatus

 #958
20110204265
2011-08-25

Laser-driven light source

 #959
20110204249
2011-08-25

Extreme ultraviolet light generation apparatus

 #960
20110192995
2011-08-11

LPP EUV light source drive laser system

 #961
20110192985
2011-08-11

EUV light source components and methods for producing, using and refurbishing same

 #962
20110181191
2011-07-28

Laser-driven light source

 #963
20110180734
2011-07-28

Extreme ultraviolet light source apparatus

 #964
20110163247
2011-07-07

Extreme ultra violet light source apparatus

 #965
20110141865
2011-06-16

Metrology for extreme ultraviolet light source

 #966
20110140008
2011-06-16

Beam transport system for extreme ultraviolet light source

 #967
20110116604
2011-05-19

Plasma-based generation of X-radiation with a sheet-shaped target material

 #968
20110116077
2011-05-19

EUV high throughput inspection system for defect detection on patterned EUV masks, mask blanks, and wafers

 #969
20110109892
2011-05-12

Source module of an EUV lithographic apparatus, lithographic apparatus, and method for manufacturing a device

 #970
20110101863
2011-05-05

Extreme ultraviolet light source device and method for producing extreme ultraviolet light

 #971
20110079736
2011-04-07

Laser produced plasma EUV light source

 #972
20110058588
2011-03-10

Drive laser for EUV light source

 #973
20110051897
2011-03-03

Liquid target producing device being able to use multiple capillary tube and X-ray and EUV light source device with the liquid target producing device

 #974
20110043777
2011-02-24

TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD USING THE SAME

 #975
20110026002
2011-02-03

EUV radiation generation apparatus

 #976
20110013166
2011-01-20

Radiation system and lithographic apparatus

 #977
20100327192
2010-12-30

EUV light producing system and method utilizing an alignment laser

 #978
20100321660
2010-12-23

Method and apparatus for reducing down time of a lithography system

 #979
20100294953
2010-11-25

Laser produced plasma EUV light source

 #980
20100290587
2010-11-18

Laser-based accelerator for interrogation of remote containers

 #981
20100288937
2010-11-18

Extreme ultraviolet light source apparatus

 #982
20100282987
2010-11-11

Arrangement for the continuous generation of liquid tin as emitter material in EUV radiation sources

 #983
20100253928
2010-10-07

Radiation source

 #984
20100243922
2010-09-30

Extreme ultraviolet light source apparatus

 #985
20100213395
2010-08-26

Extreme ultraviolet light source apparatus

 #986
20100213275
2010-08-26

Target supply apparatus, control system, control apparatus and control circuit thereof

 #987
20100200776
2010-08-12

Extreme ultraviolet light source device

 #988
20100192973
2010-08-05

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND CLEANING METHOD

 #989
20100181503
2010-07-22

Extreme ultraviolet light source apparatus

 #990
20100181498
2010-07-22

Differential evacuation system

 #991
20100176313
2010-07-15

Extreme ultraviolet light source

 #992
20100176312
2010-07-15

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

 #993
20100176310
2010-07-15

Extreme ultra violet light source apparatus

 #994
20100171049
2010-07-08

Extreme ultraviolet light source apparatus

 #995
20100140514
2010-06-10

Gas management system for a laser-produced-plasma EUV light source

 #996
20100140513
2010-06-10

Extreme ultraviolet light source apparatus

 #997
20100127191
2010-05-27

Systems and methods for drive laser beam delivery in an EUV light source

 #998
20100127186
2010-05-27

Laser produced plasma EUV light source

 #999
20100117009
2010-05-13

Extreme ultraviolet light source device and control method for extreme ultraviolet light source device

 #1000
20100110405
2010-05-06

Radiation source and lithographic apparatus

 #1001
20100097593
2010-04-22

EUV light source, EUV exposure apparatus, and electronic device manufacturing method

 #1002
20100090133
2010-04-15

Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light

 #1003
20100090132
2010-04-15

Extreme ultraviolet light source apparatus

 #1004
20100078580
2010-04-01

Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device

 #1005
20100078579
2010-04-01

Extreme ultraviolet light source apparatus

 #1006
20100078577
2010-04-01

Apparatus and method of adjusting a laser light source for an EUV source device

 #1007
20100053581
2010-03-04

Radiation source and lithographic apparatus

 #1008
20100053576
2010-03-04

Radiation source, lithographic apparatus and device manufacturing method

 #1009
20100051832
2010-03-04

Extreme ultraviolet light source apparatus

 #1010
20100039631
2010-02-18

Radiation sources and methods of generating radiation

 #1011
20100038562
2010-02-18

Radiation source, lithographic apparatus and device manufacturing method

 #1012
20100032590
2010-02-11

Debris protection system having a magnetic field for an EUV light source

 #1013
20100028707
2010-02-04

Targets and processes for fabricating same

 #1014
20100025223
2010-02-04

Extreme ultraviolet light source device

 #1015
20100024980
2010-02-04

Laser produced plasma euv light source

 #1016
20100002211
2010-01-07

Lithographic apparatus

 #1017
20090314967
2009-12-24

Extreme ultra violet light source apparatus

 #1018
20090272919
2009-11-05

Extreme ultraviolet light source apparatus

 #1019
20090267005
2009-10-29

Drive laser delivery systems for EUV light source

 #1020
20090261277
2009-10-22

Extreme ultra violet light source apparatus

 #1021
20090261242
2009-10-22

Apparatus for and method of withdrawing ions in EUV light production apparatus

 #1022
20090250641
2009-10-08

Extreme ultra violet light source apparatus

 #1023
20090250639
2009-10-08

Radiation source

 #1024
20090230326
2009-09-17

Systems and methods for target material delivery in a laser produced plasma EUV light source

 #1025
20090218522
2009-09-03

Extreme ultra violet light source apparatus

 #1026
20090218521
2009-09-03

Gaseous neutral density filters and related methods

 #1027
20090161201
2009-06-25

Drive laser for EUV light source

 #1028
20090159808
2009-06-25

EUV light source components and methods for producing, using and refurbishing same

 #1029
20090095925
2009-04-16

LPP EUV light source drive laser system

 #1030
20090090877
2009-04-09

Module and method for producing extreme ultraviolet radiation

 #1031
20090073396
2009-03-19

Lithographic apparatus and device manufacturing method

 #1032
20090057567
2009-03-05

Gas management system for a laser-produced-plasma EUV light source

 #1033
20090032740
2009-02-05

Laser-driven light source

 #1034
20090016493
2009-01-15

Renewable laser target

 #1035
20090014668
2009-01-15

Laser produced plasma EUV light source having a droplet stream produced using a modulated disturbance wave

 #1036
20080267816
2008-10-30

Optical element contamination preventing method and optical element contamination preventing device of extreme ultraviolet light source

 #1037
20080239262
2008-10-02

Radiation source for generating electromagnetic radiation and method for generating electromagnetic radiation

 #1038
20080237501
2008-10-02

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND EXTREME ULTRAVIOLET RADIATION GENERATING METHOD

 #1039
20080237498
2008-10-02

High-efficiency, low-debris short-wavelength light sources

 #1040
20080197298
2008-08-21

Extreme ultra violet light source apparatus

 #1041
20080197297
2008-08-21

High repetition rate laser produced plasma EUV light source

 #1042
20080179548
2008-07-31

Laser produced plasma EUV light source

 #1043
20080157011
2008-07-03

Extreme ultraviolet light and X-ray source target and manufacturing method thereof

 #1044
20080149862
2008-06-26

Laser produced plasma EUV light source

 #1045
20080137696
2008-06-12

Quasi-phase matching and quantum control of high harmonic generation in waveguides using counterpropagating beams

 #1046
20080116400
2008-05-22

Method and device for producing extreme ultraviolet radiation or soft X-ray radiation

 #1047
20080087847
2008-04-17

Drive laser delivery systems for EUV light source

 #1048
20080083887
2008-04-10

Extreme ultra violet light source apparatus

 #1049
20080069171
2008-03-20

High-order harmonic generation in a capillary discharge

 #1050
20080068575
2008-03-20

EUV light source, EUV exposure equipment, and semiconductor device manufacturing method

 #1051
20080067456
2008-03-20

Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contamination

 #1052
20080048133
2008-02-28

Source material collection unit for a laser produced plasma EUV light source

 #1053
20080023657
2008-01-31

Extreme ultraviolet light source

 #1054
20080017810
2008-01-24

Correction of spatial instability of an EUV source by laser beam steering

 #1055
20080017801
2008-01-24

EUV light source

 #1056
20070291350
2007-12-20

Drive laser for EUV light source

 #1057
20070278429
2007-12-06

High flux, high energy photon source

 #1058
20070228303
2007-10-04

Light source

 #1059
20070228298
2007-10-04

Extreme ultra violet light source device

 #1060
20070158597
2007-07-12

EUV light source

 #1061
20070158596
2007-07-12

EUV light source

 #1062
20070158540
2007-07-12

Liquid trap for collecting liquids in a vacuum device

 #1063
20070125970
2007-06-07

EUV light source

 #1064
20070053487
2007-03-08

Soft X-ray microscope

 #1065
20070029511
2007-02-08

High repetition rate laser produced plasma EUV light source

 #1066
20070001131
2007-01-04

LPP EUV light source drive laser system

 #1067
20060291627
2006-12-28

EUV, XUV, and X-Ray wavelength sources created from laser plasma produced from liquid metal solutions

 #1068
20060255298
2006-11-16

Laser produced plasma EUV light source with pre-pulse

 #1069
20060249699
2006-11-09

Alternative fuels for EUV light source

 #1070
20060219957
2006-10-05

Laser produced plasma EUV light source

 #1071
20060215712
2006-09-28

Method and arrangement for the efficient generation of short-wavelength radiation based on a laser-generated plasma

 #1072
20060192156
2006-08-31

Light source apparatus and exposure apparatus having the same

 #1073
20060192152
2006-08-31

LPP EUV light source drive laser system

 #1074
20060186356
2006-08-24

Extreme ultra violet light source device

 #1075
20060176925
2006-08-10

Extreme ultra violet light source device

 #1076
20060146906
2006-07-06

LLP EUV drive laser

 #1077
20060054238
2006-03-16

Device and method for the creation of droplet targets

 #1078
20060043319
2006-03-02

Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiation

 #1079
20060039435
2006-02-23

Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography

 #1080
20060017023
2006-01-26

High flux, high energy photon source

 #1081
20060011870
2006-01-19

Light source unit and exposure apparatus having the same

 #1082
20050274912
2005-12-15

Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasma

 #1083
20050258768
2005-11-24

Method and arrangement for the plasma-based generation of intensive short-wavelength radiation

 #1084
20050230645
2005-10-20

Extreme ultraviolet light source

 #1085
20050205811
2005-09-22

LPP EUV light source

 #1086
20050205810
2005-09-22

High repetition rate laser produced plasma EUV light source

 #1087
20050205803
2005-09-22

Light source device and exposure equipment using the same

 #1088
20050199829
2005-09-15

EUV light source

 #1089
20050169429
2005-08-04

Method and arrangement for the plasma-based generation of soft x-radiation

 #1090
20050167618
2005-08-04

Light source device and exposure equipment using the same

 #1091
20050167617
2005-08-04

Method of generating extreme ultraviolet radiation

 #1092
20050129177
2005-06-16

Method and arrangement for producing radiation

 #1093
20050100071
2005-05-12

Electromagnetic radiation generation using a laser produced plasma

 #1094
20050072942
2005-04-07

EUV source

 #1095
18382646
2024-07-09

Multi-directional short-wave methods and systems

 #1096
17187272
2022-03-15

Droplet generator and method of servicing a photolithographic tool

 #1097
16678274
2020-08-25

Extreme ultraviolet (EUV) exposure apparatus and method of manufacturing semiconductor device using the same

 #1098
16409395
2020-05-12

Systems and methods for protecting imaging devices against high-radiant-flux light

 #1099
16240951
2019-12-17

Extreme ultraviolet radiation source and droplet catcher thereof

 #1100
16128545
2019-11-12

Method and device for generating electromagnetic radiation by means of a laser-produced plasma

 #1101
15882733
2018-12-25

Apparatus for decontaminating windows of an EUV source module

 #1102
15730141
2018-08-07

Systems and methods for providing an ion beam

 #1103
15687367
2018-12-04

Receptacle for capturing material that travels on a material path

 #1104
15463909
2018-08-14

Metrology system for an extreme ultraviolet light source

 #1105
15402134
2018-02-27

Reducing an optical power of a reflected light beam

 #1106
15363570
2017-09-05

EUV LPP source with improved dose control by combining pulse modulation and pulse control mode

 #1107
15343768
2017-11-28

EUV LPP source with dose control and laser stabilization using variable width laser pulses

 #1108
15284513
2017-04-04

EUV light source with spectral purity filter and power recycling

 #1109
14946668
2017-01-03

Systems and methods to avoid instability conditions in a source plasma chamber

 #1110
14824267
2016-08-23

System and method for controlling source laser firing in an LPP EUV light source

 #1111
14798646
2016-09-20

Solution for EUV power increment at wafer level

 #1112
14718577
2016-05-10

Coreless transformer UV light source system

 #1113
14317280
2015-10-06

Extreme ultraviolet source with magnetic cusp plasma control

 #1114
14304329
2017-06-27

High brightness liquid droplet X-ray source for semiconductor metrology

 #1115
14181697
2017-11-21

Compac X-ray source for semiconductor metrology

 #1116
14137030
2014-08-19

System and method for controlling droplet timing and steering in an LPP EUV light source

 #1117
14035847
2014-10-28

System and method for laser beam focus control for extreme ultraviolet laser produced plasma source

 #1118
14017981
2014-12-02

Apparatus for protecting EUV optical elements