Patents-Review.com
ClassID:

233419 ⎘

H05G2/008 - page 3 - CPC Classification

Classification description:

X-ray radiation generated from plasma involving a beam of energy, e.g. laser or electron beam in the process of exciting the plasma

Recent Application in this class:
#601
20160320708
2016-11-03

Extreme ultraviolet lithography collector contamination reduction

 #602
20160316551
2016-10-27

Laser device and extreme ultraviolet light generation system

 #603
20160316550
2016-10-27

Radiation source, metrology apparatus, lithographic system and device manufacturing method

 #604
20160315439
2016-10-27

Mirror device

 #605
20160309571
2016-10-20

Radiation source, metrology apparatus, lithographic system and device manufacturing method

 #606
20160306282
2016-10-20

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

 #607
20160302295
2016-10-13

Method of aligning a laser-based radiation source

 #608
20160299443
2016-10-13

Cooler for use in a device in a vacuum

 #609
20160295674
2016-10-06

Device for emitting extreme ultraviolet light

 #610
20160285222
2016-09-29

Laser unit and extreme ultraviolet light generating system

 #611
20160278196
2016-09-22

Radiation source having debris control

 #612
20160278195
2016-09-22

Apparatus for generating extreme ultraviolet light

 #613
20160274467
2016-09-22

Radiation source and method for lithography

 #614
20160274466
2016-09-22

Target material supply apparatus for an extreme ultraviolet light source

 #615
20160270200
2016-09-15

Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer metrology

 #616
20160268120
2016-09-15

Continuous-wave laser-sustained plasma illumination source

 #617
20160259251
2016-09-08

Method and device for splitting a high-power light beam to provide simultaneous sub-beams to photolithography scanners

 #618
20160255709
2016-09-01

Extreme ultraviolet light generation apparatus

 #619
20160255708
2016-09-01

Extreme ultraviolet light source utilizing a target of finite extent

 #620
20160255707
2016-09-01

Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target

 #621
20160252821
2016-09-01

Radiation source device, lithographic apparatus and device manufacturing method

 #622
20160249443
2016-08-25

Target supply device

 #623
20160249442
2016-08-25

Plasma-based light source

 #624
20160248213
2016-08-25

Laser apparatus and method for adding chamber to laser apparatus

 #625
20160242268
2016-08-18

Extreme ultraviolet source with magnetic cusp plasma control

 #626
20160234920
2016-08-11

Extreme ultraviolet light generation apparatus

 #627
20160227639
2016-08-04

Apparatus and methods for generating electromagnetic radiation

 #628
20160227638
2016-08-04

Extreme ultraviolet light generation apparatus including target droplet joining apparatus

 #629
20160205758
2016-07-14

System and method for inhibiting radiative emission of a laser-sustained plasma source

 #630
20160205757
2016-07-14

Dual pulse driven extreme ultraviolet (EUV) radiation source method

 #631
20160204567
2016-07-14

Alignment system and extreme ultraviolet light generation system

 #632
20160202614
2016-07-14

System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production

 #633
20160198557
2016-07-07

Beam guiding apparatus

 #634
20160195819
2016-07-07

Radiation source and lithographic apparatus

 #635
20160195729
2016-07-07

Beam guiding apparatus

 #636
20160195714
2016-07-07

Foil trap and light source device using such foil trap

 #637
20160192470
2016-06-30

Extreme ultraviolet light generation apparatus

 #638
20160192469
2016-06-30

Extreme ultraviolet light generation apparatus

 #639
20160192468
2016-06-30

Extreme ultraviolet light source

 #640
20160192467
2016-06-30

Apparatus for generating extreme ultra-violet beam using multi-gas cell modules

 #641
20160174352
2016-06-16

Apparatus for and method of source material delivery in a laser produced plasma EUV light source

 #642
20160174351
2016-06-16

Variable radius mirror dichroic beam splitter module for extreme ultraviolet source

 #643
20160172820
2016-06-16

Laser amplifier, laser apparatus, and extreme ultraviolet light generating system

 #644
20160172814
2016-06-16

Laser unit and extreme ultraviolet light generating system

 #645
20160169814
2016-06-16

Plasma light source and inspection apparatus including the same

 #646
20160165710
2016-06-09

Method, apparatus and system for using free-electron laser compatible EUV beam for semiconductor wafer processing

 #647
20160165709
2016-06-09

System and Method for Isolating Gain Elements in a Laser System

 #648
20160165708
2016-06-09

Target supply apparatus and EUV light generating apparatus

 #649
20160161852
2016-06-09

MIRROR FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE SYSTEM AND METHOD FOR PROCESSING A MIRROR

 #650
20160156150
2016-06-02

Laser apparatus and extreme ultraviolet light generation system

 #651
20160150626
2016-05-26

Droplet generator steering system

 #652
20160150625
2016-05-26

Extreme ultraviolet source with dual magnetic cusp particle catchers

 #653
20160143122
2016-05-19

Apparatus and system for generating extreme ultraviolet light and method of using the same

 #654
20160143121
2016-05-19

Extreme ultraviolet light source device

 #655
20160135276
2016-05-12

Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system

 #656
20160135275
2016-05-12

EUV radiation generating device including a beam influencing optical unit

 #657
20160128172
2016-05-05

System and method for generating extreme ultraviolet light

 #658
20160128171
2016-05-05

Apparatus and methods for optics protection from debris in plasma-based light source

 #659
20160128170
2016-05-05

Apparatus for and method of supplying target material

 #660
20160120012
2016-04-28

X-RAY SOURCE AND METHOD FOR PRODUCING X-RAYS

 #661
20160116332
2016-04-28

Light source and photolithography apparatus containing the same, calibrating apparatus and method

 #662
20160113101
2016-04-21

EUV light source and exposure apparatus

 #663
20160113100
2016-04-21

EUV light source and exposure apparatus

 #664
20160087389
2016-03-24

LASER SYSTEM, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD OF CONTROLLING LASER APPARATUS

 #665
20160081174
2016-03-17

Dual pulse driven extreme ultraviolet (EUV) radiation source utilizing a droplet comprising a metal core with dual concentric shells of buffer gas

 #666
20160073487
2016-03-10

Extreme ultraviolet light generation system

 #667
20160073486
2016-03-10

Extreme UV radiation light source device

 #668
20160066402
2016-03-03

Method and system for controlling convection within a plasma cell

 #669
20160066401
2016-03-03

Extreme ultraviolet light generating system

 #670
20160057845
2016-02-25

Laser-driven light source for generating light from a plasma in an pressurized chamber

 #671
20160054663
2016-02-25

Source collector apparatus, lithographic apparatus and method

 #672
20160044773
2016-02-11

Target generation device and extreme ultraviolet light generation apparatus

 #673
20160044772
2016-02-11

System and method to reduce oscillations in extreme ultraviolet light generation

 #674
20160037616
2016-02-04

Extreme UV light generation apparatus and method

 #675
20160029471
2016-01-28

Target for extreme ultraviolet light source

 #676
20160029470
2016-01-28

EUV light source apparatus

 #677
20160026091
2016-01-28

Radiation collector, radiation source and lithographic apparatus

 #678
20160018739
2016-01-21

Method for reducing contamination in extreme ultraviolet lithography light source

 #679
20160014874
2016-01-14

Compact, all-optical generation of coherent X-rays

 #680
20160012929
2016-01-14

Radiation source-collector and method for manufacture

 #681
20160011345
2016-01-14

Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof

 #682
20160011057
2016-01-14

Calibration of photoelectromagnetic sensor in a laser source

 #683
20160011056
2016-01-14

Calibration of photoelectromagnetic sensor in a laser source

 #684
20160007435
2016-01-07

Systems and methods for synchronous operation of debris-mitigation devices

 #685
20160007434
2016-01-07

Extreme ultraviolet light source

 #686
20160007433
2016-01-07

Extreme ultraviolet source with magnetic cusp plasma control

 #687
20150357179
2015-12-10

Broadband light source including transparent portion with high hydroxide content

 #688
20150351211
2015-12-03

Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam

 #689
20150351210
2015-12-03

System and method for generating extreme ultraviolet light, and laser apparatus

 #690
20150351209
2015-12-03

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

 #691
20150351208
2015-12-03

LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

 #692
20150346457
2015-12-03

MIRROR UNIT

 #693
20150342016
2015-11-26

Target for laser produced plasma extreme ultraviolet light source

 #694
20150342015
2015-11-26

Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system

 #695
20150340838
2015-11-26

Laser apparatus and extreme ultraviolet light generation system

 #696
20150338753
2015-11-26

Radiation source and lithographic apparatus

 #697
20150334814
2015-11-19

Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters

 #698
20150334813
2015-11-19

Beam delivery for EUV lithography

 #699
20150333471
2015-11-19

High power broadband light source

 #700
20150296604
2015-10-15

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #701
20150296603
2015-10-15

Apparatus and method for energy beam position alignment

 #702
20150296602
2015-10-15

Method and apparatus for generating radiation

 #703
20150294744
2015-10-15

Device for quantum beam generation, method for quantum beam generation, and device for laser fusion

 #704
20150293456
2015-10-15

Droplet generator, EUV radiation source, lithographic apparatus, method for generating droplets and device manufacturing method

 #705
20150289353
2015-10-08

Laser-driven light source

 #706
20150286145
2015-10-08

Lithographic apparatus

 #707
20150282288
2015-10-01

System and method for transverse pumping of laser-sustained plasma

 #708
20150282287
2015-10-01

Transport system for an extreme ultraviolet light source

 #709
20150282285
2015-10-01

Discharge electrodes for use in a light source device

 #710
20150271905
2015-09-24

Light source with nanostructured antireflection layer

 #711
20150268559
2015-09-24

Method and apparatus for generating radiation

 #712
20150266067
2015-09-24

Apparatus for and method of active cleaning of EUV optic with RF plasma field

 #713
20150264793
2015-09-17

Extreme ultraviolet light generation system

 #714
20150264792
2015-09-17

Laser beam controlling device and extreme ultraviolet light generating apparatus

 #715
20150264791
2015-09-17

Method and Apparatus for Generating Radiation

 #716
20150261094
2015-09-17

Collector in an extreme ultraviolet lithography system with optimal air curtain protection

 #717
20150257246
2015-09-10

Beam position control for an extreme ultraviolet light source

 #718
20150250045
2015-09-03

Adaptive laser system for an extreme ultraviolet light source

 #719
20150245457
2015-08-27

Extreme ultraviolet light source apparatus

 #720
20150230325
2015-08-13

Methods and apparatus for laser produced plasma EUV light source

 #721
20150223313
2015-08-06

Nozzle

 #722
20150209701
2015-07-30

Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material

 #723
20150208494
2015-07-23

Extreme ultraviolet light source

 #724
20150198437
2015-07-16

Projection exposure apparatus for microlithography comprising an optical distance measurement system

 #725
20150194230
2015-07-09

EUV collector

 #726
20150189730
2015-07-02

Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light

 #727
20150189729
2015-07-02

Target for laser produced plasma extreme ultraviolet light source

 #728
20150189728
2015-07-02

Extreme ultraviolet light source

 #729
20150188277
2015-07-02

Slab amplifier, and laser apparatus and extreme ultraviolet light generation apparatus including slab amplifier

 #730
20150179401
2015-06-25

Method for controlling an interaction between droplet targets and a laser and apparatus for conducting said method

 #731
20150173164
2015-06-18

Final focus assembly for extreme ultraviolet light source

 #732
20150163893
2015-06-11

Plasma light source apparatus and plasma light generating method

 #733
20150156855
2015-06-04

Apparatus for and method of source material delivery in a laser produced plasma EUV light source

 #734
20150146182
2015-05-28

Radiation source

 #735
20150144809
2015-05-28

TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #736
20150138519
2015-05-21

Contamination trap for a lithographic apparatus

 #737
20150137012
2015-05-21

EUV light source

 #738
20150137011
2015-05-21

System and method for correcting the focus of a laser beam

 #739
20150123019
2015-05-07

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

 #740
20150123018
2015-05-07

System and method for generating extreme ultraviolet light

 #741
20150108373
2015-04-23

Photon source, metrology apparatus, lithographic system and device manufacturing method

 #742
20150108365
2015-04-23

Arrangement and method for cooling a plasma-based radiation source

 #743
20150102239
2015-04-16

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

 #744
20150098072
2015-04-09

Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system

 #745
20150097107
2015-04-09

APPARATUS FOR GENERATING EXTREME ULTRAVIOLET LIGHT USING PLASMA

 #746
20150090907
2015-04-02

Radiation source for generating short-wavelength radiation from plasma

 #747
20150083939
2015-03-26

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

 #748
20150083938
2015-03-26

COOLER FOR PLASMA GENERATION CHAMBER OF EUV RADIATION SOURCE

 #749
20150083937
2015-03-26

LASER-OPERATED LIGHT SOURCE

 #750
20150083936
2015-03-26

System and method for creating and utilizing dual laser curtains from a single laser in an LPP EUV light source

 #751
20150083898
2015-03-26

System and method for controlling droplet timing in an LPP EUV light source

 #752
20150077729
2015-03-19

Module and method for producing extreme ultraviolet radiation

 #753
20150076374
2015-03-19

Target for extreme ultraviolet light source

 #754
20150076372
2015-03-19

High frequency, repetitive, compact toroid-generation for radiation production

 #755
20150076359
2015-03-19

System and method for generation of extreme ultraviolet light

 #756
20150070675
2015-03-12

Fuel system for lithographic apparatus, EUV source, lithographic apparatus and fuel filtering method

 #757
20150069273
2015-03-12

Transport system for an extreme ultraviolet light source

 #758
20150063547
2015-03-05

Method for stabilizing a plasma and an improved ionization chamber

 #759
20150041659
2015-02-12

System and method for return beam metrology with optical switch

 #760
20150034845
2015-02-05

EUVL light source system and method

 #761
20150034844
2015-02-05

System and method for reducing contamination in extreme ultraviolet lithography light source

 #762
20150029478
2015-01-29

Fuel stream generator, source collector apparatus and lithographic apparatus

 #763
20150028231
2015-01-29

LASER APPARATUS

 #764
20150022795
2015-01-22

Power supply for a discharge produced plasma EUV source

 #765
20150008345
2015-01-08

Extreme ultraviolet light generation apparatus

 #766
20150008335
2015-01-08

System and method for producing an exclusionary buffer gas flow in an EUV light source

 #767
20140375974
2014-12-25

Source-collector device, lithographic apparatus, and device manufacturing method

 #768
20140374625
2014-12-25

EUV DISCHARGE LAMP WITH MOVING PROTECTIVE COMPONENT

 #769
20140374611
2014-12-25

Continuous generation of extreme ultraviolet light

 #770
20140374605
2014-12-25

Optical device, laser apparatus, and extreme ultraviolet light generation system

 #771
20140368803
2014-12-18

Illumination optical unit for EUV projection lithography, and optical system comprising such an illumination optical unit

 #772
20140368802
2014-12-18

Radiation source

 #773
20140367592
2014-12-18

Gas refraction compensation for laser-sustained plasma bulbs

 #774
20140353528
2014-12-04

Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system

 #775
20140348302
2014-11-27

Supply of a liquid-metal target in X-ray generation

 #776
20140348189
2014-11-27

LASER APPARATUS

 #777
20140348188
2014-11-27

Laser apparatus and extreme ultraviolet light generation system

 #778
20140346376
2014-11-27

LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #779
20140346375
2014-11-27

LASER APPARATUS, LASER SYSTEM, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #780
20140346374
2014-11-27

FARADAY ROTATOR, OPTICAL ISOLATOR, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #781
20140346373
2014-11-27

Droplet generator with actuator induced nozzle cleaning

 #782
20140341248
2014-11-20

Amplifier, laser apparatus, and extreme ultraviolet light generation system

 #783
20140333915
2014-11-13

Radiation source

 #784
20140332700
2014-11-13

Extreme ultraviolet light generation apparatus

 #785
20140326904
2014-11-06

Sn vapor EUV LLP source system for EUV lithography

 #786
20140319388
2014-10-30

Laser apparatus and extreme ultraviolet light generation apparatus

 #787
20140319387
2014-10-30

Extreme ultraviolet light source devices

 #788
20140314210
2014-10-23

X-ray cells and other components having gas cells with thermally-induced density gradients

 #789
20140307857
2014-10-16

Arrangement for the handling of a liquid metal for cooling revolving components of a radiation source based on a radiation-emitting plasma

 #790
20140306115
2014-10-16

Debris protection system for reflective optic utilizing gas flow

 #791
20140299791
2014-10-09

Target for extreme ultraviolet light source

 #792
20140284502
2014-09-25

Target generation device and extreme ultraviolet light generation apparatus

 #793
20140264093
2014-09-18

Laser produced plasma EUV light source

 #794
20140264091
2014-09-18

Beam position control for an extreme ultraviolet light source

 #795
20140264089
2014-09-18

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRA VIOLET RADIATION

 #796
20140264087
2014-09-18

Target for laser produced plasma extreme ultraviolet light source

 #797
20140261761
2014-09-18

Method of and apparatus for supply and recovery of target material

 #798
20140254766
2014-09-11

Method and arrangement for generating a jet of fluid, method and system for transforming the jet into a plasma, and uses of said system

 #799
20140253894
2014-09-11

Radiation source

 #800
20140253716
2014-09-11

Chamber for extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation apparatus

 #801
20140246607
2014-09-04

EUV light source using cryogenic droplet targets in mask inspection

 #802
20140239203
2014-08-28

Target supply device and extreme ultraviolet light generation apparatus

 #803
20140233005
2014-08-21

System and method for adjusting seed laser pulse width to control EUV output energy

 #804
20140231679
2014-08-21

Method and technique to control laser effects through tuning of parameters such as repetition rate

 #805
20140218706
2014-08-07

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

 #806
20140217311
2014-08-07

Chamber and extreme ultraviolet light generation apparatus

 #807
20140216576
2014-08-07

Gas lock device and extreme ultraviolet light generation apparatus

 #808
20140211184
2014-07-31

Radiation source

 #809
20140209819
2014-07-31

Target supply device and EUV light generation chamber

 #810
20140209817
2014-07-31

Radiation source and method for lithographic apparatus for device manufacture

 #811
20140203195
2014-07-24

Thermal monitor for an extreme ultraviolet light source

 #812
20140203194
2014-07-24

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRA VIOLET LIGHT

 #813
20140203193
2014-07-24

Radiation source

 #814
20140191108
2014-07-10

Alignment system and extreme ultraviolet light generation system

 #815
20140183379
2014-07-03

System and method for generating extreme ultraviolet light

 #816
20140166907
2014-06-19

Apparatus and method for generating extreme ultra violet radiation

 #817
20140160453
2014-06-12

Radiation source

 #818
20140159581
2014-06-12

Method and device for generating optical radiation by means of electrically operated pulsed discharges

 #819
20140151583
2014-06-05

Alignment of light source focus

 #820
20140151582
2014-06-05

Droplet dispensing device and light source comprising such a droplet dispensing device

 #821
20140145096
2014-05-29

EUV light source with subsystem(s) for maintaining LPP drive laser output during EUV non-output periods

 #822
20140138561
2014-05-22

Target supply device

 #823
20140131587
2014-05-15

Extreme ultraviolet light source apparatus

 #824
20140126043
2014-05-08

Viewport protector for an extreme ultraviolet light source

 #825
20140124685
2014-05-08

System and method for generating extreme ultraviolet light, and laser apparatus

 #826
20140117258
2014-05-01

High brightness laser-driven light source

 #827
20140111635
2014-04-24

Extreme ultraviolet light generation apparatus

 #828
20140110609
2014-04-24

Systems and methods for optics cleaning in an EUV light source

 #829
20140102875
2014-04-17

Target material supply apparatus for an extreme ultraviolet light source

 #830
20140091239
2014-04-03

System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production

 #831
20140085741
2014-03-27

Beam guide and method for adjusting the opening angle of a laser beam

 #832
20140084186
2014-03-27

EUV radiation generating apparatus and operating methods

 #833
20140078480
2014-03-20

Apparatus for creating an extreme ultraviolet light, an exposing apparatus including the same, and electronic devices manufactured using the exposing apparatus

 #834
20140077104
2014-03-20

Drive laser delivery systems for EUV light source

 #835
20140061512
2014-03-06

Target supply device and extreme ultraviolet light generation apparatus

 #836
20140042653
2014-02-13

Control method for target supply device, and target supply device

 #837
20140034852
2014-02-06

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #838
20140034684
2014-02-06

Target supply apparatus, control system, control apparatus and control circuit thereof

 #839
20140030542
2014-01-30

Targets and processes for fabricating same

 #840
20140008554
2014-01-09

Extreme ultraviolet light source apparatus

 #841
20140008552
2014-01-09

Target supply apparatus, chamber, and extreme ultraviolet light generation apparatus

 #842
20140001369
2014-01-02

CHAMBER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

 #843
20130329204
2013-12-12

Photon source, metrology apparatus, lithographic system and device manufacturing method

 #844
20130327963
2013-12-12

EUV excitation light source with a laser beam source and a beam guide device for manipulating the laser beam

 #845
20130327955
2013-12-12

Radiation source, lithographic apparatus and device manufacturing method

 #846
20130322482
2013-12-05

System and method for protecting a seed laser in an EUV light source with a Bragg AOM

 #847
20130321926
2013-12-05

System and method for separating a main pulse and a pre-pulse beam from a laser source

 #848
20130321901
2013-12-05

Drive laser for EUV light source

 #849
20130320232
2013-12-05

Extreme ultraviolet light generation by polarized laser beam

 #850
20130313423
2013-11-28

Advanced debris mitigation of EUV light source

 #851
20130234051
2013-09-12

Droplet generator with actuator induced nozzle cleaning

 #852
20130221587
2013-08-29

Target material refinement device and target supply apparatus

 #853
20130209077
2013-08-15

Target supply apparatus and target supply method

 #854
20130207004
2013-08-15

Source-collector modules for EUV lithography employing a GIC mirror and a LPP source

 #855
20130187065
2013-07-25

Extreme ultraviolet light source device and control method for extreme ultraviolet light source device

 #856
20130186567
2013-07-25

TARGET SUPPLY DEVICE

 #857
20130181073
2013-07-18

Liquid metal target forming apparatus

 #858
20130161540
2013-06-27

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

 #859
20130153792
2013-06-20

Droplet generator steering system

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2013-06-13

Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light

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20130146682
2013-06-13

TARGET SUPPLY DEVICE

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20130141709
2013-06-06

Lithographic apparatus, EUV radiation generation apparatus and device manufacturing method

 #863
20130134330
2013-05-30

Holder device, chamber apparatus, and extreme ultraviolet light generation system

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20130126761
2013-05-23

Chamber apparatus and extreme ultraviolet light generation system

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20130119232
2013-05-16

System and method for generating extreme ultraviolet light

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20130114215
2013-05-09

Laser apparatus

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20130105713
2013-05-02

Extreme ultraviolet light generation apparatus

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20130099140
2013-04-25

Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam

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20130077071
2013-03-28

Radiation source

 #870
20130077070
2013-03-28

Radiation source

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20130077069
2013-03-28

Radiation source

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20130075625
2013-03-28

TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

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20130063803
2013-03-14

Laser-produced plasma EUV source with reduced debris generation utilizing predetermined non-thermal laser ablation

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20130062538
2013-03-14

Extreme ultraviolet light generation apparatus

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20130051412
2013-02-28

Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus

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20130048878
2013-02-28

Target supply unit

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20130043401
2013-02-21

Energy sensors for light beam alignment

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20130037693
2013-02-14

OPTICAL SYSTEM AND EXTREME ULTRAVIOLET (EUV) LIGHT GENERATION SYSTEM INCLUDING THE OPTICAL SYSTEM

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20130034116
2013-02-07

Slab amplification device, laser apparatus, and extreme ultraviolet light generation system

 #880
20130032735
2013-02-07

Laser beam output control with optical shutter

 #881
20130026393
2013-01-31

Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system

 #882
20130022901
2013-01-24

Radiation source, method of controlling a radiation source, lithographic apparatus, and method for manufacturing a device

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20130020499
2013-01-24

Window unit, window device, laser apparatus, and extreme ultraviolet light generation system

 #884
20130015373
2013-01-17

EUV Radiation Source and EUV Radiation Generation Method

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20130015319
2013-01-17

Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus

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20130009076
2013-01-10

Extreme ultraviolet light source and positioning method of light focusing optical means

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20130003935
2013-01-03

High flux, narrow bandwidth compton light sources via extended laser-electron interactions

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20130001442
2013-01-03

Radiation conduit for radiation source

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20120327381
2012-12-27

Radiation Source, Lithographic Apparatus and Device Manufacturing Method

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2012-12-20

Extreme ultraviolet light source device and control method for extreme ultraviolet light source device

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20120313016
2012-12-13

Systems and methods for buffer gas flow stabilization in a laser produced plasma light source

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20120307851
2012-12-06

System and method for generating extreme ultraviolet light

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20120305811
2012-12-06

Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target

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20120305810
2012-12-06

Laser-produced-plasma EUV light source

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20120305809
2012-12-06

APPARATUS AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

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2012-11-29

Targets and processes for fabricating same

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2012-11-22

Filter for material supply apparatus of an extreme ultraviolet light source

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20120288065
2012-11-15

Compact coherent current and radiation source

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20120286176
2012-11-15

Droplet generator with actuator induced nozzle cleaning

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2012-11-08

EUV RADIATION SOURCE AND LITHOGRAPHIC APPARATUS