233423 ⎘
Generating plasma; Handling plasma; Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry
Sub-classes:Target structure for enhanced electron screening
#2Unignited plasma state discrimination device and unignited plasma state discrimination method
#3Method and technique to control laser effects through tuning of parameters such as repetition rate
#4Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma
#5Method and apparatus for photon-assisted evaluation of a plasma
#6Capacitively-coupled electrostatic (CCE) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof
#7SYSTEM FOR DETECTING PLASMA REACTION AND METHOD FOR USING THE SAME
#8Beam profile monitor with accurate horizontal and vertical beam profiles