233425 ⎘
Generating plasma; Handling plasma; Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using photoelectric means
LASER-SUSTAINED PLASMA GENERATION IN SUPERSONIC GAS JETS
#2NON-PERTUBATIVE MEASUREMENTS OF LOW AND NULL MAGNETIC FIELD IN HIGH TEMPERATURE PLASMAS
#3METHOD AND SYSTEM FOR MEASURING PLASMA EMISSIONS IN A PLASMA PROCESSING REACTOR
#4Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus
#5FLOW FIELD VISUALIZATION DEVICE, FLOW FIELD OBSERVATION METHOD, AND PLASMA GENERATOR
#6Non-pertubative measurements of low and null magnetic field in high temperature plasmas
#7SYSTEMS AND METHODS FOR CAPTURING GENERATED ELECTRON SPIRAL TOROIDS
#8Plasma stability determination method and plasma processing apparatus
#9WAFER-SHAPED TOOL CONFIGURED TO MONITOR PLASMA CHARACTERISTICS AND PLASMA MONITORING SYSTEM USING THE SAME
#10Light source
#11Plasma monitoring device and method
#12Apparatus for PECVD deposition of an internal barrier layer on a receptacle, the apparatus including an optical plasma analysis device
#13Arrangement for monitoring thermal spray processes
#14Collimator arrangements including multiple collimators and implementation methods thereof