233428 ⎘
Generating plasma; Handling plasma; Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature using electromagnetic or particle radiation, e.g. interferometry by using infra-red or ultra-violet radiation
Process control for atmospheric plasma treatment of surfaces
#2Creation of isotopes using laser beams
#3Heat-flux measuring method, substrate processing system, and heat-flux measuring member
#4Plasma electron temperature measuring method and device
#5PLASMA DOPING METHOD AND APPARATUS