241343 ⎘
Material or article handling; Associated with semiconductor wafer handling including means for charging or discharging wafer cassette
Sub-classes:Sealed substrate carriers and systems and methods for transporting substrates
#2Systems and methods for wafer pod alignment
#3Sealed substrate carriers and systems and methods for transporting substrates
#4Workpiece stocker with circular configuration
#5Sealed substrate carriers and systems and methods for transporting substrates
#6Substrate transfer system and substrate processing system
#7Robot having end effector and method of operating the same
#8Substrate transfer system, substrate processing system, and substrate transfer robot
#9Apparatus, system, and methods for weighing and positioning wafers
#10Sealed substrate carriers and systems and methods for transporting substrates
#11Substrate transfer system and substrate processing system
#12Semiconductor manufacturing systems
#13Robot hand
#14Transfer system
#15Substrate processing apparatus, substrate processing method and storage medium
#16Heat treatment apparatus and method of transferring substrates to the same
#17Frame feeding system and frame feeding method
#18Methods and loadport for purging a substrate carrier
#19Apparatus, system, and methods for weighing and positioning wafers
#20Apparatus, system, and methods for weighing and positioning wafers
#21Robot arm apparatus
#22Substrate processing method
#23Linear semiconductor processing facilities
#24Anodizing apparatus
#25Methods and loadport apparatus for purging a substrate carrier
#26Stacked process modules for a semiconductor handling system
#27Substrate processing apparatus
#28Gas charging apparatus, gas discharging apparatus, gas charging method, and gas discharging method
#29Workpiece stocker with circular configuration
#30Method of assembling substrate transfer device and transfer system unit for the same
#31Plasma processing apparatus and plasma processing method
#32Method of object transfer for a heat treatment system
#33System for purging reticle storage
#34Robot having end effector and method of operating the same
#35Systems and methods for handling wafers
#36Substrate processing system and substrate processing method
#37Semiconductor wafer robot alignment system and method
#38Inline-type wafer conveyance device
#39Electronic device sorter comprising dual buffers
#40FABRICATION SYSTEM AND FABRICATION METHOD
#41Substrate alignment system
#42ASCENDING/DESCENDING APPARATUS AND COMPLEX SINTERING FURNACE USING THE SAME
#43Substrate processing method and substrate processing system
#44Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing
#45Producing method of semiconductor device and substrate processing apparatus
#46Vacuum Processing Apparatus And Semiconductor Manufacturing Line Using The Same
#47MULTI-CHAMBER SYSTEM HAVING COMPACT INSTALLATION SET-UP FOR AN ETCHING FACILITY FOR SEMICONDUCTOR DEVICE MANUFACTURING
#48Photo spinner apparatus and wafer carrier loading/unloading method using the same
#49Semiconductor manufacturing peripheral verification tool
#50Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#51Sealed substrate carriers and systems and methods for transporting substrates
#52Substrate processing system and substrate transfer method
#53Stacked process modules for a semiconductor handling system
#54Foup door positioning device for foup opener
#55Wafer transferring apparatus, polishing apparatus, and wafer receiving method
#56Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#57Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured
#58Substrate distribution method
#59Apparatus for storing contamination-sensitive flat articles, in particular for storing semiconductor wafers
#60Fabrication system and fabrication method
#61Transfer and inspection devices of object to be inspected
#62Substrate handling chamber with movable substrate carrier loading platform
#63Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#64Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#65VACUUM PROCESSING APPARATUS AND SEMICONDUCTOR MANUFACTURING LINE USING THE SAME
#66Linear semiconductor processing facilities
#67Wafer transfer apparatus and substrate transfer apparatus
#68Workpiece stocker with circular configuration
#69Ascending/descending apparatus and complex sintering furnace using the same
#70Transportation system and transportation method
#71Standalone intelligent autoloader with modularization architectures and self-adaptive motion control ability for mass optical disks duplication
#72Producing method of a semiconductor device using CVD processing
#73Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#74Substrate processing apparatus and substrate handling method
#75Heat treatment system and method therefore
#76Methods and apparatus for purging a substrate carrier
#77Production system for wafer
#78Large area substrate transferring method for aligning with horizontal actuation of lever arm
#79Apparatus and method for cleaning and drying a container for semiconductor workpieces
#80Substrate processing apparatus and substrate transfer method
#81Substrate transfer apparatus and method, and storage medium
#82Substrate transfer system
#83Detachable edge ring for thermal processing support towers
#84Linear semiconductor processing facilities
#85Dual cassette load lock
#86Method of assembling substrate transfer device and transfer system unit for the same
#87Wafer engine
#88Fabrication system and fabrication method
#89Fabrication system and fabrication method
#90Vacuum interface between a mini-environment pod and a piece of equipment
#91Film forming system and film forming method
#92Substrate distribution system and a method using the same
#93Vacuum processing apparatus and operating method therefor
#94Multi-chamber system having compact installation set-up for an etching facility for semiconductor device manufacturing
#95Load port configurations for small lot size substrate carriers
#96Methods and systems for driving robotic components of a semiconductor handling system
#97Adjustable substrate transfer apparatus
#98Vacuum processing apparatus and semiconductor manufacturing line using the same
#99Substrate holding device
#100Methods and systems for handling a workpiece in vacuum-based material handling system
#101Stacked process modules for a semiconductor handling system
#102Software controller for handling system
#103Sensor methods and systems for semiconductor handling
#104Methods and systems for reducing the effect of vibration in a vacuum-based semiconductor handling system
#105Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#106Port structure in semiconductor processing system
#107Load lock chamber for large area substrate processing system
#108Apparatus for conveying substrates
#109Heat treatment system and a method for cooling a loading chamber
#110Transfer robot and inspection method for thin substrate
#111Substrate processing apparatus and substrate processing method