241344 ⎘
Material or article handling; Associated with semiconductor wafer handling including means for charging or discharging wafer cassette Wafers positioned vertically within cassette
Substrate transfer device and method of operating the same
#2Wafer transfer device
#3Substrate processing apparatus and substrate conveying apparatus for use in the same
#4Ancillary apparatus and method for loading glass substrates into a bracket
#5Method and apparatus for removing a vertically-oriented substrate from a cassette
#6Anodizing apparatus
#7Substrate support apparatus and vacuum processing apparatus
#8MANUFACTURING METHOD OF A HOLDER OF A BOAT FOR LOADING A SUBSTRATE
#9Apparatus and method for detecting substrates
#10Semiconductor wafer robot alignment system and method
#11Substrate processing apparatus and substrate conveying apparatus for use in the same
#12Method for transferring test trays in a side-docking type test handler
#13Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#14Processing system for process object and thermal processing method for process object
#15Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#16Batch forming apparatus, substrate processing system, batch forming method, and storage medium
#17Apparatus and method for transferring two or more wafers whereby the positions of the wafers can be measured
#18Substrate transfer apparatus, substrate transfer method, and storage medium
#19Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#20Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#21Reticle management systems and methods
#22Load lock system for supercritical fluid cleaning
#23Apparatus for Manufacturing Magnetic Recording Disk, and In-Line Type Substrate Processing Apparatus
#24Vertical type of thermal processing apparatus and method of using the same
#25Detachable edge ring for thermal processing support towers
#26Holder manufacturing method for loading substrate of semiconductor manufacturing device, batch type boat having holder, loading/unloading method of semiconductor substrate using the same, and semiconductor manufacturing device having the same
#27Substrate transportation device (air)
#28Film forming system and film forming method
#29Semiconductor processing-purpose substrate detecting method and device, and substrate transfer system
#30Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus
#31Reduced footprint tool for automated processing of microelectronic substrates
#32Transfer robot and inspection method for thin substrate
#33End effector gripper arms having corner grippers which reorient reticle during transfer