Y10S438/916 - CPC Classification Index

ClassID:

242005 ⎘

Y10S438/916 - CPC Classification

Classification description:

Semiconductor device manufacturing: process; Doping Autodoping control or utilization

Method of producing an epitaxial layer on semiconductor substrate and device produced with such a method

METHOD AND APPARATUS FOR FORMING A SEMICONDUCTOR SUBSTRATE WITH A LAYER STRUCTURE OF ACTIVATED DOPANTS

Method and apparatus for forming a semiconductor substrate with a layer structure of activated dopants