242013 ⎘
Semiconductor device manufacturing: process; Doping To facilitate selective etching
Etch rate modulation through ion implantation
#2Microstructure processing method and microstructure processing apparatus
#3Bottom processing
#4Etch rate modulation through ion implantation
#5Atomic layer etching of tungsten and other metals
#6Semiconductor device and method of fabricating the same
#7METHOD FOR FABRICATING FINE PATTERN IN SEMICONDUCTOR DEVICE
#8Semiconductor device and method of fabricating the same
#9Method for fabricating fine pattern in semiconductor device
#10Method for producing a transistor with metallic source and drain
#11Method of forming a carbon nanotube-based contact to semiconductor
#12Creating multi-layer/multi-input/multi-output (MLMIMO) models for metal-gate structures
#13Semiconductor device and method of fabricating the same
#14Method of forming a carbon nanotube-based contact to semiconductor
#15Method for fabricating fine pattern in semiconductor device
#16Semiconductor device and method of fabricating the same
#17Light-emitting device with a protection layer to prevent the inter-diffusion of zinc (Zn) atoms
#18Method of forming pattern of semiconductor device
#19Surrounded-Channel Transistors with Directionally Etched Gate or Insulator Formation Regions
#20Thin film transistor array panel and method for manufacturing the same
#21Thin film transistor array panel and method for manufacturing the same
#22Method of fabricating interconnections of microelectronic device using dual damascene process
#23Method of varying etch selectivities of a film
#24Method for selective epitaxial growth of source/drain areas
#25Semiconductor device and method for manufacturing the same
#26Optical components and production thereof
#27Etching a nitride-based heterostructure
#28Pattern reversal process for self aligned imprint lithography and device
#29Semiconductor device and method of fabricating the same
#30Thin film transistor array panel and method for manufacturing the same
#31Methods of fabricating surrounded-channel transistors with directionally etched gate or insulator formation regions
#32Method of manufacturing a layer sequence and a method of manufacturing an integrated circuit
#33Method of varying etch selectivities of a film
#34Method for forming a trench in a layer or a layer stack on a semiconductor wafer