ClassID:

242038

Y10S438/949 - CPC Classification

Classification description:

Semiconductor device manufacturing: process; Masking; Radiation resist Energy beam treating radiation resist on semiconductor

Recent Application in this class:
#1
20150017808
2015-01-15

Method of forming fine patterns of semiconductor device

#2
20120276744
2012-11-01

Patterning method for high density pillar structures

#3
20120224155
2012-09-06

Direct write lithography system

#4
20120003761
2012-01-05

Method of fabricating semiconductor device comprises a photoresist pattern having a desired critical dimension

#5
20110306174
2011-12-15

Patterning method for high density pillar structures

#6
20110294266
2011-12-01

Method of manufacturing a semiconductor device

#7
20110171815
2011-07-14

Patterning method for high density pillar structures

#8
20110097886
2011-04-28

Semiconductor device with mushroom electrode and manufacture method thereof

#9
20100261320
2010-10-14

Method of manufacturing a semiconductor device

#10
20100173486
2010-07-08

Semiconductor device with mushroom electrode and manufacture method thereof

#11
20100075478
2010-03-25

Method for photoresist pattern removal

#12
20090200587
2009-08-13

Masked laser anneal during fabrication of backside illuminated image sensors

#13
20090186484
2009-07-23

Pattern formation method

#14
20090179202
2009-07-16

THIN FILM TRANSISTOR ARRAY PANEL FOR A LIQUID CRYSTAL DISPLAY AND A METHOD FOR MANUFACTURING THE SAME

#15
20090121324
2009-05-14

ETCH WITH STRIATION CONTROL

#16
20090041954
2009-02-12

Laser treatment apparatus

#17
20090039275
2009-02-12

Processing method, manufacturing method of semiconductor device, and processing apparatus

#18
20080290344
2008-11-27

Image Display Device And Method For Manufacturing The Same

#19
20080220599
2008-09-11

Method of fabricating short-gate-length electrodes for integrated III-V compound semiconductor devices

#20
20080213956
2008-09-04

Field effect transistor device including an array of channel elements

#21
20080119024
2008-05-22

Method of manufacturing a semiconductor device

#22
20080113499
2008-05-15

Semiconductor device with mushroom electrode and manufacture method thereof

#23
20080050677
2008-02-28

Processing method, manufacturing method of semiconductor device, and processing apparatus

#24
20080035971
2008-02-14

Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same

#25
20080035851
2008-02-14

Processing method, manufacturing method of semiconductor device, and processing apparatus

#26
20070218604
2007-09-20

Method of manufacturing a semiconductor device

#27
20070161220
2007-07-12

Semiconductor device with mushroom electrode and manufacture method thereof

#28
20070141733
2007-06-21

Laser beam irradiation method and method of manufacturing a thin firm transistor

#29
20070126005
2007-06-07

Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same

#30
20060267011
2006-11-30

Image display device and method for manufacturing the same

#31
20060249784
2006-11-09

Field effect transistor device including an array of channel elements and methods for forming

#32
20060228821
2006-10-12

Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same

#33
20060205239
2006-09-14

Laser treatment apparatus

#34
20060199388
2006-09-07

System and method for manufacturing semiconductor devices using a vacuum chamber

#35
20060194439
2006-08-31

Etch with striation control

#36
20060194397
2006-08-31

Application of single exposure alternating aperture phase shift mask to form sub 0.18 micron polysilicon gates

#37
20060183351
2006-08-17

Method of carrying out an exposure process for a liquid crystal display device

#38
20060040215
2006-02-23

Pattern formation method

#39
20060014335
2006-01-19

Method of manufacturing a semiconductor device

#40
20050224726
2005-10-13

Direct write lithography system

#41
20050199896
2005-09-15

Method of fabricating surface-emission type light-emitting device, surface-emitting semiconductor laser, method of fabricating the same, optical module and optical transmission device

#42
20050178983
2005-08-18

Electron beam lithography device and drawing method using electron beams

#43
20050170619
2005-08-04

Method of forming a semi-insulating region

#44
20050170592
2005-08-04

Thin film transistor array panels for a liquid crystal display and a method for manufacturing the same

#45
20050148208
2005-07-07

Method and apparatus for forming polycrystalline layer using laser crystallization

#46
20050148207
2005-07-07

Method of forming a semi-insulating region

#47
20050142456
2005-06-30

Masks for fabricating semiconductor devices and methods of forming mask patterns

#48
20050130351
2005-06-16

Methods for maskless lithography

#49
20050085004
2005-04-21

Method of forming a semi-insulating region

#50
20050059256
2005-03-17

Method of forming a resist pattern and fabricating tapered features

#51
20050029517
2005-02-10

Method of forming a reflective electrode and a liquid crystal display device

#52
20050023534
2005-02-03

Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same