248368 ⎘
Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor; Apparatus with means for measuring, testing, or sensing with responsive control means
DEVICES AND METHODS FOR GROWING CRYSTALS
#2METHODS AND SYSTEMS FOR PRODUCING COMPOSITE CRYSTALS
#3Apparatus for producing Si ingot single crystal
#4DEVICES AND METHODS FOR GROWING CRYSTALS
#5Devices and methods for growing crystals
#6Method for producing Si ingot single crystal, Si ingot single crystal, and apparatus thereof
#7SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE PRODUCTION SYSTEM
#8RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#9Semiconductor device and semiconductor device production system
#10Semiconductor device and semiconductor device production system
#11RF CHOKE FOR GAS DELIVERY TO AN RF DRIVEN ELECTRODE IN A PLASMA PROCESSING APPARATUS
#12RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#13SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#14Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt
#15Semiconductor device and semiconductor device production system
#16SINGLE CRYSTAL INGOTS WITH REDUCED DISLOCATION DEFECTS AND METHODS FOR PRODUCING SUCH INGOTS
#17RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#18System and fabrication method of piezoelectric stack that reduces driving voltage and clamping effect
#19Silicon single crystal manufacturing method
#20Method for forming group III/V conformal layers on silicon substrates
#21Single crystal growing apparatus
#22High throughput screening of crystallization of materials
#23Method of producing silicon single crystal
#24Semiconductor device and semiconductor device production system
#25Transfer chamber metrology for improved device yield
#26SiC single crystal ingot and production method therefor
#27Crystal growth system and method for lead-contained compositions using batch auto-feeding
#28Apparatus for processing materials at high temperatures and pressures
#29Method for calculating a height position of silicon melt surface, method for pulling silicon single crystal, and silicon single crystal pulling apparatus
#30Microfluidic free interface diffusion techniques
#31RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#32Growth determination in the solidification of a crystalline material
#33High throughput screening of crystallization of materials
#34Silicon single crystal manufacturing apparatus and silicon single crystal manufacturing method
#35Method and apparatus for controlling melt temperature in a Czochralski grower
#36Method for forming group III/V conformal layers on silicon substrates
#37Method for achieving sustained anisotropic crystal growth on the surface of a silicon melt
#38METHOD AND APPARATUS FOR MONITORING AND CONTROLLING CRYSTAL GROWTH, AND PROBE SYSTEM
#39Device and method for monitoring crystallization
#40Apparatus and method for crystallization of silicon
#41Method and Apparatus for Doping by Lane in a Multi-Lane Sheet Wafer Furnace
#42Line scan sequential lateral solidification of thin films
#43Apparatus for manufacturing silicon substrate for solar cell using continuous casting and having contacting solidification and stress relieving regions
#44Method and apparatus for crystal growth using a membrane-assisted semi-closed reactor
#45METHOD FOR FORMING BULK CRYSTALS, IN PARTICULAR MONOCRYSTALS OF FLUORIDES DOPED WITH RARE-EARTH IONS
#46Apparatus and method for batch non-contact material characterization
#47Apparatus and method for extracting a silicon ingot made by an electromagnetic continuous casting method
#48METHODS FOR CONTROLLING MELT TEMPERATURE IN A CZOCHRALSKI GROWER
#49Procedure for in-situ determination of thermal gradients at the crystal growth front
#50HALOGEN ASSISTED PHYSICAL VAPOR TRANSPORT METHOD FOR SILICON CARBIDE GROWTH
#51Apparatus and method for crystallization of silicon
#52Apparatus for manufacturing silicon carbide single crystal
#53System of controlling diameter of single crystal ingot and single crystal ingot growing apparatus including the same
#54Apparatus of producing silicon single crystal and method of producing silicon single crystal
#55Transfer chamber metrology for improved device yield
#56Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride
#57Single crystal pulling-up apparatus of pulling-up silicon single crystal and single crystal pulling-up method of pulling-up silicon single crystal
#58Czochralski crystal growth process furnace that maintains constant melt line orientation and method of operation
#59Eddy current thickness measurement apparatus
#60Microfluidic free interface diffusion techniques
#61Substrate temperature accuracy and temperature control flexibility in a molecular beam epitaxy system
#62Method of temperature determination for deposition reactors
#63Method and device for producing thin silicon rods
#64Method and device for producing oriented solidified blocks made of semi-conductor material
#65Microfluidic protein crystallography
#66SiC Crystals Having Spatially Uniform Doping Impurities
#67Apparatus and method for batch non-contact material characterization
#68APPARATUS AND METHOD FOR BATCH NON-CONTACT MATERIAL CHARACTERIZATION
#69Single scan irradiation for crystallization of thin films
#70Device for crystal growth at intermediate temperatures using controlled semi-active cooling
#71System and method for crystal growing
#72Method for detecting diameter of single crystal, single-crystal manufacturing method by using the same and single-crystal manufacturing apparatus
#73Method for measuring liquid level in single crystal pulling apparatus employing CZ method
#74Method for correcting speed deviations between actual and nominal pull speed during crystal growth
#75Method of producing single crystal silicon
#76High-temperature process improvements using helium under regulated pressure
#77Method of manufacturing silicon single crystal, apparatus for pulling silicon single crystal and vitreous silica crucible
#78Method and apparatus for controlling the growth process of a monocrystalline silicon ingot
#79Producing method and apparatus of silicon single crystal, and silicon single crystal ingot
#80Method and an apparatus for growing a silicon single crystal from a melt
#81Microfluidic free interface diffusion techniques
#82Low temperature continuous circulation reactor for the aqueous synthesis of ZnO films, nanostructures, and bulk single crystals
#83Manufacturing apparatus of polycrystalline silicon
#84Crystallization apparatus, crystallization method, device and phase modulation element
#85Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process
#86Apparatus for producing silicon nanocrystals using inductively coupled plasma
#87Liquid crystal display and electronic device having same
#88System for continuous growing of monocrystalline silicon
#89Silica glass crucible for pulling up silicon single crystal, method for manufacturing thereof and method for manufacturing silicon single crystal
#90Method for manufacturing single crystal
#91Process and apparatus for large-scale manufacturing of bulk monocrystalline gallium-containing nitride
#92Generating a pumping force in a silicon melt by applying a time-varying magnetic field
#93Semiconductor device and semiconductor device production system
#94Procedure for in-situ determination of thermal gradients at the crystal growth front
#95Reversed action diameter control in a semiconductor crystal growth system
#96Method and apparatus for controlling diameter of a silicon crystal ingot in a growth process
#97System for forming SiC crystals having spatially uniform doping impurities
#98Beam homogenizer and laser irradiation apparatus and method of manufacturing semiconductor device
#99Silicon single crystal manufacturing method, silicon single crystal, silicon wafer, apparatus for controlling manufacture of silicon single crystal, and program
#100Single crystal manufacturing apparatus and method
#101Apparatus and method for producing single crystals
#102Crystal growth system and method for lead-contained compositions using batch auto-feeding
#103Apparatus and method for batch non-contact material characterization
#104Temperature-controlled purge gate valve for chemical vapor deposition chamber
#105Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
#106CRYSTALLIZATION APPARATUS, OPTICAL MEMBER FOR USE IN CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, MANUFACTURING METHOD OF THIN FILM TRANSISTOR, AND MANUFACTURING METHOD OF MATRIX CIRCUIT SUBSTRATE OF DISPLAY
#107Method of making large-volume CaFsingle crystals for optical elements with an optic axis parallel to the (100)-or (110)-crystal axis and CaF single crystal made thereby
#108Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display
#109Crystal-growing furnace having slurry drainage duct structure
#110Apparatus for pulling single crystal by CZ method
#111Microfluidic protein crystallography
#112Crystallization apparatus, crystallization method, phase modulation element, device and display apparatus
#113Crystal-growing furnace with convectional cooling structure
#114Method and apparatus for generating a precursor for a semiconductor processing system
#115Artificial quartz member, process for producing the same, and optical element comprising the same
#116Apparatus for manufacturing poly crystaline silicon ingot for solar battery having door open/close device using hinge
#117Halogen assisted physical vapor transport method for silicon carbide growth
#118APPARATUS AND METHOD FOR DIAMOND PRODUCTION
#119CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, DEVICE, OPTICAL MODULATION ELEMENT, AND DISPLAY APPARATUS
#120RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus
#121Method and apparatus for providing precursor gas to a processing chamber
#122Apparatus for pulling single crystal by CZ method
#123Apparatus for pulling single crystal by CZ method
#124Substrate temperature accuracy and temperature control flexibility in a molecular beam epitaxy system
#125Crystallization apparatus and crystallization method
#126Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus
#127Method, system, and apparatus for doping and for multi-chamber high-throughput solid-phase epitaxy deposition process
#128LARGE GRAIN, MULTI-CRYSTALLINE SEMICONDUCTOR INGOT FORMATION METHOD AND SYSTEM
#129Vapor phase growth apparatus and vapor phase growth method
#130Chemical precursor ampoule for vapor deposition processes
#131Cooling system for chamber of ingot growth arrangement
#132Microfluidic free interface diffusion techniques
#133Systems and methods for inducing crystallization of thin films using multiple optical paths
#134Mask for sequential lateral solidification and crystallization method using thereof
#135Crystal forming apparatus and method for using same
#136Crystallization method and crystallization apparatus
#137System for continuous growing of monocrystalline silicon
#138Method for continuous, in situ evaluation of entire wafers for macroscopic features during epitaxial growth
#139CRYSTALLIZATION APPARATUS AND METHOD, MANUFACTURING METHOD OF ELECTRONIC DEVICE, ELECTRONIC DEVICE, AND OPTICAL MODULATION ELEMENT
#140Power supplies for driving h-bridges
#141Single scan irradiation for crystallization of thin films
#142System and method for crystal growing
#143Cord rotating head for a crystal drawing system
#144Method and apparatus for growing GaN bulk single crystals
#145Melt surface position monitoring apparatus in silicon single crystal growth process
#146Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal
#147Process for producing a III-N bulk crystal and a free-standing III-N substrate, and III-N bulk crystal and free-standing III-N substrate
#148Growth of nitride semiconductor crystals
#149Apparatus for pulling single crystal by CZ method
#150Flash lamp annealing device
#151Light irradiation apparatus, light irradiation method, crystallization apparatus, crystallization method, and semiconductor device
#152Method for preparing silicon carbide single crystal
#153High throughput screening of crystallization materials
#154Liquid crystal display and electronic device having same
#155Apparatus and method for diamond production
#156Systems and methods for mixing reactants
#157Crystallization apparatus, crystallization method, device and phase modulation element
#158Fine structure body, process for producing the same, and Raman spectroscopic method and apparatus
#159Method and apparatus for providing precursor gas to a processing chamber
#160Method for manufacturing silicon single crystal
#161Method for providing gas to a processing chamber
#162Semiconductor device and semiconductor device production system
#163Method and apparatus for generating a precursor for a semiconductor processing system
#164Method of growing a thin film onto a substrate
#165Technique for monitoring dynamic processes in metal lines of microstructures
#166System and method for crystal growing
#167Mechanism for controlling melt level in single crystal pulling apparatus, method for controlling melt level in single crystal pulling apparatus, mechanism for adjusting melt level in single crystal pulling apparatus and method for adjusting melt level while pulling single crystal
#168Crystallization apparatus and crystallization method
#169Laser irradiation apparatus
#170Quality evaluation method for single crystal ingot
#171Silicon wafer and process for producing it
#172Apparatus and method for generating a chemical precursor
#173Line scan sequential lateral solidification of thin films
#174Method of and system for forming SiC crystals having spatially uniform doping impurities
#175Method of simulation with respect to density distribution and size distribution of void defect within single crystal and oxygen precipitation nucleus within single crystal
#176Method of measuring protein solubility, process for producing crystal and apparatus therefor
#177Crystallization apparatus, optical member for use in crystallization apparatus, crystallization method, manufacturing method of thin film transistor, and manufacturing method of matrix circuit substrate of display
#178Power supplies for driving H-bridges
#179Low temperature load and bake
#180Systems and methods for mixing reactants
#181Method for pulling up single crystal
#182Crystallization method, crystallization apparatus, processed substrate, thin film transistor and display apparatus
#183Apparatus for fabricating a III-V nitride film and a method for fabricating the same
#184Microfluidic device with diffusion between adjacent lumens
#185Low temperature load and bake
#186Method for measuring point defect distribution of silicon single crystal ingot
#187Mask and method for crystallizing amorphous silicon
#188Crystallization reagent matrices and related methods and kits
#189Method for reducing defect concentration in crystals
#190Monitoring and control of a fabrication process
#191Method and apparatus for the measurement, orientation and fixation of at least one single crystal
#192Apparatus for manufacturing silicon single crystal, method for manufacturing silicon single crystal, and silicon single crystal
#193Systems and methods for generating images of crystals
#194Method and apparatus for growing silicon crystal by controlling melt-solid interface shape as a function of axial length
#195Apparatus for forming a semiconductor thin film
#196Apparatus for pulling single crystal by CZ method
#197Formation of single-crystal silicon carbide
#198Crystallization method and crystallization apparatus
#199Single scan irradiation for crystallization of thin films
#200High throughput screening of crystallization of materials
#201Crystallization apparatus, crystallization method, device and phase modulation element
#202Crystallization apparatus, crystallization method, device, optical modulation element, and display apparatus
#203Method and apparatus for producing semiconductor device
#204Microfluidic protein crystallography
#205Method and apparatus of generating PDMAT precursor
#206Method of identifying defect distribution in silicon single crystal ingot
#207Method of making large-volume CaF2 single crystals for optical elements with an optic axis parallel to the (100)- or (110)-crystal axis and CaF2 single crystal made thereby
#208Vapor-phase epitaxial apparatus and vapor phase epitaxial method
#209Apparatus and method for diamond production
#210Crystallization apparatus and method; manufacturing method of electronic device, electronic device, and optical modulation element
#211Mask for sequential lateral solidification and crystallization method using thereof
#212Semiconductor device having thin film transistor with position controlled channel formation region
#213System for continuous growing of monocrystalline silicon
#214Process for calibrating the temperature control unit of an oven and oven for carrying out this process
#215Systems and methods for inducing crystallization of thin films using multiple optical paths
#216Crystal forming apparatus and method for using same
#217Crystallization apparatus and crystallization method
#218Silicon wafer and process for producing it
#219Precursor mixtures for use in preparing layers on substrates
#220Method to monitor and control the crystal cooling or quenching rate by measuring crystal surface temperature
#221Laser-heated crystal fiber growth system