San Jose, California
United States
40
2026-01-29
The entities that hold a legal rights for patent applications filed by inventor KOTHNUR Prashanth:
Prashanth KOTHNUR from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:
ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFACTURING
#2 | 2025-07-10HEATERS AND PLASMA GENERATORS FOR GAS ACTIVATION, AND RELATED CHAMBER AND FOR SEMICONDUCTOR MANUFACTURING
#3 | 2025-06-26ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING CHAMBERS, AND RELATED METHODS AND APPARATUS, FOR SEMICONDUCTOR MANUFACTURING
#4 | 2025-06-26PLASMA INJECTION CONFIGURATIONS FOR PROCESSING CHAMBERS, AND RELATED APPARATUS, CHAMBER KITS, AND METHODS
#5 | 2025-06-26Electrode and Coil Configurations For Processing Chambers and Related Chamber Kits, Apparatus, and Methods For Semiconductor Manufacturing
#6 | 2025-06-19MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, METHODS, APPARATUS, AND MODULES FOR SEMICONDUCTOR MANUFACTURING
#7 | 2025-05-15PROCESS MODELING PLATFORM FOR SUBSTRATE MANUFACTURING SYSTEMS
#8 | 2025-05-08DUAL COLLIMATOR PHYSICAL VAPOR DEPOSITIONS PROCESSING CHAMBER
#9 | 2025-03-13COMPREHENSIVE MODELING PLATFORM FOR MANUFACTURING EQUIPMENT
#10 | 2025-02-13VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHYSICS-INFORMED COMPRESSED SENSING
#11 | 2024-09-19ECO-EFFICIENCY (SUSTAINABILITY) DASHBOARD FOR SEMICONDUCTOR MANUFACTURING
#12 | 2023-03-23Methods of using a segmented showerhead for uniform delivery of multiple pre-cursors
#13 | 2023-03-16Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing
#14 | 2023-02-09METHODS FOR FORMING FILMS ON SUBSTRATES
#15 | 2022-12-01Methods for shaping magnetic fields during semiconductor processing
#16 | 2022-11-03APPARATUS AND METHOD FOR CONTROLLING A FLOW PROCESS MATERIAL TO A DEPOSITION CHAMBER
#17 | 2022-10-27EM SOURCE FOR ENHANCED PLASMA CONTROL
#18 | 2022-10-27Apparatus for reducing tungsten resistivity
#19 | 2022-10-20Eco-efficiency (sustainability) dashboard for semiconductor manufacturing
#20 | 2022-08-04HYBRID PHYSICS/MACHINE LEARNING MODELING OF PROCESSES
#21 | 2022-03-17Methods and apparatus for reducing tungsten resistivity
#22 | 2022-02-03Deposition system with multi-cathode and method of manufacture thereof
#23 | 2021-03-11VAPOR DELIVERY METHODS AND APPARATUS
#24 | 2021-01-21EM source for enhanced plasma control
#25 | 2020-12-03Plasma density control on substrate edge
#26 | 2020-12-03Methods for forming films on substrates
#27 | 2020-03-19Segmented showerhead for uniform delivery of multiple precursors
#28 | 2020-02-13Methods and apparatus for producing low angle depositions
#29 | 2020-02-13Showerhead for providing multiple materials to a process chamber
#30 | 2019-12-19Apparatus and method for controlling a flow process material to a deposition chamber
#31 | 2019-11-21MULTI-ZONE COLLIMATOR FOR SELECTIVE PVD
#32 | 2018-10-11Plasma density control on substrate edge
#33 | 2017-07-27SPUTTER SOURCE FOR SEMICONDUCTOR PROCESS CHAMBERS
#34 | 2016-06-16Apparatus for PVD dielectric deposition
#35 | 2016-02-04Magnetron assembly for physical vapor deposition chamber
#36 | 2015-12-24Bias voltage frequency controlled angular ion distribution in plasma processing
#37 | 2015-10-01Deposition system with multi-cathode and method of manufacture thereof
#38 | 2015-04-30Bipolar collimator utilized in a physical vapor deposition chamber
#39 | 2014-09-18Sputter source for semiconductor process chambers
#40 | 2009-10-08Plasma generator systems and methods of forming plasma
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