Eindhoven
Netherlands
33
2026-03-19
The entities that hold a legal rights for patent applications filed by inventor Nikipelov Andrey:
Andrey Nikipelov from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
A PATTERNING DEVICE VOLTAGE BIASING SYSTEM FOR USE IN EUV LITHOGRAPHY
#2 | 2026-02-26PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
#3 | 2025-07-10APPARATUS AND METHOD FOR A LITHOGRAPHIC APPARATUS
#4 | 2025-03-27ASSEMBLY FOR A LITHOGRAPHIC APPARATUS
#5 | 2024-11-14A CLEANING METHOD AND ASSOCIATED ILLUMINATION SOURCE METROLOGY APPARATUS
#6 | 2024-10-24APPARATUS AND METHOD FOR CLEANING AN INSPECTION SYSTEM
#7 | 2024-10-10APPARATUS AND METHOD FOR PREPARING AND CLEANING A COMPONENT
#8 | 2024-05-02MEMBRANE CLEANING APPARATUS
#9 | 2024-01-04MEMBRANE FOR EUV LITHOGRAPHY
#10 | 2023-10-05APPARATUS AND METHOD FOR PROCESSING A RETICLE AND PELLICLE ASSEMBLY
#11 | 2023-10-05MEMBRANE CLEANING APPARATUS
#12 | 2023-03-02LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGING A TRAJECTORY OF PARTICULATE DEBRIS
#13 | 2022-10-27Lithographic apparatus
#14 | 2022-09-01PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS
#15 | 2022-06-30Method for providing a wear-resistant material on a body, and composite body
#16 | 2022-06-30Apparatus and method for cleaning an inspection system
#17 | 2022-03-17SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A SUBSTRATE HOLDER
#18 | 2022-01-13Membrane cleaning apparatus
#19 | 2021-12-23Object in a lithographic apparatus
#20 | 2021-12-09Transmissive diffusor
#21 | 2021-05-06Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off
#22 | 2021-04-15Membrane for EUV lithography
#23 | 2021-03-04End facet protection for a radiation source and a method for use in metrology applications
#24 | 2021-02-25Inspection system, lithographic apparatus, and inspection method
#25 | 2020-07-23Cooling apparatus and plasma-cleaning station for cooling apparatus
#26 | 2020-03-26Component for use in a patterning device environment
#27 | 2020-02-27Sensor mark and a method of manufacturing a sensor mark
#28 | 2019-05-02Membrane for EUV lithography
#29 | 2016-09-22Radiation source having debris control
#30 | 2016-01-14Radiation source-collector and method for manufacture
#31 | 2015-10-15Method and apparatus for generating radiation
#32 | 2015-10-08Lithographic apparatus
#33 | 2015-09-17Method and Apparatus for Generating Radiation
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