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Assignee profile:

ASML Holding N.V.

City:

Veldhoven

Country:

Netherlands

Published Applications:

662

Last publication date:

2026-04-16

Patent Grants:

582

Last grant date:

2026-01-20

Quarterly ASML Holding N.V. Patent Applications

Top Inventors for applications by ASML Holding N.V.

These are the the leading inventors for applications assigned to ASML Holding N.V.:

Harry Sewell 60 Ridgefield, CT United States
Stephen Roux 37 New Fairfield, CT United States
Herman VOGEL 30 Sandy Hook, CT United States
Lev Ryzhikov 29 Norwalk, CT United States

Justin Lloyd Kreuzer 29 Trumbull, CT United States
Yuli VLADIMIRSKY 27 Weston, CT United States
Matthew Lipson 26 Stamford, CT United States
Daniel N. GALBURT 23 Wilton, CT United States

Yevgeniy Konstantinovich Shmarev 21 Lagrangeville, NY United States
Sjoerd Nicolaas Lambertus Donders 18 Vught, Netherlands
Louis John MARKOYA 18 Sandy Hook, CT United States
Nicolaas Ten Kate 17 Almkerk, Netherlands

Azat M. Latypov 17 Danbury, CT United States
Wenceslao A. CEBUHAR 17 Norwalk, CT United States
Frits Van Der Meulen 16 Eindhoven, Netherlands
Mohamed SWILLAM 16 Wilton, CT United States

Martinus Hendrikus Antonius LEENDERS 16 Rhoon, Netherlands
Adel Joobeur 15 Milford, CT United States
Santiago E. Del Puerto 15 Milton, NY United States
Joseph H. LYONS 15 Wilton, CT United States

Krishanu SHOME 15 Cheshire, CT United States
Pradeep K. GOVIL 14 Norwalk, CT United States
Igor Matheus Petronella AARTS 13 Port Chester, NY United States
Johannes Petrus Maria Smeulers 13 Zwijndrecht, Netherlands

Franciscus Johannes Herman Maria Teunissen 13 Rotterdam, Netherlands
Stefan Philip Christiaan Belfroid 13 Delft, Netherlands
Nicolaas Rudolf KEMPER 13 Eindhoven, Netherlands
Jeroen Johannes Sophia Maria MERTENS 13 Duizel, Netherlands

Justin L. Kreuzer 13 Trumbull, CT United States
Jan-Gerard Cornelis VAN DER TOORN 13 Eindhoven, Netherlands
Arie Jeffrey DEN BOEF 13 Waalre, Netherlands
Tamer Mohamed Tawfik Ahmed Mohamed Elazhary 13 New Canaan, CT United States

Henrikus Herman Marie Cox 13 Eindhoven, Netherlands
Azat Latypov 13 Danbury, CT United States
Christiaan Alexander Hoogendam 12 Westerhoven, Netherlands
Roelof Frederik DE GRAAF 12 Veldhoven, Netherlands

Martinus Cornelis Maria Verhagen 12 Valkenswaard, Netherlands
Tammo UITTERDIJK 12 Wilton, CT United States
Arno Bleeker 12 Westerhoven, Netherlands
Robert D. Harned 12 Redding, CT United States

Frank Johannes Jacobus VAN BOXTEL 11 Eindhoven, Netherlands
Roberto B. Wiener 11 Ridgefield, CT United States
Jason D. HINTERSTEINER 11 Bethel, CT United States
Mark Josef Schuster 11 Fairfield, CT United States

Peter KOCHERSPERGER 11 Easton, CT United States
Christopher Charles WARD 11 Somerville, MA United States
Ronald A. Wilklow 11 Fairfield, CT United States
Todd R. Downey 11 Monroe, CT United States

SIMON REINALD HUISMAN 11 EINDHOVEN, Netherlands
Peter C. KOCHERSPERGER 11 Easton, CT United States
Samir A. NAYFEH 11 Shrewsbury, MA United States
Eric Brian CATEY 10 Danbury, CT United States

Sherman K. Poultney 10 Wilton, CT United States
Roberto B. Wiener 10 Bethel, CT United States
Johannes Onvlee 10 's-Hertogenbosch, Netherlands
Mehmet Ali AKBAS 10 Cheshire, CT United States

Aage BENDIKSEN 10 Fairfield, CT United States
Daniel Nathan Burbank 9 Ridgefield, CT United States
Antonius Theodorus Anna Maria Derksen 9 Eindhoven, Netherlands
Justin Matthew VERDIRAME 9 Cambridge, MA United States

Kars Zeger TROOST 9 Waalre, Netherlands
Christopher John MASON 9 Newtown, CT United States
Arno Jan BLEEKER 9 Westerhoven, Netherlands
Klaus Simon 9 Eindhoven, Netherlands

Christopher J. Mason 9 Newtown, CT United States
Marcus Adrianus VAN DE KERKHOF 9 Helmond, Netherlands
Victor Antonio PEREZ-FALCON 8 Bridgeport, CT United States
Nabila Baba-Ali 8 Ridgefield, CT United States

Stanislav Y. SMIRNOV 8 Bethel, CT United States
Louis Markoya 8 Sandy Hook, CT United States
Michael L. Nelson 8 West Redding, CT United States
Santiago del Puerto 8 Milton, NY United States

Richard Carl ZIMMERMAN 8 Brookfield, CT United States
Stanislav SMIRNOV 8 Danbury, CT United States
Scott D. Coston 8 New Milford, CT United States
Derk Servatius Gertruda BROUNS 8 Herentals, Belgium

Stanislav SMIRNOV 7 Bethel, CT United States
Patricius Aloysius Jacobus TINNEMANS 7 Hapert, Netherlands
Kevin J VIOLETTE 7 Woodbury, CT United States
Alexander Kremer 7 Stamford, CT United States

Joost Jeroen Ottens 7 Veldhoven, Netherlands
Robert Gabriël Maria LANSBERGEN 7 Schiedam, Netherlands
Aleksandr Khmelichek 7 Brooklyn, NY United States
Sebastianus Adrianus GOORDEN 7 Eindhoven, Netherlands

Justin Kreuzer 7 Trumbull, CT United States
Yang-Shan Huang 6 Veldhoven, Netherlands
George Hilary HARROLD 6 Redding, CT United States
Ronald Peter Albright 6 Norwalk, CT United States

Johannes Jacobus Matheus BASELMANS 6 Oirschot, Netherlands
James G. Tsacoyeanes 6 Southbury, CT United States
Earl William EBERT 6 Oxford, CT United States
Michal Emanuel PAWLOWSKI 6 Norwalk, CT United States

Joseph Harry LYONS 6 Wilton, CT United States
Andrew JUDGE 6 Monroe, CT United States
Thomas POIESZ 6 Veldhoven, Netherlands
James Hamilton WALSH 6 Newtown, CT United States

Marco POLIZZI 6 Eindhoven, Netherlands
Huibert Visser 6 Zevenhuizen, Netherlands
Erik Roelof Loopstra 6 Eindhoven, Netherlands
Nora-Jean Harned 6 Redding, CT United States

Recent patent applications by ASML Holding N.V.

ASML Holding N.V. based in Veldhoven, NL has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:

#1 | 2026-04-16

US20260104648A1

Physics

FAST UNIFORMITY DRIFT CORRECTION

#2 | 2025-11-20

US20250355367A1

Physics

MODE CONTROL OF PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION SOURCES

#3 | 2025-11-06

US20250341789A1

Physics

SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE VOLTAGE TO AN OXIDIZED WAFER

#4 | 2025-10-09

US20250314958A1

Physics

CONTAMINANT IDENTIFICATION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#5 | 2025-10-02

US20250306453A1

Physics

OPTIMIZATION USING A NON-UNIFORM ILLUMINATION INTENSITY PROFILE

#6 | 2025-09-04

US20250278029A1

Physics

SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS

#7 | 2025-06-05

US20250181001A1

Physics

SYSTEMS FOR CLEANING A PORTION OF A LITHOGRAPHY APPARATUS

#8 | 2024-12-19

US20240419089A1

Physics

APPARATUS FOR AND METHOD OF LITHOGRAPHY SUPPORT CLEANING

#9 | 2024-11-07 ✅ Patent 12,529,967 granted on 2026-01-20

US20240369947A1

Physics

METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

#10 | 2024-10-31

US20240361703A1

Physics

ON CHIP SENSOR FOR WAFER OVERLAY MEASUREMENT

#11 | 2024-09-26 ✅ Patent 12,535,745 granted on 2026-01-27

US20240319618A1

Physics

LITHOGRAPHIC APPARATUS, LOCKING DEVICE, AND METHOD

#12 | 2024-09-26 ✅ Patent 12,631,975 granted on 2026-05-19

US20240319617A1

Physics

METROLOGY SYSTEMS WITH PHASED ARRAYS FOR CONTAMINANT DETECTION AND MICROSCOPY

#13 | 2024-09-26 ✅ Patent 12,529,963 granted on 2026-01-20

US20240319608A1

Physics

FAST UNIFORMITY DRIFT CORRECTION

#14 | 2024-09-12 ✅ Patent 12,422,758 granted on 2025-09-23

US20240302753A1

Physics

LITHOGRAPHIC APPARATUS, TEMPERATURE SENSOR, AND FIBER BRAGG GRATING SENSOR

#15 | 2024-09-05 ✅ Patent 12,578,658 granted on 2026-03-17

US20240295832A1

Physics

SYSTEMS, METHODS, AND DEVICES FOR THERMAL CONDITIONING OF RETICLES IN LITHOGRAPHIC APPARATUSES

#16 | 2024-07-25 ✅ Patent 12,596,308 granted on 2026-04-07

US20240248415A1

Physics

MODULAR WAFER TABLE AND METHODS OF MANUFACTURING THEREOF

#17 | 2024-07-18

US20240241453A1

Physics

METROLOGY SYSTEMS, TEMPORAL AND SPATIAL COHERENCE SCRAMBLER AND METHODS THEREOF

#18 | 2024-07-11 ✅ Patent 12,645,151 granted on 2026-06-02

US20240231242A9

Physics

OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#19 | 2024-05-23

US20240167809A1

Physics

METROLOGY SYSTEMS, MEASUREMENT OF WEAR SYSTEMS AND METHODS THEREOF

#20 | 2024-05-16

US20240160151A1

Physics

DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD

#21 | 2024-04-25

US20240134289A1

Physics

OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#22 | 2024-04-25 ✅ Patent 12,591,132 granted on 2026-03-31

US20240134182A1

Physics

METHODS AND APPARATUSES FOR SPATIALLY FILTERING OPTICAL PULSES

#23 | 2024-03-28

US20240103386A1

Physics

APPARATUS AND METHOD FOR DETERMINING A CONDITION ASSOCIATED WITH A PELLICLE

#24 | 2024-03-21 ✅ Patent 12,572,083 granted on 2026-03-10

US20240094641A1

Physics

INTENSITY ORDER DIFFERENCE BASED METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#25 | 2024-03-07 ✅ Patent 12,461,448 granted on 2025-11-04

US20240077803A1

Physics

MULTI-CHANNEL LIGHT SOURCE FOR PROJECTION OPTICS HEATING

#26 | 2024-03-07 ✅ Patent 12,399,000 granted on 2025-08-26

US20240077308A1

Physics

SYSTEMS AND METHODS FOR MEASURING INTENSITY IN A LITHOGRAPHIC ALIGNMENT APPARATUS

#27 | 2024-02-15 ✅ Patent 11,960,216 granted on 2024-04-16

US20240053688A1

Physics

Invariable magnification multilevel optical device with telecentric converter

#28 | 2024-02-01 ✅ Patent 12,287,591 granted on 2025-04-29

US20240036485A1

Physics

Lithographic apparatus, metrology systems, and methods thereof

#29 | 2024-01-25 ✅ Patent 12,631,968 granted on 2026-05-19

US20240027913A1

Physics

METROLOGY SYSTEM AND COHERENCE ADJUSTERS

#30 | 2024-01-11 ✅ Patent 12,429,780 granted on 2025-09-30

US20240012338A1

Physics

MULTIPLE OBJECTIVES METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#31 | 2024-01-04 ✅ Patent 12,535,743 granted on 2026-01-27

US20240004308A1

Physics

RADIATION SOURCE ARRANGEMENT AND METROLOGY DEVICE

#32 | 2023-12-14 ✅ Patent 12,287,585 granted on 2025-04-29

US20230400782A1

Physics

Polarization selection metrology system, lithographic apparatus, and methods thereof

#33 | 2023-11-09 ✅ Patent 12,306,544 granted on 2025-05-20

US20230359127A1

Physics

Metrology tool with position control of projection system

#34 | 2023-11-02 ✅ Patent 12,140,870 granted on 2024-11-12

US20230350308A1

Physics

Double-scanning opto-mechanical configurations to improve throughput of particle inspection systems

#35 | 2023-10-26

US20230341785A1

Physics

LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS, AND METHODS THEREOF

#36 | 2023-10-12 ✅ Patent 12,326,670 granted on 2025-06-10

US20230324817A1

Physics

LITHOGRAPHIC APPARATUS, METROLOGY SYSTEM, AND INTENSITY IMBALANCE MEASUREMENT FOR ERROR CORRECTION

#37 | 2023-10-05 ✅ Patent 12,393,126 granted on 2025-08-19

US20230314962A1

Physics

SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE VOLTAGE TO AN OXIDIZED WAFER

#38 | 2023-10-05 ✅ Patent 12,474,633 granted on 2025-11-18

US20230314931A1

Physics

POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE

#39 | 2023-09-21

US20230296986A1

Physics

LITHOGRAPHIC APPARATUS AND METHODS FOR MULTI-EXPOSURE OF A SUBSTRATE

#40 | 2023-09-07 ✅ Patent 12,386,270 granted on 2025-08-12

US20230280660A1

Physics

MODE CONTROL OF PHOTONIC CRYSTAL FIBER BASED BROADBAND RADIATION SOURCES

#41 | 2023-08-31 ✅ Patent 12,135,505 granted on 2024-11-05

US20230273531A1

Physics

Spectrometric metrology systems based on multimode interference and lithographic apparatus

#42 | 2023-08-24 ✅ Patent 12,216,414 granted on 2025-02-04

US20230266681A1

Physics

Self-referencing integrated alignment sensor

#43 | 2023-08-24 ✅ Patent 12,298,257 granted on 2025-05-13

US20230266255A1

Physics

Monolithic particle inspection device

#44 | 2023-07-27 ✅ Patent 12,523,941 granted on 2026-01-13

US20230236519A1

Physics

LITHOGRAPHIC PRE-ALIGNMENT IMAGING SENSOR WITH BUILD-IN COAXIAL ILLUMINATION

#45 | 2023-07-06 ✅ Patent 12,585,198 granted on 2026-03-24

US20230213871A1

Physics

LITHOGRAPHIC APPARATUS, MULTI-WAVELENGTH PHASE-MODULATED SCANNING METROLOGY SYSTEM AND METHOD

#46 | 2023-07-06 ✅ Patent 12,306,541 granted on 2025-05-20

US20230213868A1

Physics

Lithographic apparatus, metrology systems, illumination switches and methods thereof

#47 | 2023-06-15

US20230185204A1

Physics

OPTICAL APPARATUS AND LITHOGRAPHIC APPARATUS USING THE OPTICAL APPARATUS

#48 | 2023-06-08 ✅ Patent 12,474,647 granted on 2025-11-18

US20230176494A1

Physics

GENERATING AN ALIGNMENT SIGNAL BASED ON LOCAL ALIGNMENT MARK DISTORTIONS

#49 | 2023-05-11 ✅ Patent 12,379,655 granted on 2025-08-05

US20230142459A1

Physics

CONTAMINANT IDENTIFICATION METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#50 | 2023-05-04 ✅ Patent 12,442,759 granted on 2025-10-14

US20230137537A1

Physics

CONTAMINANT ANALYZING METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS THEREOF

#51 | 2023-04-13 ✅ Patent 11,841,628 granted on 2023-12-12

US20230116318A1

Physics

Apparatus for and method of sensing alignment marks

#52 | 2023-04-06 ✅ Patent 11,803,119 granted on 2023-10-31

US20230106481A1

Physics

Contaminant detection metrology system, lithographic apparatus, and methods thereof

#53 | 2023-03-23

US20230089666A1

Physics

IMPROVED ALIGNMENT OF SCATTEROMETER BASED PARTICLE INSPECTION SYSTEM

#54 | 2023-03-16 ✅ Patent 12,158,705 granted on 2024-12-03

US20230083834A1

Physics

End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses

#55 | 2023-03-09 ✅ Patent 12,189,312 granted on 2025-01-07

US20230075162A1

Physics

Reticle gripper damper and isolation system for lithographic apparatuses

#56 | 2023-03-02 ✅ Patent 12,332,570 granted on 2025-06-17

US20230063156A1

Physics

LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGING A TRAJECTORY OF PARTICULATE DEBRIS

#57 | 2023-02-23 ✅ Patent 12,140,872 granted on 2024-11-12

US20230059471A1

Physics

Optical designs of miniaturized overlay measurement system

#58 | 2023-02-23 ✅ Patent 12,124,173 granted on 2024-10-22

US20230058714A1

Physics

Lithographic apparatus, metrology systems, illumination sources and methods thereof

#59 | 2023-02-23 ✅ Patent 12,405,227 granted on 2025-09-02

US20230055116A1

Physics

METHOD FOR REGION OF INTEREST PROCESSING FOR RETICLE PARTICLE DETECTION

#60 | 2023-02-02

US20230035511A1

Physics

LITHOGRAPHIC APPARATUS AND METHOD FOR DRIFT COMPENSATION

#61 | 2023-02-02

US20230031443A1

Physics

WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT

#62 | 2023-01-26 ✅ Patent 12,189,310 granted on 2025-01-07

US20230021360A1

Physics

Systems and methods for manufacturing a double-sided electrostatic clamp

#63 | 2023-01-19 ✅ Patent 12,032,299 granted on 2024-07-09

US20230017491A1

Physics

Metrology method and associated metrology and lithographic apparatuses

#64 | 2023-01-12 ✅ Patent 12,174,552 granted on 2024-12-24

US20230008474A1

Electricity

Lithographic apparatus and electrostatic clamp designs

#65 | 2023-01-12 ✅ Patent 12,124,177 granted on 2024-10-22

US20230008139A1

Physics

Overlay measurement system using lock-in amplifier technique

#66 | 2022-12-22 ✅ Patent 11,892,779 granted on 2024-02-06

US20220404720A1

Physics

Optical component and clamp used in lithographic apparatus

#67 | 2022-12-15 ✅ Patent 11,803,130 granted on 2023-10-31

US20220397833A1

Physics

Phase modulators in alignment to decrease mark size

#68 | 2022-12-08 ✅ Patent 11,703,771 granted on 2023-07-18

US20220390861A1

Physics

Variable diffraction grating

#69 | 2022-12-08 ✅ Patent 12,235,595 granted on 2025-02-25

US20220390860A1

Physics

Systems for cleaning a portion of a lithography apparatus

#70 | 2022-12-08 ✅ Patent 12,339,583 granted on 2025-06-24

US20220390832A1

Physics

OPTIMIZATION USING A NON-UNIFORM ILLUMINATION INTENSITY PROFILE

#71 | 2022-11-24 ✅ Patent 11,789,368 granted on 2023-10-17

US20220373895A1

Physics

Lithographic apparatus, metrology system, and illumination systems with structured illumination

#72 | 2022-11-10 ✅ Patent 12,321,104 granted on 2025-06-03

US20220357675A1

Physics

Substrate holder for use in a lithographic apparatus

#73 | 2022-11-03 ✅ Patent 12,585,201 granted on 2026-03-24

US20220350268A1

Physics

METROLOGY MARK STRUCTURE AND METHOD OF DETERMINING METROLOGY MARK STRUCTURE

#74 | 2022-11-03 ✅ Patent 12,405,535 granted on 2025-09-02

US20220350260A1

Physics

A METHOD FOR FILTERING AN IMAGE AND ASSOCIATED METROLOGY APPARATUS

#75 | 2022-10-27 ✅ Patent 12,393,046 granted on 2025-08-19

US20220342228A1

Physics

METROLOGY SYSTEMS, COHERENCE SCRAMBLER ILLUMINATION SOURCES AND METHODS THEREOF

#76 | 2022-09-22 ✅ Patent 11,754,935 granted on 2023-09-12

US20220299893A1

Physics

Lithographic patterning device multichannel position and level gauge

#77 | 2022-09-22 ✅ Patent 11,841,626 granted on 2023-12-12

US20220299892A1

Physics

Alignment sensor based on wavelength-scanning

#78 | 2022-09-15 ✅ Patent 11,899,380 granted on 2024-02-13

US20220291598A1

Physics

Apparatus for and method of sensing alignment marks

#79 | 2022-09-15 ✅ Patent 12,124,172 granted on 2024-10-22

US20220291594A1

Physics

Lithographic apparatus and ultraviolet radiation control system

#80 | 2022-09-08 ✅ Patent 12,066,762 granted on 2024-08-20

US20220283516A1

Physics

On chip sensor for wafer overlay measurement

#81 | 2022-09-08

US20220283515A1

Physics

METROLOGY SYSTEM AND METHOD

#82 | 2022-08-25 ✅ Patent 11,687,009 granted on 2023-06-27

US20220269183A1

Physics

Mode control of photonic crystal fiber based broadband radiation sources

#83 | 2022-08-25 ✅ Patent 12,487,081 granted on 2025-12-02

US20220268574A1

Physics

ON CHIP WAFER ALIGNMENT SENSOR

#84 | 2022-08-18 ✅ Patent 11,982,946 granted on 2024-05-14

US20220260929A1

Physics

Metrology targets

#85 | 2022-08-11 ✅ Patent 12,066,758 granted on 2024-08-20

US20220252974A1

Physics

Pellicle and pellicle assembly

#86 | 2022-07-28

US20220236649A1

Physics

SPLIT DOUBLE SIDED WAFER AND RETICLE CLAMPS

#87 | 2022-07-14 ✅ Patent 12,292,697 granted on 2025-05-06

US20220221802A1

Physics

Self-referencing interferometer and dual self-referencing interferometer devices

#88 | 2022-07-07 ✅ Patent 11,887,881 granted on 2024-01-30

US20220216092A1

Electricity

Lithographic apparatus, substrate table, and non-uniform coating method

#89 | 2022-07-07 ✅ Patent 11,656,555 granted on 2023-05-23

US20220214622A1

Physics

Lithographic apparatus and illumination uniformity correction system

#90 | 2022-06-09 ✅ Patent 11,526,091 granted on 2022-12-13

US20220179331A1

Physics

Sensor apparatus and method for lithographic measurements

#91 | 2022-06-09 ✅ Patent 11,537,055 granted on 2022-12-27

US20220179330A1

Physics

Lithographic apparatus, metrology apparatus, optical system and method

#92 | 2022-05-12

US20220146948A1

Physics

ELECTROSTATIC CLAMP FOR A LITHOGRAPHIC APPARATUS

#93 | 2022-05-05 ✅ Patent 11,971,665 granted on 2024-04-30

US20220137523A1

Physics

Wafer alignment using form birefringence of targets or product

#94 | 2022-05-05

US20220134480A1

Performing operations; transporting

LASER ROUGHENING: ENGINEERING THE ROUGHNESS OF THE BURL TOP

#95 | 2022-04-14 ✅ Patent 11,927,889 granted on 2024-03-12

US20220113639A1

Physics

Intermediate layer for mechanical interface

#96 | 2022-03-31

US20220100109A1

Physics

APPARATUS FOR AND METHOD OF SIMULTANEOUSLY ACQUIRING PARALLEL ALIGNMENT MARKS

#97 | 2022-03-17 ✅ Patent 11,988,971 granted on 2024-05-21

US20220082953A1

Physics

Lithographic apparatus, substrate table, and method

#98 | 2022-03-10 ✅ Patent 11,550,231 granted on 2023-01-10

US20220075277A1

Physics

Apparatus for and method of in-situ particle removal in a lithography apparatus

#99 | 2022-03-03 ✅ Patent 11,493,852 granted on 2022-11-08

US20220066334A1

Physics

Noise correction for alignment signal

#100 | 2022-03-03 ✅ Patent 12,117,737 granted on 2024-10-15

US20220066332A1

Physics

Apparatus and method for cleaning a support structure in a lithographic system

Also check out ASML HOLDING N.V.'s (Veldhoven, Netherlands) applicant profile with 214 patent applications submitted.

AssigneeID:

3100 ⎘