Daniel J. Woodruff

Method and apparatus for post exposure processing of photoresist wafers

#2 | 2019-06-20

US20190187563A1

Method and apparatus for post exposure processing of photoresist wafers

#3 | 2018-10-18

US20180298513A1

Microelectronic substrate electro processing system

#4 | 2017-12-21

US20170363960A1

Method and apparatus for post exposure processing of photoresist wafers

#5 | 2017-06-01

US20170154797A1

Method and apparatus for post exposure processing of photoresist wafers

#6 | 2016-12-01

US20160348263A1

Electroplating apparatus

#7 | 2015-03-19

US20150075976A1

ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH

#8 | 2014-12-18

US20140367267A1

Electroplating tool with feedback of metal thickness distribution and correction

#9 | 2014-09-18

US20140266219A1

DETECTING ELECTROLYTE MENISCUS IN ELECTROPLATING PROCESSORS

#10 | 2014-09-18

US20140262795A1

ELECTROPLATING PROCESSOR WITH VACUUM ROTOR

#11 | 2014-06-05

US20140151218A1

Electroplating processor with thin membrane support

#12 | 2013-11-14

US20130299343A1

Electroplating processor with geometric electrolyte flow path

#13 | 2013-03-28

US20130075265A1

APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATURE WAFERS

#14 | 2013-03-14

US20130061875A1

Component cleaning in a metal plating apparatus

#15 | 2012-03-15

US20120060869A1

Single workpiece processing chamber

#16 | 2012-02-16

US20120037495A1

Deplating contacts in an electrochemical plating apparatus

#17 | 2011-02-24

US20110042224A1

Apparatus and methods for electrochemical processing of microfeature wafers

#18 | 2010-04-01

US20100078334A1

Electro-chemical processor

#19 | 2008-07-31

US20080181758A1

Microfeature workpiece transfer devices with rotational orientation sensors, and associated systems and methods

#20 | 2008-07-31

US20080179180A1

Apparatus and methods for electrochemical processing of microfeature wafers

#21 | 2008-07-31

US20080178460A1

Protected magnets and magnet shielding for processing microfeature workpieces, and associated systems and methods

#22 | 2008-07-01

US10733807

Integrated microfeature workpiece processing tools with registration systems for paddle reactors

#23 | 2008-04-15

US10234638

Electroplating apparatus with segmented anode array

#24 | 2008-02-28

US20080048306A1

Electro-chemical processor

#25 | 2008-02-26

US10194939

End-effectors for handling microelectronic wafers

#26 | 2008-01-17

US20080011334A1

Single side workpiece processing

#27 | 2008-01-03

US20080003781A1

Electro-chemical processor

#28 | 2007-10-16

US10195137

End-effectors for handling microelectronic workpieces

#29 | 2007-07-05

US20070151844A1

Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces

#30 | 2007-06-28

US20070144912A1

Linearly translating agitators for processing microfeature workpieces, and associated methods

#31 | 2007-05-31

US20070121123A1

End point detection in workpiece processing

#32 | 2007-05-17

US20070110895A1

SINGLE SIDE WORKPIECE PROCESSING

#33 | 2007-05-10

US20070104559A1

End-effectors for handling microelectronic workpieces

#34 | 2007-01-18

US20070014656A1

End-effectors and associated control and guidance systems and methods

#35 | 2007-01-11

US20070009344A1

Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces

#36 | 2007-01-04

US20070000527A1

Workpiece support for use in a process vessel and system for treating microelectronic workpieces

#37 | 2006-10-12

US20060226019A1

Die-level wafer contact for direct-on-barrier plating

#38 | 2006-10-10

US10154426

Electroplating reactor

#39 | 2006-08-08

US8680067

Plating system for semiconductor materials

#40 | 2006-07-11

US10157762

Modular semiconductor workpiece processing tool

#41 | 2006-06-29

US20060141809A1

Single side workpiece processing

#42 | 2006-02-23

US20060037855A1

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

#43 | 2006-02-21

US10721057

Semiconductor processing apparatus having lift and tilt mechanism

#44 | 2006-01-31

US10080914

Apparatus for manually and automatically processing microelectronic workpieces

#45 | 2005-12-20

US10620326

End-effectors and transfer devices for handling microelectronic workpieces

#46 | 2005-09-15

US20050199503A1

Single workpiece processing chamber with tilting load/unload upper rim

#47 | 2005-09-08

US20050193537A1

Modular semiconductor workpiece processing tool

#48 | 2005-09-01

US20050189213A1

Method and apparatus for copper plating using electroless plating and electroplating

#49 | 2005-07-28

US20050161336A1

Electroplating apparatus with segmented anode array

#50 | 2005-07-28

US20050161320A1

Electroplating apparatus with segmented anode array

#51 | 2005-07-26

US9882293

Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces

#52 | 2005-07-21

US20050155864A1

Adaptable electrochemical processing chamber

#53 | 2005-07-12

US9875365

Adaptable electrochemical processing chamber

#54 | 2005-05-26

US20050109612A1

Electroplating apparatus with segmented anode array

#55 | 2005-05-26

US20050109611A1

Electroplating apparatus with segmented anode array

#56 | 2005-05-26

US20050109088A1

Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces

#57 | 2005-05-10

US10167763

Reactor vessel having improved cup, anode and conductor assembly

#58 | 2005-03-22

US9998142

Methods and apparatus for processing the surface of a microelectronic workpiece

#59 | 2005-02-17

US20050034809A1

Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems

#60 | 2005-02-01

US10338200

Electroplating reactor including back-side electrical contact apparatus

#61 | 2005-01-13

US20050006241A1

Paddles and enclosures for enhancing mass transfer during processing of microfeature workpieces

#62 | 2005-01-06

US20050000817A1