Kalispell, Montana
United States
160
2011-10-04
136
2011-10-04
These are the the leading inventors for applications assigned to SEMITOOL, INC.:
SEMITOOL, INC. based in Kalispell, US has been assigned the rights to these inventions. The list includes both Pending Applications and Patent Grants:
Wafer handling system
#2 | 2011-02-24 ✅ Patent 8,313,631 granted on 2012-11-20Apparatus and methods for electrochemical processing of microfeature wafers
#3 | 2010-05-13Apparatus and method for electrochemically depositing metal on a semiconductor workpiece
#4 | 2010-04-01 ✅ Patent 7,909,967 granted on 2011-03-22Electro-chemical processor
#5 | 2009-05-07 ✅ Patent 7,585,398 granted on 2009-09-08Chambers, systems, and methods for electrochemically processing microfeature workpieces
#6 | 2009-04-28 ✅ Patent 7,524,406 granted on 2009-04-28Processing apparatus including a reactor for electrochemically etching microelectronic workpiece
#7 | 2009-01-22 ✅ Patent 7,934,898 granted on 2011-05-03High throughput semiconductor wafer processing
#8 | 2008-12-09 ✅ Patent 7,462,269 granted on 2008-12-09Method for low temperature annealing of metallization micro-structures in the production of a microelectronic device
#9 | 2008-10-30METHOD FOR ELECTROCHEMICALLY DEPOSITING METAL ONTO A MICROELECTRONIC WORKPIECE
#10 | 2008-08-26 ✅ Patent 7,416,611 granted on 2008-08-26Process and apparatus for treating a workpiece with gases
#11 | 2008-08-14 ✅ Patent 7,811,422 granted on 2010-10-12Electro-chemical processor with wafer retainer
#12 | 2008-07-31 ✅ Patent 7,842,173 granted on 2010-11-30Apparatus and methods for electrochemical processing of microfeature wafers
#13 | 2008-07-29 ✅ Patent 7,404,863 granted on 2008-07-29Methods of thinning a silicon wafer using HF and ozone
#14 | 2008-07-15 ✅ Patent 7,399,713 granted on 2008-07-15Selective treatment of microelectric workpiece surfaces
#15 | 2008-07-10 ✅ Patent 7,849,865 granted on 2010-12-14System for processing a workpiece
#16 | 2008-07-01 ✅ Patent 7,393,439 granted on 2008-07-01Integrated microfeature workpiece processing tools with registration systems for paddle reactors
#17 | 2008-05-15Microelectronic Workpiece Processing Tool Including A Processing Reactor Having A Paddle Assembly for Agitation of a Processing Fluid Proximate to the Workpiece
#18 | 2008-04-15 ✅ Patent 7,357,850 granted on 2008-04-15Electroplating apparatus with segmented anode array
#19 | 2008-04-10POST ETCH RESIDUE REMOVAL FROM SUBSTRATES
#20 | 2008-03-20 ✅ Patent 9,359,683 granted on 2016-06-07Method of forming metal and metal alloy features
#21 | 2008-03-13 ✅ Patent 7,898,089 granted on 2011-03-01Semiconductor workpiece
#22 | 2008-02-28 ✅ Patent 7,927,469 granted on 2011-04-19Electro-chemical processor
#23 | 2008-02-26 ✅ Patent 7,334,826 granted on 2008-02-26End-effectors for handling microelectronic wafers
#24 | 2008-02-21Method and system for depositing alloy composition
#25 | 2008-01-17 ✅ Patent 7,857,958 granted on 2010-12-28Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces
#26 | 2008-01-17Apparatus and Method for Thermally Controlled Processing of Microelectronic Workpieces
#27 | 2008-01-10 ✅ Patent 7,371,998 granted on 2008-05-13Thermal wafer processor
#28 | 2008-01-03 ✅ Patent 7,935,230 granted on 2011-05-03Electro-chemical processor
#29 | 2007-12-11 ✅ Patent 7,305,999 granted on 2007-12-11Centrifugal spray processor and retrofit kit
#30 | 2007-11-27 ✅ Patent 7,300,562 granted on 2007-11-27Platinum alloy using electrochemical deposition
#31 | 2007-11-15Reactors, systems, and methods for electroplating microfeature workpieces
#32 | 2007-11-13 ✅ Patent 7,294,244 granted on 2007-11-13Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
#33 | 2007-10-30 ✅ Patent 7,288,172 granted on 2007-10-30Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing
#34 | 2007-10-30 ✅ Patent 7,288,179 granted on 2007-10-30Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing
#35 | 2007-10-16 ✅ Patent 7,281,741 granted on 2007-10-16End-effectors for handling microelectronic workpieces
#36 | 2007-10-09 ✅ Patent 7,279,431 granted on 2007-10-09Vapor phase etching MEMS devices
#37 | 2007-10-09 ✅ Patent 7,278,813 granted on 2007-10-09Automated processing system
#38 | 2007-09-27TUNING ELECTRODES USED IN A REACTOR FOR ELECTROCHEMICALLY PROCESSING A MICROELECTRONIC WORKPIECE
#39 | 2007-09-11 ✅ Patent 7,267,749 granted on 2007-09-11Workpiece processor having processing chamber with improved processing fluid flow
#40 | 2007-09-04 ✅ Patent 7,264,680 granted on 2007-09-04Process and apparatus for treating a workpiece using ozone
#41 | 2007-09-04 ✅ Patent 7,264,698 granted on 2007-09-04Apparatus and methods for electrochemical processing of microelectronic workpieces
#42 | 2007-08-07 ✅ Patent 7,252,714 granted on 2007-08-07Apparatus and method for thermally controlled processing of microelectronic workpieces
#43 | 2007-07-24 ✅ Patent 7,247,223 granted on 2007-07-24Method and apparatus for controlling vessel characteristics, including shape and thieving current for processing microfeature workpieces
#44 | 2007-07-17 ✅ Patent 7,244,677 granted on 2007-07-17Method for filling recessed micro-structures with metallization in the production of a microelectronic device
#45 | 2007-07-05 ✅ Patent 7,931,786 granted on 2011-04-26Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces
#46 | 2007-06-14Apparatus and methods for electrochemical processing of microelectronic workpieces
#47 | 2007-06-12 ✅ Patent 7,229,543 granted on 2007-06-12Apparatus for controlling and/or measuring additive concentration in an electroplating bath
#48 | 2007-06-07 ✅ Patent 7,520,286 granted on 2009-04-21Apparatus and method for cleaning and drying a container for semiconductor workpieces
#49 | 2007-05-31 ✅ Patent 7,420,690 granted on 2008-09-02End point detection in workpiece processing
#50 | 2007-05-24Method for filling recessed micro-structures with metallization in the production of a microelectronic device
#51 | 2007-05-15 ✅ Patent 7,217,325 granted on 2007-05-15System for processing a workpiece
#52 | 2007-04-26Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
#53 | 2007-04-19 ✅ Patent 7,541,299 granted on 2009-06-02Method and apparatus for thermally processing microelectronic workpieces
#54 | 2007-04-19System for processing a workpiece
#55 | 2007-03-29 ✅ Patent 8,123,926 granted on 2012-02-28Electrolytic copper process using anion permeable barrier
#56 | 2007-03-13 ✅ Patent 7,189,318 granted on 2007-03-13Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
#57 | 2007-01-30 ✅ Patent 7,169,280 granted on 2007-01-30Apparatus and method for deposition of an electrophoretic emulsion
#58 | 2007-01-11 ✅ Patent 7,531,060 granted on 2009-05-12Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces
#59 | 2007-01-09 ✅ Patent 7,160,421 granted on 2007-01-09Turning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
#60 | 2006-12-19 ✅ Patent 7,150,816 granted on 2006-12-19Apparatus and method for deposition of an electrophoretic emulsion
#61 | 2006-12-12 ✅ Patent 7,147,765 granted on 2006-12-12Apparatus and method for deposition of an electrophoretic emulsion
#62 | 2006-12-05 ✅ Patent 7,144,459 granted on 2006-12-05Centrifugal swing arm spray processor
#63 | 2006-11-23Copper electrolytic process using cation permeable barrier
#64 | 2006-11-21 ✅ Patent 7,138,016 granted on 2006-11-21Semiconductor processing apparatus
#65 | 2006-11-14 ✅ Patent 7,135,404 granted on 2006-11-14Method for applying metal features onto barrier layers using electrochemical deposition
#66 | 2006-10-31 ✅ Patent 7,127,828 granted on 2006-10-31Lockdown rotor for a processing machine
#67 | 2006-10-26 ✅ Patent 8,236,159 granted on 2012-08-07Electrolytic process using cation permeable barrier
#68 | 2006-10-12Die-level wafer contact for direct-on-barrier plating
#69 | 2006-10-12 ✅ Patent 7,645,366 granted on 2010-01-12Microelectronic workpiece holders and contact assemblies for use therewith
#70 | 2006-10-10 ✅ Patent 7,118,658 granted on 2006-10-10Electroplating reactor
#71 | 2006-10-05APPARATUS FOR USE IN THINNING A SEMICONDUCTOR WORKPIECE
#72 | 2006-10-03 ✅ Patent 7,114,903 granted on 2006-10-03Apparatuses and method for transferring and/or pre-processing microelectronic workpieces
#73 | 2006-10-03 ✅ Patent 7,115,196 granted on 2006-10-03Apparatus and method for electrochemically depositing metal on a semiconductor workpiece
#74 | 2006-09-14 ✅ Patent 7,625,821 granted on 2009-12-01Process and apparatus for thinning a semiconductor workpiece
#75 | 2006-09-14PROCESS AND APPARATUS FOR THINNING A SEMICONDUCTOR WORKPIECE
#76 | 2006-09-05 ✅ Patent 7,102,763 granted on 2006-09-05Methods and apparatus for processing microelectronic workpieces using metrology
#77 | 2006-08-24Method for applying metal features onto barrier layers using ion permeable barriers
#78 | 2006-08-22 ✅ Patent 7,094,291 granted on 2006-08-22Semiconductor processing apparatus
#79 | 2006-08-15 ✅ Patent 7,090,751 granted on 2006-08-15Apparatus and methods for electrochemical processing of microelectronic workpieces
#80 | 2006-08-08 ✅ Patent 7,087,143 granted on 2006-08-08Plating system for semiconductor materials
#81 | 2006-07-27Electrolytic process using anion permeable barrier
#82 | 2006-07-20Electrolytic process using anion permeable barrier
#83 | 2006-07-11 ✅ Patent 7,074,246 granted on 2006-07-11Modular semiconductor workpiece processing tool
#84 | 2006-07-06 ✅ Patent 7,794,573 granted on 2010-09-14Systems and methods for electrochemically processing microfeature workpieces
#85 | 2006-06-27 ✅ Patent 7,067,018 granted on 2006-06-27Automated system for handling and processing wafers within a carrier
#86 | 2006-06-08 ✅ Patent 7,288,489 granted on 2007-10-30Process for thinning a semiconductor workpiece
#87 | 2006-05-23 ✅ Patent 7,048,841 granted on 2006-05-23Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces
#88 | 2006-05-18 ✅ Patent 7,144,813 granted on 2006-12-05Method and apparatus for thermally processing microelectronic workpieces
#89 | 2006-04-20Method for applying metal features onto metallized layers using electrochemical deposition and alloy treatment
#90 | 2006-04-13Method for applying metal features onto metallized layers using electrochemical deposition
#91 | 2006-04-13Method for applying metal features onto metallized layers using electrochemical deposition and electrolytic treatment
#92 | 2006-04-13Method for applying metal features onto metallized layers using electrochemical deposition using acid treatment
#93 | 2006-04-06 ✅ Patent 7,429,537 granted on 2008-09-30Methods and apparatus for rinsing and drying
#94 | 2006-03-28 ✅ Patent 7,020,537 granted on 2006-03-28Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece
#95 | 2006-02-28 ✅ Patent 7,005,010 granted on 2006-02-28Multi-process system
#96 | 2006-02-23 ✅ Patent 7,193,295 granted on 2007-03-20Process and apparatus for thinning a semiconductor workpiece
#97 | 2006-02-23 ✅ Patent 7,354,649 granted on 2008-04-08Semiconductor workpiece
#98 | 2006-02-21 ✅ Patent 7,002,698 granted on 2006-02-21Semiconductor processing apparatus having lift and tilt mechanism
#99 | 2006-02-21 ✅ Patent 7,001,471 granted on 2006-02-21Method and apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device
#100 | 2006-02-16 ✅ Patent 7,628,898 granted on 2009-12-08Method and system for idle state operation
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