Jeffrey L. Libbert

METHODS OF PROCESSING SEMICONDUCTOR-ON-INSULATOR STRUCTURES USING CLEAN-AND-ETCH OPERATION

SYSTEMS AND METHODS FOR REACTOR APPARATUS CONTROL DURING SEMICONDUCTOR WAFER PROCESSES

METHODS FOR CONTROLLING FLATNESS OF HANDLE STRUCTURES FOR USE IN SEMICONDUCTOR-ON-INSULATOR STRUCTURES

RECLAIMABLE DONOR SUBSTRATES FOR USE IN PREPARING MULTIPLE SILICON-ON-INSULATOR STRUCTURES

HIGH RESISTIVITY SILICON-ON-INSULATOR SUBSTRATE COMPRISING AN ISOLATION REGION

METHODS OF PREPARING SILICON-ON-INSULATOR STRUCTURES USING EPITAXIAL WAFERS

METHODS OF MANUFACTURING SEMICONDUCTOR-ON-INSULATOR WAFERS HAVING CHARGE TRAPPING LAYERS WITH CONTROLLED STRESS

Radio frequency silicon on insulator structure with superior performance, stability, and manufacturability

High resistivity silicon-on-insulator substrate comprising an isolation region

Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturability

High resistivity semiconductor-on-insulator wafer and a method of manufacture

Radio frequency silicon on insulator structure with superior performance, stability, and manufacturability

Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturability

Method of preparing an isolation region in a high resistivity silicon-on-insulator substrate

High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency

Method of preparing an isolation region in a high resistivity silicon-on-insulator substrate

High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency

Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress

High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency

Methods for assessing semiconductor structures

Method of manufacture of a semiconductor on insulator structure

Radio frequency silicon on insulator wafer platform with superior performance, stability, and manufacturability

Radio frequency silicon on insulator structure with superior performance, stability, and manufacturability

Method of preparing an isolation region in a high resistivity silicon-on-insulator substrate

High resistivity semiconductor-on-insulator wafer and a method of manufacturing

Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress

High resistivity silicon-on-insulator substrate comprising a charge trapping layer formed on a substrate with a rough surface

Method of manufacture of a semiconductor on insulator structure

Method of manufacturing high resistivity semiconductor-on-insulator wafers with charge trapping layers

Methods for assessing semiconductor structures

Method of depositing charge trapping polycrystalline silicon films on silicon substrates with controllable film stress

High resistivity silicon-on-insulator substrate comprising an isolation region

High resistivity silicon-on-insulator substrate having enhanced charge trapping efficiency

High resistivity silicon-on-insulator substrate comprising an isolation region

Method of manufacturing high resistivity semiconductor-on-insulator wafers with charge trapping layers

High resistivity semiconductor-on-insulator wafer and a method of manufacturing

Process flow for manufacturing semiconductor on insulator structures in parallel

METHODS FOR PREPARING LAYERED SEMICONDUCTOR STRUCTURES AND RELATED BONDED STRUCTURES

Clamping apparatus for cleaving a bonded wafer structure and methods for cleaving

Method of manufacturing high resistivity SOI substrate with reduced interface conductivity

Method to delineate crystal related defects

Semiconductor-on-insulator wafer manufacturing method for reducing light point defects and surface roughness

Method for low temperature layer transfer in the preparation of multilayer semiconductor devices

Method of manufacturing silicon-on-insulator wafers

METHOD FOR THE PREPARATION OF A MULTI-LAYERED CRYSTALLINE STRUCTURE

Clamping apparatus for cleaving a bonded wafer structure

Methods for cleaving a bonded wafer structure

Systems and methods for cleaving a bonded wafer pair

Methods for producing silicon on insulator structures having high resistivity regions in the handle wafer

SILICON ON INSULATOR STRUCTURES HAVING HIGH RESISTIVITY REGIONS IN THE HANDLE WAFER

Methods for monitoring the amount of metal contamination in a process

METHODS FOR DETECTING METAL PRECIPITATES IN A SEMICONDUCTOR WAFER

METHODS FOR MONITORING THE AMOUNT OF METAL CONTAMINATION IMPARTED INTO WAFERS DURING A SEMICONDUCTOR PROCESS

Method for the preparation of a multi-layered crystalline structure

Methods for monitoring the amount of contamination imparted into semiconductor wafers during wafer processing

METHOD FOR PROCESSING A SILICON-ON-INSULATOR STRUCTURE

Process for producing silicon on insulator structure having intrinsic gettering by ion implantation

Silicon on insulator structure having an epitaxial layer and intrinsic gettering

Method for controlling of thermal donor formation in high resistivity CZ silicon

Low defect density silicon having a vacancy-dominated core substantially free of oxidation induced stacking faults

Control of oxygen precipitate formation in high resistivity CZ silicon

Process for making silicon wafers with stabilized oxygen precipitate nucleation centers

Low defect density silicon having a vacancy-dominated core substantially free of oxidation induced stacking faults