Easton, Connecticut
United States
12
2015-09-10
The entities that hold a legal rights for patent applications filed by inventor KOCHERSPERGER Peter C.:
Peter C. KOCHERSPERGER from Easton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Linear Motor and Lithography Arrangement Including Linear Motor
#2 | 2014-05-29Lithographic apparatus and device manufacturing method
#3 | 2013-04-25Lithographic apparatus and device manufacturing method
#4 | 2013-03-14Linear motor and lithography arrangement including linear motor
#5 | 2010-12-02Lithographic apparatus and method for illumination uniformity correction and uniformity drift compensation
#6 | 2009-02-19Real time telecentricity measurement
#7 | 2008-12-04Lithographic apparatus and device manufacturing method
#8 | 2007-08-16Pressure sensor
#9 | 2007-08-02Pressure sensor
#10 | 2007-01-16Lithographic tool with dual isolation system and method for configuring the same
#11 | 2006-05-04Lithographic tool with dual isolation system and method for configuring the same
#12 | 2005-03-31Lithographic apparatus and device manufacturing method
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