Gilroy, California
United States
14
2020-03-19
The entities that hold a legal rights for patent applications filed by inventor JOHANSON WILLIAM:
WILLIAM JOHANSON from Gilroy, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus for enhancing flow uniformity in a process chamber
#2 | 2019-08-22METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGET LIFE
#3 | 2019-06-20Methods and apparatus for substrate edge uniformity
#4 | 2018-05-31Biased cover ring for a substrate processing system
#5 | 2018-05-24Process kit having a floating shadow ring
#6 | 2017-04-06Integrated process kit for a substrate processing chamber
#7 | 2017-03-16One-piece process kit shield for reducing the impact of an electric field near the substrate
#8 | 2017-01-05Process kit having tall deposition ring and deposition ring clamp
#9 | 2016-02-25Methods and apparatus for maintaining low non-uniformity over target life
#10 | 2016-02-04Magnetron assembly for physical vapor deposition chamber
#11 | 2014-09-18Methods for processing a substrate using multiple substrate support positions
#12 | 2014-09-18Selectively groundable cover ring for substrate process chambers
#13 | 2010-06-15Dual seal deposition process chamber and process
#14 | 2008-04-03Apparatus and method for delivering uniform fluid flow in a chemical deposition system
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