Stephen E. SAVAS

City:

Fremont, California

Country:

United States

Published Applications:

Last publication date:

2016-04-21

Top Assignees for applications by Stephen E. SAVAS

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Stephen E. SAVAS from Fremont, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Method for depositing a multi-layer moisture barrier on electronic devices and electronic devices protected by a multi-layer moisture barrier

METHOD AND APPARATUS FOR GROWING THIN OXIDE FILMS ON SILICON WHILE MINIMIZING IMPACT ON EXISTING STRUCTURES

Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structures

Advanced multi-workpiece processing chamber

Post ion implant photoresist strip using a pattern fill and method

System and method for removal of photoresist and stop layer following contact dielectric etch

System and method for removal of photoresist and residues following contact etch with a stop layer present

System and method for removal of photoresist in transistor fabrication for integrated circuit manufacturing

InventorID:

1507958 ⎘