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ANNEAL CHAMBER

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ELECTROPLATING CHAMBER USING JET ARRAY TO ENABLE HIGH MASS-TRANSFER

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MODEL-BASED PARAMETER ADJUSTMENTS FOR DEPOSITION PROCESSES

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ELECTROPLATING SYSTEMS AND METHODS WITH INCREASED METAL ION CONCENTRATIONS

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ELECTROPLATING SYSTEMS AND METHODS WITH INCREASED METAL ION CONCENTRATIONS

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Plating and deplating currents for material co-planarity in semiconductor plating processes

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Parameter adjustment model for semiconductor processing chambers

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Mechanically-driven oscillating flow agitation

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Mechanically-driven oscillating flow agitation

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Multi-compartment electrochemical replenishment cell

#23 | 2021-11-11

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Electroplating system

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Mechanically-driven oscillating flow agitation

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Electroplating apparatus with electrolyte agitation

#26 | 2017-12-21

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WAFER PROCESSOR DOOR INTERFACE

#27 | 2017-12-14

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Removing photoresist from a wafer

#28 | 2017-11-23

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Electroplating apparatus with current crowding adapted contact ring seal and thief electrode

#29 | 2017-10-05

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Electroplating wafers having a pattern induced non-uniformity

#30 | 2017-05-18

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Inert anode electroplating processor and replenisher with anionic membranes

#31 | 2017-03-02

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Electroplating processor with current thief electrode

#32 | 2017-02-23

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Adaptive electric field shielding in an electroplating processor using agitator geometry and motion control

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Electroplating apparatus with electrolyte agitation

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Inert anode electroplating processor and replenisher

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Electroplating apparatus with membrane tube shield

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#37 | 2016-12-01

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Electroplating apparatus

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Electroplating wafers having a notch

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ELECTROPLATING WITH REDUCED AIR BUBBLE DEFECTS

#40 | 2016-07-28

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Electroplating apparatus with notch adapted contact ring seal and thief electrode

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Electroplating apparatus with membrane tube shield

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ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH

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AUTOMATIC IN-SITU CONTROL OF AN ELECTRO-PLATING PROCESSOR

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Electroplating systems and methods for high sheet resistance substrates

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Electroplating processor with geometric electrolyte flow path

#48 | 2013-06-13

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Electro processor with shielded contact ring

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PROCESSING APPARATUS WITH VERTICAL LIQUID AGITATION

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WORKPIECE WETTING AND CLEANING

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Mechanical engineering

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Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

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Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

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Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

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Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

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System for electrochemically processing a workpiece

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Apparatus and methods for electrochemical processing of microelectronic workpieces

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Tuning electrodes used in a reactor for electrochemically processing a microelectronics workpiece

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Tuning electrodes used in a reactor for electrochemically processing a microelectronic workpiece

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System for electrochemically processing a workpiece

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System for electrochemically processing a workpiece

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