Robert Mitchell

City:

Winchester, Massachusetts

Country:

United States

Published Applications:

Last publication date:

2023-06-15

Top Assignees for applications by Robert Mitchell

The entities that hold a legal rights for patent applications filed by inventor Mitchell Robert:

Applied Materials, Inc. 6 Santa Clara, CA United States
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. 3 Gloucester, MA United States
Axcelis Technologies Inc. 1 Beverly, MA United States

Recent patent applications by Mitchell Robert

Robert Mitchell from Winchester, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2023-06-15

US20230187166A1

Electricity

Spinning disk with electrostatic clamped platens for ion implantation

#2 | 2023-06-08

US20230178405A1

Electricity

System and method for controlling electrostatic clamping of multiple platens on a spinning disk

#3 | 2019-10-03

US20190301616A1

Mechanical engineering

Cryogenic ferrofluid sealed rotary union

#4 | 2019-06-27

US20190198368A1

Electricity

Wafer processing systems including multi-position batch load lock apparatus with temperature control capability

#5 | 2019-06-13

US20190181028A1

Electricity

Cryogenically cooled rotatable electrostatic chuck

#6 | 2016-09-29

US20160284578A1

Electricity

Wafer processing systems including multi-position batch load lock apparatus with temperature control capability

#7 | 2014-09-18

US20140271054A1

Electricity

Multi-position batch load lock apparatus and systems and methods including same

#8 | 2012-09-27

US20120244692A1

Electricity

INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION

#9 | 2012-04-05

US20120083102A1

Electricity

Integrated shadow mask/carrier for patterned ion implantation

#10 | 2008-05-08

US20080105836A1

Electricity

Workpiece handling scan arm for ion implantation system

InventorID:

1666102 ⎘