Eindhoven
Netherlands
26
2026-04-16
The entities that hold a legal rights for patent applications filed by inventor NAKIBOGLU Günes:
Günes NAKIBOGLU from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS
#2 | 2025-01-16ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
#3 | 2024-05-30TEMPERATURE CONDITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD OF TEMPERATURE CONDITIONING AN OBJECT
#4 | 2023-11-16RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS
#5 | 2022-11-03Temperature conditioning system
#6 | 2021-05-13Substrate holder, a lithographic apparatus and method of manufacturing devices
#7 | 2020-12-24Radiation shielding device and apparatus comprising such shielding device
#8 | 2020-12-03Measurement system, lithographic apparatus and device manufacturing method
#9 | 2020-06-11Substrate holder, a lithographic apparatus and method of manufacturing devices
#10 | 2020-05-28Method for removing photosensitive material on a substrate
#11 | 2020-04-23Radiation Source Module and Lithographic Apparatus
#12 | 2019-08-29Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus
#13 | 2019-06-27Patterning device cooling apparatus
#14 | 2019-04-25Patterning device cooling apparatus
#15 | 2019-02-07Lithographic apparatus and device manufacturing method
#16 | 2018-12-20Substrate table, lithographic apparatus and method of operating a lithographic apparatus
#17 | 2018-12-13Patterning device cooling apparatus
#18 | 2018-10-18Lithographic apparatus
#19 | 2018-08-23Lithographic apparatus and method
#20 | 2018-04-12Lithographic Apparatus
#21 | 2018-03-15Lithography apparatus and a method of manufacturing a device
#22 | 2017-09-14Lithographic apparatus and device manufacturing method
#23 | 2017-08-03Lithographic apparatus and method
#24 | 2017-06-08Lithographic apparatus and device manufacturing method
#25 | 2017-03-30Lithographic apparatus
#26 | 2016-12-01Lithographic apparatus and device manufacturing method
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