Inventor profile of:

Günes NAKIBOGLU

City:

Eindhoven

Country:

Netherlands

Published Applications:

26

Last publication date:

2026-04-16

Top Assignees for applications by Günes NAKIBOGLU

The entities that hold a legal rights for patent applications filed by inventor NAKIBOGLU Günes:

Recent patent applications by NAKIBOGLU Günes

Günes NAKIBOGLU from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2026-04-16
US20260104647A1
Physics

RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS

#2 | 2025-01-16
US20250021022A1
Physics

ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS

#3 | 2024-05-30
US20240176255A1
Physics

TEMPERATURE CONDITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A METHOD OF TEMPERATURE CONDITIONING AN OBJECT

#4 | 2023-11-16
US20230367224A1
Physics

RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS

#5 | 2022-11-03
US20220350265A1
Physics

Temperature conditioning system

#6 | 2021-05-13
US20210141312A1
Physics

Substrate holder, a lithographic apparatus and method of manufacturing devices

#7 | 2020-12-24
US20200401058A1
Physics

Radiation shielding device and apparatus comprising such shielding device

#8 | 2020-12-03
US20200379360A1
Physics

Measurement system, lithographic apparatus and device manufacturing method

#9 | 2020-06-11
US20200183287A1
Physics

Substrate holder, a lithographic apparatus and method of manufacturing devices

#10 | 2020-05-28
US20200166845A1
Physics

Method for removing photosensitive material on a substrate

#11 | 2020-04-23
US20200124976A1
Physics

Radiation Source Module and Lithographic Apparatus

#12 | 2019-08-29
US20190265597A1
Physics

Substrate table, a lithographic apparatus and a method of operating a lithographic apparatus

#13 | 2019-06-27
US20190196345A1
Physics

Patterning device cooling apparatus

#14 | 2019-04-25
US20190121248A1
Physics

Patterning device cooling apparatus

#15 | 2019-02-07
US20190041761A1
Physics

Lithographic apparatus and device manufacturing method

#16 | 2018-12-20
US20180364584A1
Physics

Substrate table, lithographic apparatus and method of operating a lithographic apparatus

#17 | 2018-12-13
US20180356740A1
Physics

Patterning device cooling apparatus

#18 | 2018-10-18
US20180299796A1
Physics

Lithographic apparatus

#19 | 2018-08-23
US20180239258A1
Physics

Lithographic apparatus and method

#20 | 2018-04-12
US20180101099A1
Physics

Lithographic Apparatus

#21 | 2018-03-15
US20180074416A1
Physics

Lithography apparatus and a method of manufacturing a device

#22 | 2017-09-14
US20170261864A1
Physics

Lithographic apparatus and device manufacturing method

#23 | 2017-08-03
US20170219930A1
Physics

Lithographic apparatus and method

#24 | 2017-06-08
US20170160653A1
Physics

Lithographic apparatus and device manufacturing method

#25 | 2017-03-30
US20170090296A1
Physics

Lithographic apparatus

#26 | 2016-12-01
US20160349631A1
Physics

Lithographic apparatus and device manufacturing method

InventorID:

1725546