Wilton, Connecticut
United States
17
2026-04-02
The entities that hold a legal rights for patent applications filed by inventor UITTERDIJK Tammo:
Tammo UITTERDIJK from Wilton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
ELECTROSTATIC CLAMP WITH A STRUCTURED ELECTRODE BY POST BOND STRUCTURING
#2 | 2025-11-06SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE VOLTAGE TO AN OXIDIZED WAFER
#3 | 2025-05-01SYSTEMS AND METHODS FOR CLEANING A PORTION OF A LITHOGRAPHY APPARATUS
#4 | 2024-11-07METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
#5 | 2024-07-25MODULAR WAFER TABLE AND METHODS OF MANUFACTURING THEREOF
#6 | 2024-05-30CLAMP ELECTRODE MODIFICATION FOR IMPROVED OVERLAY
#7 | 2023-11-30VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBSTRATE TABLES
#8 | 2023-10-05SUB MICRON PARTICLE DETECTION ON BURL TOPS BY APPLYING A VARIABLE VOLTAGE TO AN OXIDIZED WAFER
#9 | 2023-07-27Object holder, electrostatic sheet and method for making an electrostatic sheet
#10 | 2023-02-02WAFER CLAMP HARD BURL PRODUCTION AND REFURBISHMENT
#11 | 2022-03-17Lithographic apparatus, substrate table, and method
#12 | 2021-12-30Method to manufacture nano ridges in hard ceramic coatings
#13 | 2021-07-01Burls with altered surface topography for holding an object in lithography applications
#14 | 2018-11-08Chucks and clamps for holding objects of a lithographic apparatus and methods for controlling a temperature of an object held by a clamp of a lithographic apparatus
#15 | 2018-09-20Lithographic apparatus and method
#16 | 2017-08-24Electrostatic clamp and a method for manufacturing the same
#17 | 2015-12-24Lithographic apparatus and method
1757046 ⎘