Eindhoven
Netherlands
19
2024-09-12
The entities that hold a legal rights for patent applications filed by inventor PÉTER Mária:
Mária PÉTER from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
METAL-SILICIDE-NITRIDATION FOR STRESS REDUCTION
#2 | 2024-01-25PELLICLE AND PELLICLE ASSEMBLY
#3 | 2024-01-04MEMBRANE FOR EUV LITHOGRAPHY
#4 | 2023-10-12Metal-silicide-nitridation for stress reduction
#5 | 2022-08-11Pellicle and pellicle assembly
#6 | 2022-04-21Pellicle and pellicle assembly
#7 | 2021-07-08Pellicle and pellicle assembly
#8 | 2021-06-17Metal-silicide-nitridation for stress reduction
#9 | 2020-12-31Graphene pellicle lithographic apparatus
#10 | 2020-10-08Pellicle frame and pellicle assembly
#11 | 2020-05-21Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
#12 | 2020-02-27Pellicle and pellicle assembly
#13 | 2019-05-16Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
#14 | 2019-05-02Membrane for EUV lithography
#15 | 2019-02-21METHOD OF MANUFACTURING A PELLICLE FOR A LITHOGRAPHIC APPARATUS, A PELLICLE FOR A LITHOGRAPHIC APPARATUS, A LITHOGRAPHIC APPARATUS, A DEVICE MANUFACTURING METHOD, AN APPARATUS FOR PROCESSING A PELLICLE, AND A METHOD FOR PROCESSING A PELLICLE
#16 | 2019-01-10Membrane for EUV lithography
#17 | 2018-12-20Pellicle and pellicle assembly
#18 | 2018-08-23Method for manufacturing a membrane assembly
#19 | 2017-07-20Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
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