Anthony Dip

SHOWERHEAD FOR PROCESS TOOL

Multiple zone gas injection for control of gas phase radicals

Showerhead for process tool

Spatial atomic layer deposition

System and Method for Thermally Cracking Ammonia

Multiple zone gas injection for control of gas phase radicals

Method and apparatus for multi-film deposition and etching in a batch processing system

Method of forming strained epitaxial carbon-doped silicon films

Multilayer sidewall spacer for seam protection of a patterned structure

Dual sidewall spacer for seam protection of a patterned structure

Low-temperature dielectric film formation by chemical vapor deposition

In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition

Method for growing an oxynitride film on a substrate

THERMAL PROCESSING SYSTEM AND METHOD FOR FORMING AN OXIDE LAYER ON SUBSTRATES

Method for growing a thin oxynitride film on a substrate

Atomic layer deposition systems and methods

Reduced defect silicon or silicon germanium deposition in micro-features

Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing system

In-situ formation of oxidized aluminum nitride films

Method for replacing a nitrous oxide based oxidation process with a nitric oxide based oxidation process for substrate processing

Sequential oxide removal using fluorine and hydrogen

Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto

Interrupted deposition process for selective deposition of Si-containing films

Sequential deposition process for forming Si-containing films

Low temperature formation of patterned epitaxial Si containing films

Low-temperature oxide removal using fluorine

IN-SITU ATOMIC LAYER DEPOSITION

Built-in self test for a thermal processing system

Method and system for removing an oxide from a substrate

Micro-feature fill process and apparatus using hexachlorodisilane or other chlorine-containing silicon precursor

Semiconductor wafer susceptor

Method for extending time between chamber cleaning processes

Wafer heater assembly

Silicon germanium surface layer for high-k dielectric integration

Silicon-germanium thin layer semiconductor structure with variable silicon-germanium composition and method of fabrication

Deposition of silicon-containing films from hexachlorodisilane

Method of oxidizing work pieces and oxidation system

Multiple grow-etch cyclic surface treatment for substrate preparation

Method of forming uniform ultra-thin oxynitride layers

Formation of ultra-thin oxide layers by self-limiting interfacial oxidation