Nuth
Netherlands
35
2026-03-12
The entities that hold a legal rights for patent applications filed by inventor KOOLEN Armand Eugene Albert:
Armand Eugene Albert KOOLEN from Nuth, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
LITHOGRAPHIC APPARATUS, METROLOGY SYSTEMS FOR CONTROLLING OPTICAL ABERRATIONS, AND METHOD THEREOF
#2 | 2025-07-17METHOD AND APPARATUS FOR ILLUMINATION ADJUSTMENT
#3 | 2025-05-08METROLOGY METHOD AND ASSOCIATED METROLOGY DEVICE
#4 | 2025-05-01METROLOGY METHOD AND DEVICE
#5 | 2024-09-26METROLOGY SYSTEM AND METHOD FOR DETERMINING A CHARACTERISTIC OF ONE OR MORE STRUCTURES ON A SUBSTRATE
#6 | 2024-06-06METROLOGY TOOL CALIBRATION METHOD AND ASSOCIATED METROLOGY TOOL
#7 | 2024-02-01METHOD OF METROLOGY AND ASSOCIATED APPARATUSES
#8 | 2024-02-01A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAST ONE PATTERNING DEVICE, LITHOGRAPHIC METHOD AND METROLOGY METHOD
#9 | 2023-06-08Substrate comprising a target arrangement, and associated at least one patterning device, lithographic method and metrology method
#10 | 2023-03-02Metrology system and method for determining a characteristic of one or more structures on a substrate
#11 | 2022-11-03A METHOD FOR FILTERING AN IMAGE AND ASSOCIATED METROLOGY APPARATUS
#12 | 2021-01-07Metrology system and method for determining a characteristic of one or more structures on a substrate
#13 | 2020-06-18Method of measuring a parameter of a lithographic process, metrology apparatus
#14 | 2020-06-18Method of measuring a parameter of a patterning process, metrology apparatus, target
#15 | 2019-10-17Metrology method and apparatus, computer program and lithographic system
#16 | 2019-08-15Method and apparatus for measuring a parameter of interest using image plane detection techniques
#17 | 2019-05-16Metrology method and apparatus, computer program and lithographic system
#18 | 2019-05-02Metrology apparatus, method of measuring a structure, device manufacturing method
#19 | 2019-04-11Metrology system and method for determining a characteristic of one or more structures on a substrate
#20 | 2019-03-28Metrology method and device
#21 | 2018-12-06Metrology apparatus, lithographic system, and method of measuring a structure
#22 | 2018-10-11Radiation receiving system
#23 | 2018-06-21Method for monitoring a characteristic of illumination from a metrology apparatus
#24 | 2018-06-21Metrology apparatus, lithographic system, and method of measuring a structure
#25 | 2018-03-15Metrology method, apparatus and computer program
#26 | 2018-02-15Variable corrector of a wave front
#27 | 2017-08-31Beam homogenizer, illumination system and metrology system
#28 | 2017-07-06Method and device for focusing in an inspection system
#29 | 2017-06-22Focus control arrangement and method
#30 | 2017-04-06Metrology method and apparatus, computer program and lithographic system
#31 | 2017-03-09Metrology method and apparatus, substrate, lithographic system and device manufacturing method
#32 | 2015-05-21Metrology method and apparatus, substrate, lithographic system and device manufacturing method
#33 | 2013-04-25Metrology method and apparatus, and device manufacturing method
#34 | 2011-02-24Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate
#35 | 2010-12-16Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
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