Eindhoven
Netherlands
17
2018-02-01
The entities that hold a legal rights for patent applications filed by inventor BOTMA Hako:
Hako BOTMA from Eindhoven, NL has applied for patents for these inventions. The list has both pending applications and granted patents:
Radiation system
#2 | 2011-06-23Lithographic apparatus and method
#3 | 2009-06-25Pulse modifier, lithographic apparatus and device manufacturing method
#4 | 2009-03-26Electromagnetic radiation pulse duration control apparatus and method
#5 | 2008-03-20Lithographic apparatus, beam delivery systems, prisms and device manufacturing method
#6 | 2007-07-26Lithographic apparatus and device manufacturing method
#7 | 2007-04-26Beam modifying device, lithographic projection apparatus, method of treating a beam, and device manufacturing method
#8 | 2007-03-15Lithographic apparatus and device manufacturing method
#9 | 2006-10-31Lithographic apparatus, mirror element, device manufacturing method, and beam delivery system
#10 | 2006-06-15Pulse modifier, lithographic apparatus, and device manufacturing method
#11 | 2005-12-08Lithographic apparatus and device manufacturing method
#12 | 2005-12-08Illumination assembly, method for providing a radiation beam, lithographic projection apparatus and device manufacturing method
#13 | 2005-12-01Lithographic apparatus and device manufacturing method
#14 | 2005-10-06Lithographic apparatus, illumination system, and optical element for rotating an intensity distribution
#15 | 2005-08-02Lithographic apparatus and device manufacturing method
#16 | 2005-07-07Lithographic apparatus and device manufacturing method
#17 | 2005-06-30Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method
2106066 ⎘